Patent classifications
H01L29/782
Devices for LDMOS and other MOS transistors with hybrid contact
A lateral DMOS transistor structure includes a substrate of a first dopant polarity, a body region of the first dopant polarity, a source region, a drift region of a second dopant polarity, a drain region, a channel region, a gate structure over the channel region, a hybrid contact implant, of the second dopant polarity, in the source region, and a respective metal contact on or within each of the source region, gate structure, and drain region. The hybrid contact implant and the metal contact together form a hybrid contact defining first, second, and third electrical junctions. The first junction is a Schottky junction formed vertically between the source metal contact and the body. The second junction is an ohmic junction formed laterally between the source metal contact and the hybrid contact implant. The third junction is a rectifying PN junction between the hybrid contact implant and the channel region.
WIDE GAP SEMICONDUCTOR DEVICE
A wide gap semiconductor device has: a first MOSFET region (M0) having a first gate electrode 10 and a first source region 30 provided in a first well region 20 made of a second conductivity type; a second MOSFET region (M1) provided below a gate pad 100 and having a second gate electrode 110 and a second source region 130 provided in a second well region 120 made of the second conductivity type; and a built-in diode region electrically connected to the second gate electrode 110. The second source region 130 of the second MOSFET region (M1) is electrically connected to the gate pad 100.
SiC-SOI device and manufacturing method thereof
The object of the present invention is to increase the breakdown voltage without thickening an SOI layer in a wafer-bonded dielectric isolated structure. A device region of a SiC-SOI device includes: a first trench continuously or intermittently surrounding an n.sup. type drift region and not penetrating a SiC substrate; an n.sup.+ type side surface diffusion region formed on each side surface of the first trench; an n.sup.+ type bottom diffusion region formed under the n.sup. type drift region and in contact with the n.sup.+ type side surface diffusion region; and a plurality of thin insulating films formed in proximity to a surface of the n.sup. type drift region at regular spacings of 0.4 m or less. A surrounding region includes a second trench formed to continuously surround the first trench and penetrating the SiC substrate, and an isolated insulating film region formed on each side surface of the second trench.
Monolithically integrated vertical power transistor and bypass diode
A vertical field-effect transistor (FET) device includes a monolithically integrated bypass diode connected between a source contact and a drain contact of the vertical FET device. According to one embodiment, the vertical FET device includes a pair of junction implants separated by a junction field-effect transistor (JFET) region. At least one of the junction implants of the vertical FET device includes a deep well region that is shared with the integrated bypass diode, such that the shared deep well region functions as both a source junction in the vertical FET device and a junction barrier region in the integrated bypass diode. The vertical FET device and the integrated bypass diode may include a substrate, a drift layer over the substrate, and a spreading layer over the drift layer, such that the junction implants of the vertical FET device are formed in the spreading layer.
MOSFET STRUCTURE, AND MANUFACTURING METHOD THEREOF
A MOSFET structure and a manufacturing method thereof are provided. The structure includes a substrate, a well region of a first conductivity type, a first trench formed on a surface of the well region of the first conductivity type and extending downwards to a well region of a second conductivity type, a source disposed in the well region of the second conductivity type and under the first trench, a gate oxide layer disposed on an inner surface of the first trench, a polysilicon gate disposed on the gate oxide layer, a conductive plug extending downwards from above the first trench and being in contact with the well region of the second conductivity type after extending through the source, an insulation oxide layer filled in the first trench between the conductive plug and the polysilicon gate, and a drain disposed outside the first trench and obliquely above the source.
HIGH VOLTAGE DEVICE AND MANUFACTURING METHOD THEREOF
A high voltage device for use as a lower switch in a power stage of a switching regulator includes at least one lateral diffused metal oxide semiconductor (LDMOS) device and at least one Schottky barrier diode (SBD). The LDMOS device includes: a well, a body region, a gate, a source, and a drain. The SBD includes a Schottky metal layer and a Schottky semiconductor layer. The Schottky metal layer is electrically connected to the source, and the Schottky semiconductor layer is in contact with the well.
METAL SOURCE LDMOS SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
A manufacturing method for a LDMOS semiconductor device may include steps of forming a P-type layer on a P-type substrate; forming a P-type body region and an N-type well under the P-type layer; forming a field oxide on the P-type layer; forming a gate oxide on the P-type body region and field oxide; forming a gate polysilicon on top of the gate oxide; depositing a gate metal silicide on top of the gate polysilicon; depositing a thin film on top of the field oxide, P-type body region and gate silicide; forming a dielectric layer on top of the thin film; forming a first trench in the dielectric layer; forming a second trench underneath the first trench; depositing a metal layer on top of the dielectric layer and filling into the first and second trenches; and removing the metal on top of the dielectric layer.
ROBUST MOSFET DEVICE AND METHOD OF MANUFACTURING
A structural body made of semiconductor material includes an active area housing a drain region, a body region and a source region within the body region. An electrical-isolation trench extends in the structural body to surround the active area. A first PN-junction and a second PN-junction are integrated in the structural body between the active area and the trench, respectively located on opposite sides of the active area. The first and the second PN-junctions form a first diode and a second diode, with each diode having a respective cathode electrically coupled to the drain region of the MOSFET device and a respective anode electrically coupled to the source region of the MOSFET device.
A SEMICONDUCTOR DEVICE COMPRISING AN INSULATED GATE FIELD TRANSISTOR CONNECTED ON SERIES WITH A HIGH VOLTAGE FIELD EFFECT TRANSISTOR
A semiconductor device includes an insulated gate field effect transistor connected in series with a FET. The FET includes parallel conductive layers. A substrate of first conductivity type extends under both transistors, with a first layer of a second conductivity type over the substrate. On this first layer are arranged conductive layers with channels formed by the first conductivity type doped epitaxial layers with layers of a first conductivity type on both sides. The uppermost layer of the device is thicker than the directly underlying several parallel conductive layers. The field effect transistor, JFET, is isolated with deep poly trenches of first conductivity type, DPPT, on the source side of the JFET. The insulated gate field effect transistor is isolated with deep poly DPPT trenches on both sides. A further isolated region with logic and analog control functions is isolated with deep poly DPPT trenches on both sides.
Power device
The invention provides a power device, which includes: an operation layer, including a top surface, a body region and a drift region, the body region and the drift region being connected in a lateral direction, to form a PN junction along a channel width direction between the body region and the drift region; a gate, formed on the top surface, and the PN junction is located under the gate; a source, formed in a portion of the operation layer between the body region and the top surface; a drain, formed in another portion of the operation layer between the drift region and the top surface; a first conduction portion, formed on the top surface for electrically connecting the source; a conduction layer, formed on the first conduction portion and electrically connected to the source via the first conduction portion; and a second conduction portion, formed on the top surface and between the conduction layer and the drift region in a thickness direction, for electrically connecting the drift region and the conduction layer, wherein a Schottky diode is formed by the second conduction portion and the drift region.