A method for bonding two superconducting integrated circuits (“chips”), such that the bonds electrically interconnect the chips. A plurality of indium-coated metallic posts may be deposited on each chip. The indium bumps are aligned and compressed with moderate pressure at a temperature at which the indium is deformable but not molten, forming fully superconducting connections between the two chips when the indium is cooled down to the superconducting state. An anti-diffusion layer may be applied below the indium bumps to block reaction with underlying layers. The method is scalable to a large number of small contacts on the wafer scale, and may be used to manufacture a multi-chip module comprising a plurality of chips on a common carrier. Superconducting classical and quantum computers and superconducting sensor arrays may be packaged.

There is provided semiconductor devices and methods of forming the same, the semiconductor devices including: a first semiconductor element having a first electrode; a second semiconductor element having a second electrode; a Sn-based micro-solder bump formed on the second electrode; and a concave bump pad including the first electrode opposite to the micro-solder bump, where the first electrode is connected to the second electrode via the micro-solder bump and the concave bump pad.

A method of manufacturing a redistribution layer includes: forming an insulating layer on a wafer, delimited by a top surface and a bottom surface in contact with the wafer; forming a conductive body above the top surface of the insulating layer; forming a first coating region extending around and above the conductive body, in contact with the conductive body, and in contact with the top surface of the insulating layer in correspondence of a bottom surface of the first coating region; applying a thermal treatment to the wafer in order to modify a residual stress of the first coating region, forming a gap between the bottom surface of the first coating region and the top surface of the insulating layer; forming, after applying the thermal treatment, a second coating region extending around and above the first coating region, filling said gap and completely sealing the first coating region.

A light-emitting element including: a first semiconductor layer doped with a first type of dopant; a second semiconductor layer doped with a second type of dopant that is different from the first type of dopant; and an active layer between the first semiconductor layer and the second semiconductor layer, wherein a length of the light-emitting element measured in a first direction, which may be a direction in which the first semiconductor layer, the active layer, and the second semiconductor layer may be arranged, may be shorter than the width measured in a second direction that is perpendicular to the first direction.

A display device, and a tile-shaped display device including the same are provided. The display device includes a transistor array layer on a first surface of a substrate, and a plurality of light emitting elements on the transistor array layer. The transistor array layer includes a plurality of pixel drivers and two or more gate drivers in a circuit area of a display area, a first gate voltage supply line around the circuit area, and two or more first gate voltage auxiliary lines connected between the first gate voltage supply line and each of the two or more gate drivers. One end of each of the two or more first gate voltage auxiliary lines is spaced from an edge of the substrate adjacent to the first gate voltage supply line than the first gate voltage supply line.

A display panel, a manufacturing method thereof, and a display device are disclosed. The display panel includes: a base substrate, provided with a terminal and a terminal protection layer pattern; the terminal protection layer pattern includes a first shielding region and a first opening region, an orthographic projection of the first shielding region on the base substrate and an orthographic projection of the terminal on the base substrate have an overlapping region, the overlapping region is located at an edge of the orthographic projection of the terminal on the base substrate, and an orthographic projection of the first opening region on the base substrate is located in the orthographic projection of the terminal on the base substrate.

A semiconductor device includes an insulating layer on a substrate; a via extending from within the substrate and extending through one face of the substrate and a bottom face of a trench defined in the insulating layer such that a portion of a sidewall and a top face of the via are exposed through the substrate; and a pad contacting the exposed portion of the sidewall and the top face of the via. The pad fills the trench. The insulating layer includes a passivation layer on the substrate, and a protective layer is on the passivation layer. An etch stop layer is absent between the passivation layer and the protective layer. A vertical level of a bottom face of the trench is higher than a vertical level of one face of the substrate and is lower than a vertical level of a top face of the passivation layer.

A display device includes a substrate including a pad area, a first conductive pattern disposed in the pad area on the substrate, an insulating layer disposed on the first conductive pattern and overlapping the first conductive pattern, second conductive patterns disposed on the insulating layer, spaced apart from each other, and contacting the first conductive pattern through contact holes formed in the insulating layer, and a third conductive pattern disposed on the second conductive patterns and contacting the insulating layer.

A semiconductor element includes first/second electrodes on an element obverse surface, an insulating layer on the element obverse surface, and first/second electrode terminals in contact with the first/second electrodes, respectively. The insulating layer includes first/second openings, and first/second overlapping portions adjoining the first/second openings, respectively. The first/second openings expose the first/second electrodes, respectively. The first/second overlapping portions overlap with the first/second electrodes, respectively, as viewed in a thickness direction. The first/second electrode terminals are in contact with the first/second electrodes, respectively, through the first/second openings, while also overlapping with the first/second overlapping portions as viewed in the thickness direction. The first electrode terminals are in a region with a high arrangement density of electrode terminals, whereas the second electrode terminals are in a region with a low arrangement density of electrode terminals. Each first overlapping portion has a greater dimension in the thickness direction than each second overlapping portion.

A method of forming a metal-insulator-metal (MIM) capacitor with copper top and bottom plates may begin with a copper interconnect layer (e.g., Cu MTOP) including a copper structure defining the capacitor bottom plate. A passivation region is formed over the bottom plate, and a wide top plate opening is etched in the passivation region, to expose the bottom plate. A dielectric layer is deposited into the top plate opening and onto the exposed bottom plate. Narrow via opening(s) are then etched in the passivation region. The wide top plate opening and narrow via opening(s) are concurrently filled with copper to define a copper top plate and copper via(s) in contact with the bottom plate. A first aluminum bond pad is formed on the copper top plate, and a second aluminum bond pad is formed in contact with the copper via(s) to provide a conductive coupling to the bottom plate.