H01L29/7818

SEMICONDUCTOR DEVICE
20180069076 · 2018-03-08 · ·

An HVJT is includes a parasitic diode formed by pn junction between an n.sup.-type diffusion region and a second p.sup.-type separation region surrounding a periphery thereof. The n.sup.-type diffusion region is arranged between an n-type diffusion region that is a high potential side region and an n-type diffusion region that is a low potential side region, and electrically separates these regions. In the n.sup.-type diffusion region, an nchMOSFET of a level-up level shift circuit is arranged. The n.sup.-type diffusion region has a planar layout in which the n.sup.-type diffusion region surrounds a periphery of the n-type diffusion region and a region where the nchMOSFET is arranged protrudes inwardly. A high-concentration inter-region distance L1 of the nchMOS region where the nchMOSFET is arranged is longer than a high-concentration inter-region distance L2 of the parasitic diode. Thus, the reliability of the semiconductor device may be improved.