Patent classifications
H01L29/66696
METAL SOURCE LDMOS SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
A manufacturing method for a LDMOS semiconductor device may include steps of forming a P-type layer on a P-type substrate; forming a P-type body region and an N-type well under the P-type layer; forming a field oxide on the P-type layer; forming a gate oxide on the P-type body region and field oxide; forming a gate polysilicon on top of the gate oxide; depositing a gate metal silicide on top of the gate polysilicon; depositing a thin film on top of the field oxide, P-type body region and gate silicide; forming a dielectric layer on top of the thin film; forming a first trench in the dielectric layer; forming a second trench underneath the first trench; depositing a metal layer on top of the dielectric layer and filling into the first and second trenches; and removing the metal on top of the dielectric layer.
DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
A display device includes a first insulation layer on a first gate electrode, an active pattern on the first insulation layer and including an NMOS area and a PMOS area, the PMOS area overlapping the first gate electrode, a second insulation layer on the active pattern. The active pattern includes an NMOS area and a PMOS area, with the PMOS area overlapping the first gate electrode. In addition, a second gate electrode is on the second insulation layer and overlaps the NMOS area. An active-protecting pattern is in the same layer as the second gate electrode and passes through the second insulation layer to contact the PMOS area. A third insulation layer is on the active-protecting pattern and the second gate electrode. A data metal electrode passes through the third insulation layer and contacts the active-protecting pattern.
DRAIN EXTENDED TRANSISTOR WITH TRENCH GATE
A semiconductor device includes a semiconductor substrate with a trench, a body region under the trench with majority carrier dopants of a first type, and a transistor, including a source region under the trench with majority carrier dopants of a second type, a drain region spaced from the trench with majority carrier dopants of the second type, a gate structure in the trench proximate a channel portion of a body region, and an oxide structure in the trench proximate a side of the gate structure.
CONNECTION ARRANGEMENTS FOR INTEGRATED LATERAL DIFFUSION FIELD EFFECT TRANSISTORS HAVING A BACKSIDE CONTACT
A semiconductor package includes a leadframe having an electrically conductive paddle, electrically conductive perimeter package leads, a first electrically conductive clip electrically connected to a first set of the package leads, and a second electrically conductive clip electrically connected to a second set of the package leads. The semiconductor package includes a single semiconductor die. The die includes a front-side active layer having an integrated power structure of two or more transistors. The die includes a backside portion having a backside contact electrically coupled to at least one of the two or more transistors and to the paddle. One or more first front-side contacts of the die are electrically coupled to at least one of the transistors and to the first clip, and one or more second front-side contacts of the die are electrically coupled to at least one of the transistors and to the second clip.
SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
A semiconductor device and its fabrication method are provided. The method includes providing a base substrate; forming a first well region and a second well region in the base substrate; forming a gate electrode structure, sidewall spacers, a doped source layer, a doped drain layer and a dielectric layer over the base substrate, where the doped source layer and the doped drain layer are respectively on two sides of the gate electrode structure and the sidewall spacers, and the gate electrode structure and the sidewall spacers are over the first well region and the second well region; removing a portion of the gate electrode structure on the second well region and a portion of the base substrate of the second well region to form a trench in the dielectric layer, where the trench exposes a portion of the sidewall spacers; and forming an isolation layer in the trench.
Lateral Trench Transistor Device
A method of manufacturing a semiconductor device includes: forming a trench in a first side of a semiconductor layer, the semiconductor layer including a drift zone of a first conductivity; forming a drain region of the first conductivity type in the first side of the semiconductor layer and laterally adjoining the drift zone; forming a body region of a second conductivity type opposite the first conductivity type and laterally adjoining the drift zone at a side of the drift zone opposite the drain region; and forming source regions of the first conductivity type and body contact regions of the second conductivity type in a sidewall of the trench and arranged in an alternating manner along a length of the trench, using a dopant diffusion process which includes diffusing dopants of both conductivity types from oppositely-doped dopant source layers which are in contact with different regions of the sidewall.
Semiconductor device comprising a transistor including a first field plate and a second field plate
A semiconductor device includes a transistor in a semiconductor substrate. The transistor includes a drift zone of a first conductivity type adjacent to a drain region, and a first field plate and a second field plate adjacent to the drift zone. The second field plate is arranged between the first field plate and the drain region. The second field plate is electrically connected to a contact portion arranged in the drift zone. The transistor further includes an intermediate portion of the first conductivity type at a lower doping concentration than the drift zone. A distance between the intermediate portion and the drain region is smaller than the distance between the contact portion and the drain region.
HIGH VOLTAGE DEVICE AND MANUFACTURING METHOD THEREOF
A high voltage device includes: a semiconductor layer, a well, a body region, a gate, a source, a drain, a drift oxide region, and a top region. The well is formed in the semicoducotor layer. The body region is formed in the well. The gate is formed on the well. The source and the drain are located below, outside, and at different sides of the gate, in the body region and the well respectively. The drift oxide region is formed on a drift region, wherein a bottom surface of the drift oxide region is higher than a first trench bottom surface of the first trench. The top region is formed in the well right below the drift oxide region, and is in contact with the drift oxide region.
Electronic device including a dielectric layer having a non-uniform thickness
An electronic device can include a transistor having a drain region, a source region, a dielectric layer, and a gate electrode. The dielectric layer can have a first portion and a second portion, wherein the first portion is relatively thicker and closer to the drain region; the second portion is relatively thinner and closer to the source region. The gate electrode of the transistor can overlie the first and second portions of the dielectric layer. In another aspect, an electronic device can be formed using two different dielectric layers having different thicknesses. A gate electrode within the electronic device can be formed over portions of the two different dielectric layers. The process can eliminate masking and doping steps that may be otherwise used to keep the drain dopant concentration closer to the concentration as originally formed.
Display device and method of manufacturing the same
A display device includes a first insulation layer on a first gate electrode, an active pattern on the first insulation layer and including an NMOS area and a PMOS area, the PMOS area overlapping the first gate electrode, a second insulation layer on the active pattern. The active pattern includes an NMOS area and a PMOS area, with the PMOS area overlapping the first gate electrode. In addition, a second gate electrode is on the second insulation layer and overlaps the NMOS area. An active-protecting pattern is in the same layer as the second gate electrode and passes through the second insulation layer to contact the PMOS area. A third insulation layer is on the active-protecting pattern and the second gate electrode. A data metal electrode passes through the third insulation layer and contacts the active-protecting pattern.