H01L29/66613

I/O device scheme for gate-all-around transistors

An I/O device nanosheet material stack of suspended semiconductor channel material nanosheets is provided above a semiconductor substrate. A physically exposed portion of each suspended semiconductor channel material nanosheet is thinned to increase the inter-nanosheet spacing between each vertically stacked semiconductor channel material nanosheet. An I/O device functional gate structure is formed wrapping around the thinned portion of each suspended semiconductor channel material nanosheet.

EPITAXIAL STRUCTURES OF A SEMICONDUCTOR DEVICE HAVING A WIDE GATE PITCH

A semiconductor device is provided, which includes an array of active regions, gate stacks and substantially uniform epitaxial structures. The gate stacks of the array include a first gate stack and a second gate stack over an active region. An active pillar between the first gate stack and the second gate stack, and the active pillar separating two substantially uniform epitaxial structures. A contact structure over the active pillar, positioned equidistant from the first gate stack and the second gate stack.

DRAIN EXTENDED TRANSISTOR WITH TRENCH GATE
20200365727 · 2020-11-19 ·

A semiconductor device includes a semiconductor substrate with a trench, a body region under the trench with majority carrier dopants of a first type, and a transistor, including a source region under the trench with majority carrier dopants of a second type, a drain region spaced from the trench with majority carrier dopants of the second type, a gate structure in the trench proximate a channel portion of a body region, and an oxide structure in the trench proximate a side of the gate structure.

Drain extended transistor with trench gate

A semiconductor device includes a semiconductor substrate with a trench, a body region under the trench with majority carrier dopants of a first type, and a transistor, including a source region under the trench with majority carrier dopants of a second type, a drain region spaced from the trench with majority carrier dopants of the second type, a gate structure in the trench proximate a channel portion of a body region, and an oxide structure in the trench proximate a side of the gate structure.

Unique gate cap and gate cap spacer structures for devices on integrated circuit products

A device is disclosed that includes an active layer, a gate structure positioned above a channel region of the active layer and a first sidewall spacer positioned adjacent the gate structure. The device also includes a gate cap layer positioned above the gate structure and an upper spacer that contacts sidewall surfaces of the gate cap layer, a portion of an upper surface of the gate structure and an inner surface of the first sidewall spacer.

THRESHOLD VOLTAGE ADJUSTMENT USING ADAPTIVELY BIASED SHIELD PLATE

An apparatus includes a first lateral diffusion field effect transistor (LDFET) having a first threshold voltage and that includes a first gate electrode, a first drain contact, a first source contact, and a first electrically conductive shield plate separated from the first gate electrode and the first source contact by a first interlayer dielectric. A second LDFET of the apparatus has a second threshold voltage and includes a second gate electrode, a second drain contact, and a second source contact. The second source contact is electrically connected to the first source contact of the first LDFET. A control circuit of the apparatus is electrically coupled to the first electrically conductive shield plate and is configured to apply to the first electrically conductive shield plate a first gate bias voltage of a first level to set the first threshold voltage of the first LDFET to a first desired threshold voltage.

Short channel and long channel devices

The present disclosure relates to semiconductor structures and, more particularly, to replacement metal gate structures and methods of manufacture. The structure includes at least one short channel device including a dielectric material, a workfunction metal, and a capping material, and a long channel device comprising the dielectric material, the workfunction metal and fluorine free gate conductor material.

METHOD OF MANUFACTURING A FIELD EFFECT TRANSISTOR WITH OPTIMIZED PERFORMANCES

The invention relates to a method for fabricating a field-effect transistor (1), comprising the steps of: providing a structure including a first layer of semiconductor material (102), a doped second layer of semiconductor material (103) arranged on top of the first layer of semiconductor material, the composition of which is different from that of the first layer (102), two spacers (120) made of dielectric material arranged on top of the second layer of semiconductor material (103) and separated by a groove (140), said second layer of semiconductor material being accessible at the bottom of said groove (140); etching the second layer of semiconductor material at the bottom of said groove until reaching said first layer of semiconductor material in such a way as to retain the first layer of semiconductor material beneath said spacers on either side of said groove (140); then forming a gate stack (150) in said groove.

IMAGE PICKUP DEVICE AND METHOD OF TRACKING SUBJECT THEREOF

The present invention provides an image pickup device that recognizes the object that the user is attempting to capture as the subject, tracks the movement of that subject, and can continue tracking the movement of the subject even when the subject leaves the capturing area so that the subject can always be reliably brought into focus. The image pickup device includes a main camera that captures the subject; an EVF that displays the captured image captured by the main camera, a sub-camera that captures the subject using a wider capturing region than the main camera, and a processing unit that extracts the subject from the captured images captured by the main camera and the sub-camera, tracks the extracted subject, and brings the subject into focus when an image of the subject is actually captured. When the subject moves outside of a capturing region of the main camera, the processing unit tracks the subject extracted from the captured image captured by the sub-camera.

DEVICE WITH A RECESSED GATE ELECTRODE THAT HAS HIGH THICKNESS UNIFORMITY
20200221015 · 2020-07-09 ·

Various embodiments of the present disclosure provide a method for forming a recessed gate electrode that has high thickness uniformity. A gate dielectric layer is deposited lining a recess, and a multilayer film is deposited lining the recess over the gate dielectric layer. The multilayer film comprises a gate electrode layer, a first sacrificial layer over the gate dielectric layer, and a second sacrificial layer over the first sacrificial dielectric layer. A planarization is performed into the second sacrificial layer and stops on the first sacrificial layer. A first etch is performed into the first and second sacrificial layers to remove the first sacrificial layer at sides of the recess. A second etch is performed into the gate electrode layer using the first sacrificial layer as a mask to form the recessed gate electrode. A third etch is performed to remove the first sacrificial layer after the second etch.