H01L2224/08123

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

The present technology relates to a semiconductor device in which a MIM capacitive element can be formed without any process damage, and a method for manufacturing the semiconductor device. In a semiconductor device, wiring layers of a first multilayer wiring layer formed on a first semiconductor substrate and a second multilayer wiring layer formed on a second semiconductor substrate are bonded to each other by wafer bonding. The semiconductor device includes a capacitive element including an upper electrode, a lower electrode, and a capacitive insulating film between the upper electrode and the lower electrode. One electrode of the upper electrode and the lower electrode is formed with a first conductive layer of the first multilayer wiring layer and a second conductive layer of the second multilayer wiring layer. The present technology can be applied to a semiconductor device or the like formed by joining two semiconductor substrates, for example.

FIRST WAFER, FABRICATING METHOD THEREOF AND WAFER STACK
20210057359 · 2021-02-25 ·

A first wafer, a method of fabricating thereof and a wafer stack are disclosed. The first wafer includes a first substrate, a first dielectric layer on the first substrate, first metal layers embedded in the first dielectric layer, first switching holes extending partially through the first dielectric layer and exposing the first metal layers, a first interconnection layer filling up the first switching holes and electrically connected to the first metal layers, a first insulating layer residing on surfaces of both the first dielectric layer and the first interconnection layer, first contact holes extending through the first insulating layer and exposing the first interconnection layer, and a second interconnection layer filling up the first contact holes and electrically connected to the first interconnection layer. Filling the first contact holes and the first switching holes with different interconnection layers reduces the difficulty in fabricating interconnection structures for the first metal layers.

LIGHT-EMITTING DIODE DEVICE WITH DRIVING MECHANISM
20210066270 · 2021-03-04 ·

A light-emitting diode device with a driving mechanism is provided. A first light-emitting diode chip, a second light-emitting diode chip and a third light-emitting diode chip are arranged on a driver circuit chip, and respectively configured to emit red light, green light and blue light. A first contact of the light-emitting diode chip, a first contact of the second light-emitting diode chip and a first contact of the third light-emitting diode chip are respectively in direct electrical contact with a first output contact, a second output contact and a third output contact of the driver circuit chip in a flip-chip manner. A second contact of the first light-emitting diode chip, a second contact of the second light-emitting diode chip and a second contact of the third light-emitting diode chip are in direct electrical contact with a common contact of the driver circuit chip.

STACKING STRUCTURE, PACKAGE STRUCTURE AND METHOD OF FABRICATING THE SAME

A package structure includes a plurality of stacked die units and an insulating encapsulant. The plurality of stacked die units is stacked on top of one another, where each of the plurality of stacked die units include a first semiconductor die, a first bonding chip. The first semiconductor die has a plurality of first bonding pads. The first bonding chip is stacked on the first semiconductor die and has a plurality of first bonding structure. The plurality of first bonding structures is bonded to the plurality of first bonding pads through hybrid bonding. The insulating encapsulant is encapsulating the plurality of stacked die units.

SEMICONDUCTOR DEVICE AND ELECTRONIC APPARATUS
20200365632 · 2020-11-19 · ·

The present disclosure relates to a semiconductor device and an electronic apparatus which is capable of reducing variations and deterioration of transistor characteristics.

A first connection pad connected with a first wiring and a first floating metal greater than the first connection pad are formed at a bonding surface of a first substrate, whereas a second connection pad connected with a second wiring and a second floating metal greater than the second connection pad are formed at a bonding surface of a second substrate. The first floating metal and the second floating metal formed at the first substrate and the second substrate are bonded to each other. The present disclosure is applicable to a CMOS solid-state imaging device used for an imaging apparatus such as a camera, for example.

Flat metal features for microelectronics applications
10840135 · 2020-11-17 · ·

Advanced flat metals for microelectronics are provided. While conventional processes create large damascene features that have a dishing defect that causes failure in bonded devices, example systems and methods described herein create large damascene features that are planar. In an implementation, an annealing process creates large grains or large metallic crystals of copper in large damascene cavities, while a thinner layer of copper over the field of a substrate anneals into smaller grains of copper. The large grains of copper in the damascene cavities resist dishing defects during chemical-mechanical planarization (CMP), resulting in very flat damascene features. In an implementation, layers of resist and layers of a second coating material may be applied in various ways to resist dishing during chemical-mechanical planarization (CMP), resulting in very flat damascene features.

3D stack of electronic chips

A 3D stack includes a first chip having first interconnection pads of rectangular section, the first interconnection pads having a first pitch in a first direction and a second pitch in a second direction perpendicular to the first direction; and a second chip having second interconnection pads, the second interconnection pads having a third pitch in the first direction and a fourth pitch in the second direction, at least one part of the second interconnection pads being in contact with the first interconnection pads to electrically couple the first and second chips. The first interconnection pads have a first dimension in the first direction equal to m times the third pitch and a second dimension in the second direction equal to n times the fourth pitch. The first interconnection pads are separated two by two in the first direction by a first distance equal to q times the third pitch.

Semiconductor device and electronic apparatus
10770490 · 2020-09-08 · ·

The present disclosure relates to a semiconductor device and an electronic apparatus which is capable of reducing variations and deterioration of transistor characteristics. A first connection pad connected with a first wiring and a first floating metal greater than the first connection pad are formed at a bonding surface of a first substrate, whereas a second connection pad connected with a second wiring and a second floating metal greater than the second connection pad are formed at a bonding surface of a second substrate. The first floating metal and the second floating metal formed at the first substrate and the second substrate are bonded to each other. The present disclosure is applicable to a CMOS solid-state imaging device used for an imaging apparatus such as a camera, for example.

Electronic device with common electrode
10748884 · 2020-08-18 · ·

An electronic device is disclosed which includes: a substrate; a plurality of active elements disposed on the substrate; a common electrode disposed on the active elements and including a plurality of openings; and a plurality of light-emitting elements, at least one of the light-emitting elements disposed on the common electrode partially, wherein the light-emitting elements each include a first pad and a second pad, and the first pad and the second pad are disposed on a same side of each said light-emitting element, wherein the first pad of one of the light-emitting elements is disposed corresponding to one of the openings of the common electrode and the first pad of the one of the light-emitting elements electrically connects to one of the active elements, and the second pad electrically connects to the common electrode.

Three-dimensional memory device containing bond pad-based power supply network for a source line and methods of making the same

A memory die includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory stack structures extending through the alternating stack, source regions located on, or in, the substrate, and at least one memory-side bonding pad electrically connected to the source regions. A logic die includes a power supply circuit configured to generate a supply voltage for the source regions, and at least one logic-side bonding pad electrically connected to the power supply circuit through a network of logic-side metal interconnect structures. The memory die is bonded to the logic die. The network of logic-side metal interconnect structures distributes source power from the power supply circuit over an entire area of the memory stack structures and transmits the source power to the memory die through bonded pairs of memory-side bonding pads and logic-side bonding pads.