Patent classifications
H01L2224/05559
RELIABLE PASSIVATION FOR INTEGRATED CIRCUITS
Device and method for forming a device are presented. A substrate having circuit component and a back-end-of-line (BEOL) dielectric layer with interconnects is provided. A pad dielectric layer is formed over the BEOL dielectric layer. The pad dielectric layer includes a pad via opening which exposes a surface of one of the interconnects in the BEOL dielectric layer. A pad interconnect is formed on the pad dielectric layer and the pad interconnect is coupled to one of the interconnect in the BEOL dielectric by a pad via contact in the pad via opening. The pad interconnect comprises a pad interconnect pattern which is devoid of 90° angles and any angled structures contained in the pad interconnect pattern less than 90°. A passivation layer is formed on the substrate. The passivation layer lines the pad interconnect and covers an exposed surface of the pad dielectric layer.
SEMICONDUCTOR DEVICE INCLUDING THROUGH VIA STRUCTURE
A semiconductor device including a semiconductor substrate, an integrated circuit layer on the semiconductor substrate, first to n.sup.th metal wiring layers (where n is a positive integer) sequentially stacked on the semiconductor substrate and the integrated circuit layer, a first through via structure extending in a vertical direction toward the semiconductor substrate from a first via connection metal wiring layer, which is one of the second to n.sup.th metal wiring layers other than the first metal wiring layer, and passing through the semiconductor substrate, and a second through via structure being apart from the first through via structure, extending in a vertical direction toward the semiconductor substrate from a second via connection metal wiring layer, which is one of the second to n.sup.th metal wiring layers other than the first metal wiring layer, and passing through the semiconductor substrate may be provided.
Semiconductor packages and methods of fabrication thereof
In accordance with an embodiment of the present invention, a semiconductor device includes a semiconductor chip having a first side and an opposite second side, and a chip contact pad disposed on the first side of the semiconductor chip. A dielectric liner is disposed over the semiconductor chip. The dielectric liner includes a plurality of openings over the chip contact pad. A interconnect contacts the semiconductor chip through the plurality of openings at the chip contact pad.
Vertical memory device having improved electrical characteristics and method of operating the same
A memory device including at least one dummy word line over a substrate; a plurality of word lines over the dummy word line; and a plurality of vertical holes extending through the at least one dummy word line and the plurality of word lines in a direction perpendicular to the substrate and classified into channel holes and dummy holes, each of the channel holes being connected to a bit line. The method including performing an erase operation on dummy cells formed as the dummy word line and the dummy holes; verifying the erase operation; and performing a program operation on at least one of the dummy cells such that the at least one dummy cell has a higher threshold voltage than main cells formed as the dummy word line and the channel holes.
SEMICONDUCTOR DEVICE
A semiconductor device includes an insulation layer, wires, a semiconductor element, and an encapsulation resin. The insulation layer includes a main surface and a back surface facing opposite in a thickness-wise direction and a side surface formed between the main surface and the back surface in the thickness-wise direction. The wires include an embedded portion embedded in the insulation layer and a redistribution portion formed of a metal film joined to the embedded portion and formed from the back surface to the side surface. The semiconductor element is mounted on the main surface and includes electrodes joined to at least part of the embedded portion of the wires. The encapsulation resin contacts the main surface and covers the semiconductor element.
Resistive element
A resistive element includes: a semiconductor substrate; a lower insulating film deposited on the semiconductor substrate; a resistive layer deposited on the lower insulating film; an interlayer insulating film covering the resistive layer; a pad-forming electrode deposited on the interlayer insulating film, and including a first edge portion connected to one edge portion of the resistive layer and a second edge portion opposite to the first edge portion to be in electrical Schottky contact with the semiconductor substrate; a relay wire having one edge connected to another edge portion of the resistive layer to form an ohmic contact to the semiconductor substrate; and a counter electrode provided under the semiconductor substrate, wherein the resistive element uses a resistance value between the pad-forming electrode and the counter electrode.
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
A semiconductor device according to the present disclosure includes a semiconductor substrate, a first electrode provided on the semiconductor substrate, an insulating layer including a first part provided on an upper surface of the first electrode, a second electrode including a main portion and an eaves portion, the main portion being provided on the upper surface of the first electrode, the eaves portion extending over the first part and solder covering an upper surface of the main portion and a part of an upper surface of the eaves portion wherein the insulating layer includes a second part covering a part of the upper surface of the eaves portion, the part being closer to an end portion of the eaves portion than the part covered by the solder and a third part connecting the first part and the second part and covering the end portion of the eaves portion.
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR PACKAGE
Some example embodiments relate to a semiconductor device and a semiconductor package. The semiconductor package includes a substrate including a conductive layer, an insulating layer coating the substrate, the insulating layer including an opening exposing at least part of the conductive layer, and an under-bump metal layer electrically connected to the at least part of the conductive layer exposed through the opening, wherein the insulating layer includes at least one recess adjacent to the opening, and the under-bump metal layer fills the at least one recess. The semiconductor device and the semiconductor package may have improved drop test characteristics and impact resistance.
SEMICONDUCTOR DEVICES INCLUDING THROUGH-SILICON-VIAS AND METHODS OF MANUFACTURING THE SAME AND SEMICONDUCTOR PACKAGES INCLUDING THE SEMICONDUCTOR DEVICES
A method of manufacturing a semiconductor device is provided. The method includes forming a preliminary via structure through a portion of a substrate; partially removing the substrate to expose a portion of the preliminary via structure; forming a protection layer structure on the substrate to cover the portion of the preliminary via structure that is exposed; partially etching the protection layer structure to form a protection layer pattern structure and to partially expose the preliminary via structure; wet etching the preliminary via structure to form a via structure; and forming a pad structure on the via structure to have a flat top surface.
Isolation trenches for ESD circuits
Methods and devices for protecting against electrical discharges are provided. One such device for protecting against electrical discharges includes a semiconductor substrate and an isolation trench in the semiconductor substrate. The isolation trench includes an enclosed space that contains a gas.