Making of a transistor structure comprising in this order: forming semiconductor blocks made of Si.sub.xGe.sub.1-x over the surface semiconductor layer and on either side of insulating spacers, the semiconductor blocks having lateral facets, growth of a silicon-based layer over the semiconductor blocks, so as to fill cavities located between said facets and said insulating spacers, thermal oxidation to perform a germanium enrichment of semiconductor portions of the surface semiconductor layer disposed on either side of the spacers.

A semiconductor structure includes a substrate, an insulating layer disposed on the substrate, an active layer disposed on the insulating layer, a first semiconductor device formed in a first device region of the active layer, a charge trap structure through the active layer and surrounding the first device region, and a charge trap layer between the insulating layer and the substrate and extending laterally to underlie the first device region and the charge trap structure.

Integrated circuit structures having partitioned source or drain contact structures, and methods of fabricating integrated circuit structures having partitioned source or drain contact structures, are described. For example, an integrated circuit structure includes a fin. A gate stack is over the fin. A first epitaxial source or drain structure is at a first end of the fin. A second epitaxial source or drain structure is at a second end of the fin. A conductive contact structure is coupled to one of the first or the second epitaxial source or drain structures. The conductive contact structure has a first portion partitioned from a second portion.

In an SOI substrate having a semiconductor substrate serving as a support substrate, an insulating layer on the semiconductor substrate and a semiconductor layer on the insulating layer, an element isolation region which penetrates the semiconductor layer and the insulating layer and whose bottom part reaches the semiconductor substrate is formed, and a gate electrode is formed on the semiconductor layer via a gate insulating film. A divot is formed in the element isolation region at a position adjacent to the semiconductor layer, and a buried insulating film is formed in the divot. The gate electrode includes a part formed on the semiconductor layer via the gate insulating film, a part located on the buried insulating film and a part located on the element isolation region.

A complementary metal-oxide-semiconductor field effect transistor structure (C-MOSFET) includes a substrate; a dielectric pillar that is embedded in and recessed into the substrate; a gate pillar that contacts the dielectric pillar and protrudes from the substrate; a first stack of semiconductor nanosheets that protrude from a first side of the gate pillar; and a second stack of semiconductor nanosheets that protrude from a second side of the gate pillar, opposite the first side.

A method of fabricating a semiconductor device includes receiving a first wafer including a first substrate on a backside of the first wafer, and a first semiconductor-on-insulator (SOI) stack on a front side of the first wafer. The first SOI stack includes a first semiconductor. A second wafer is received that includes a second substrate on a backside of the second wafer, and a second SOI stack on a front side of the second wafer. The second SOI stack includes a second semiconductor. The front side of the first wafer is bonded to the front side of the second wafer, via at least one dielectric bonding material, to form a bonded wafer. The second substrate is removed. A stack of transistor devices is formed with the first semiconductor used as a first channel for a first transistor and the second semiconductor used as a second channel for a second transistor.

A method of forming a vertical channel transistor includes forming a first source-drain (SD) contact on a first surface of a semiconductor device layer; and forming a second SD contact layer on a second surface of the semiconductor device layer, the second surface being opposite to the first surface. The semiconductor device layer is pattern etched to form a vertical channel structure having a first end connected to the first SD contact and a second end opposite to the first end and connected to the second SD contact. A gate-all-around (GAA) structure is formed to completely surrounding at least a portion of the vertical channel structure at a position between the first SD contact and the second SD contact.

A field-effect transistor including an active zone comprises a source, a channel, a drain and a control gate, which is positioned level with the channel, allowing a current to flow through the channel between the source and drain along an x-axis, the channel comprising: a first edge of separation with the source; and a second edge of separation with the drain; the channel being compressively or tensilely strained, wherein the channel includes a localized perforation or a set of localized perforations along at least the first and/or second edge of the channel so as to also create at least one shear strain in the channel. A process for fabricating the transistor is provided.

Semiconductor devices include a semiconductor fin on a substrate. The semiconductor fin has channel region and source and drain regions. A gate stack is formed all around the channel region of the semiconductor fin, such that the channel region of the semiconductor fin is separated from the substrate. An interlayer dielectric is formed around the gate stack. At least a portion of the gate stack is formed in an undercut beneath the interlayer dielectric.

The present application discloses a semiconductor device with a contact having tapered profile and a method for fabricating the semiconductor device. The semiconductor device includes a substrate having a first region and a second region; a first gate structure positioned on the first region; and a second gate structure positioned on the second region; a first contact including a first lower portion positioned on a top surface of the first gate structure, and a first upper portion positioned on the first lower portion; and a second contact including a second lower portion positioned on a top surface of the second gate structure and a sidewall of the second gate structure, and a second upper portion positioned on the second lower portion. Sidewalls of the first lower portion are tapered and sidewalls of the second lower portion are substantially vertical.