Patent classifications
H01L29/66765
Methods of manufacturing low-temperature polysilicon thin film and transistor
A method of manufacturing a low temperature polysilicon thin film includes: forming a buffer layer on a substrate; forming a first silicon layer on the buffer layer; forming a second silicon layer on the first silicon layer, and forming a substrate impurity barrier interface between the first silicon layer and the second silicon layer, wherein the second silicon layer is thicker than the first silicon layer; and annealing the first silicon layer and the second silicon layer to form a polysilicon layer.
THIN FILM TRANSISTOR, DISPLAY DEVICE, AND THIN FILM TRANSISTOR MANUFACTURING METHOD
Provided are a thin film transistor, a display device, and a thin film transistor manufacturing method, in which variation in characteristics is small. The present invention is provided with: a gate electrode formed on a substrate; a gate insulation film formed so as to cover the gate electrode; a semiconductor layer which is formed on the upper side of the gate insulation film and which includes a polysilicon layer disposed, in a plan view, inside a region defined by the gate electrode; an etching stopper layer disposed on the upper side of the polysilicon layer; and a source electrode and a drain electrode provided on the semiconductor layer so as to be separated from each other, wherein the polysilicon layer has first and second regions which are not covered with the etching stopper layer, and a part of the source electrode exists above the first region and a part of the drain electrode exists above the second region.
ACTIVE SWITCH, MANUFACTURING METHOD THEREOF AND DISPLAY DEVICE
The present application relates to an active switch, a manufacturing method thereof and a display device. The manufacturing method of the active switch includes: sequentially forming a gate electrode, a gate insulating layer, an active layer, a semiconductor composite layer and a source electrode and a drain electrode on a substrate. The semiconductor composite layer includes a first N-type heavily doped amorphous silicon layer, a first N-type lightly doped amorphous silicon layer, a second N-type heavily doped amorphous silicon layer and a second N-type lightly doped amorphous silicon layer which are sequentially stacked, where the ion doping concentration of the first N-type heavily doped amorphous silicon layer is lower than that of the second N-type heavily doped amorphous silicon layer, and the ion doping concentration of the first N-type lightly doped amorphous silicon layer is higher than that of the second N-type lightly doped amorphous silicon layer.
DISPLAY PANEL AND MANUFACTURING METHOD THEREOF
A display panel and a manufacturing method thereof are provided. The display panel includes: an array substrate with a first protrusion defined thereon; a color filter substrate disposed opposite to the array substrate; a supporting structure, wherein an end of the supporting structure is connected to a lateral side of the color filter substrate, another end of the supporting structure is connected to a lateral side of the array substrate, and the first protrusion is embedded into the supporting structure. The first protrusion is formed on a side of the array substrate near the color filter substrate. Therefore, when the supporting structure of the color filter substrate is aligned and attached to the array substrate, the first protrusion can be embedded into the supporting structure, thereby preventing the supporting structure from being moved. Thus, risk of alignment error is reduced, and abnormality of the display panel is prevented.
Liquid crystal display device
A method of manufacturing, with high mass productivity, liquid crystal display devices having highly reliable thin film transistors with excellent electric characteristics is provided. In a liquid crystal display device having an inverted staggered thin film transistor, the inverted staggered thin film transistor is formed as follows: a gate insulating film is formed over a gate electrode; a microcrystalline semiconductor film which functions as a channel formation region is formed over the gate insulating film; a buffer layer is formed over the microcrystalline semiconductor film; a pair of source and drain regions are formed over the buffer layer; and a pair of source and drain electrodes are formed in contact with the source and drain regions so as to expose a part of the source and drain regions.
SEMICONDUCTOR MEMORY DEVICES
The embodiments herein relate to semiconductor memory devices and methods of forming the same. A semiconductor memory device is provided. The semiconductor memory device includes a dual-gate transistor and a memory cell. The memory cell is adjacent to the dual-gate transistor, wherein the memory cell and the dual-gate transistor share a common electrode.
Thin film transistor and method for manufacturing the same, array substrate and display device
A thin film transistor, an array substrate, a display device and a method for manufacturing a thin film transistor are provided. The thin film transistor is formed on a base substrate and includes a source; a drain; and a semiconductor active layer having an amorphous silicon layer and one polysilicon portion or a plurality of polysilicon portions, the amorphous silicon layer being contacted with the one polysilicon portion or the plurality of polysilicon portions. The method includes a process of forming a source, a drain, and a semiconductor active layer: wherein forming a semiconductor active layer comprises: forming a first amorphous silicon thin film on a base substrate; and performing a crystallization treatment to the first amorphous silicon thin film to convert a part of the amorphous silicon in the first amorphous silicon thin film into polysilicon, such that a semiconductor active layer comprising one polysilicon portion or a plurality of polysilicon portions are formed.
TFT array substrate and manufacturing method thereof
The present disclosure provides a TFT array substrate and a manufacturing method thereof. For the manufacturing method, a source electrode and a drain electrode are formed at first, and then edges of the source electrode and the drain electrode are used as masks to pattern a semiconductor layer to form an amorphous silicon island, which makes edges of the amorphous silicon island flush with the edges of the source electrode and the drain electrode, and completely removes the exposed semiconductor layer outside a metal layer, thereby decreasing photoelectric sensitivity of a TFT device, decreasing a size of the TFT device, and being beneficial for saving layouts and simplifying processes.
Display panel and manufacturing method thereof and display device
A display panel, a manufacturing method thereof and a display device are provided. The display panel includes a substrate and a plurality of active switches disposed on the substrate. The active switch includes a gate layer disposed on a bottom portion. The gate layer is wound with an insulation medium layer, and the insulation medium layer includes a light-obstructing layer disposed on a side portion of the gate layer.
Array substrate, manufacturing method thereof, flexible display panel and display device
The present disclosure provides an array substrate, a manufacturing method thereof, a flexible display panel, and a display device, all for achieving a frame-free full-screen flexible display product. The array substrate provided in the present disclosure comprises a flexible base substrate, a thin film transistor on a first surface of the flexible base substrate, and a wiring terminal for transmitting a signal to an electrode of the thin film transistor on a second surface of the flexible base substrate opposite to the first surface. The electrode of the thin film transistor is electrically connected to the wiring terminal through a via hole penetrating the flexible base substrate.