H01L29/7885

Method for manufacturing semiconductor structure and capable of controlling thicknesses of oxide layers
11424257 · 2022-08-23 · ·

A method for manufacturing a semiconductor structure includes forming a first oxide layer on a wafer; forming a silicon nitride layer on the first oxide layer; forming a plurality of trenches; filling an oxide material in the trenches to form a plurality of shallow trench isolation regions; removing the silicon nitride layer without removing the first oxide layer; using a photomask to apply a photoresist for covering a first part of the first oxide layer on a first area and exposing a second part of the first oxide layer on a second area; and removing the second part of the first oxide layer while remaining the first part of the first oxide layer.

METHOD OF FABRICATING SEMICONDUCTOR MEMORY DEVICE

A semiconductor memory device includes a substrate having a first active area and a second active area in proximity to the first active area. A trench isolation region is between the first active area and the second active area. A source line region is disposed in the first active area and adjacent to the trench isolation region. An erase gate is disposed on the source line region. A floating gate is disposed on a first side of the erase gate. A first control gate is disposed on the floating gate. A first word line is disposed adjacent to the floating gate and the first control gate and insulated therefrom. A second control gate is disposed on a second side of the erase gate and directly on the trench isolation region. A second word line is disposed adjacent to the second control gate and insulated therefrom.

Erasable programmable non-volatile memory including two floating gate transistors with the same floating gate
11282844 · 2022-03-22 · ·

An erasable programmable non-volatile memory includes a first select transistor, a first floating gate transistor, a second select transistor and a second floating gate transistor. A select gate and a first source/drain terminal of the first select transistor receive a first select gate voltage and a first source line voltage, respectively. A first source/drain terminal and a second source/drain terminal of the first floating gate transistor are connected with a second source/drain terminal of the first select transistor and a first bit line voltage, respectively. A select gate and a first source/drain terminal of the second select transistor receive a second select gate voltage and a second source line voltage, respectively. A first source/drain terminal and a second source/drain terminal of the second floating gate transistor are connected with the second source/drain terminal of the second select transistor and a second bit line voltage, respectively.

EEPROM cell and array having stacked nanosheet field effect transistors with a common floating gate

Semiconductor device, memory arrays, and methods of forming a memory cell include or utilize one or more memory cells. The memory cell(s) include a first nanosheet transistor connected to a first terminal, a second nanosheet transistor located on top of the first nanosheet transistor and connected in parallel to the first nanosheet transistor and connected to a second terminal, where the first and second nanosheet transistors share a common floating gate and a common output terminal, and an access transistor connected in series to the common output terminal and a low voltage terminal, the access transistor configured to trigger hot-carrier injection to the common floating gate to change a voltage of the common floating gate.

MEMORY DEVICE COMPRISING ELECTRICALLY FLOATING BODY TRANSISTOR
20210288051 · 2021-09-16 ·

A semiconductor memory cell comprising an electrically floating body. A method of operating the memory cell is provided.

Semiconductor device and method for operating the same

A semiconductor device includes a memory cell formed on a semiconductor substrate. The memory cell includes a first source region and a first drain region that are formed in the semiconductor substrate and a first selection gate, and a first floating gate disposed in series between the first source region and the first drain region. A first floating gate transistor including the first drain region and the first floating gate has a threshold set lower than a threshold of a first selection gate transistor including the first source region and the first selection gate.

Memory and method for forming the same

The present disclosure provides a memory and a method for forming the memory. The method includes: providing a base with a first fin and a second fin formed thereon, wherein the first fin comprises an erasing region and a floating gate region on both sides of the erasing region, and a sacrificial layer is disposed on a surface of the erasing region and a surface of the second fin; forming a floating gate structure across the floating gate region on the base; forming a first sidewall film on a top surface and sidewall surfaces of the floating gate structure on the base; removing the sacrificial layer, and forming an opening in the floating gate structure and the first sidewall film; and forming an erasing gate structure in the opening. The memory formed by the method has good performance.

Process for manufacturing NOR memory cell with vertical floating gate
11101277 · 2021-08-24 · ·

An electrically erasable programmable nonvolatile memory cell includes a semiconductor substrate having a first substrate region and a trench region apart from the first substrate region in a lateral direction, a channel region between the first substrate region and the bottom portion of the trench region, an electrically conductive control gate insulated from and disposed over the first channel portion, an electrically conductive floating gate insulated from the bottom and sidewall portions of the trench region, an insulation region disposed over the second channel portion between the control gate and the second floating gate portion, an electrically conductive source line insulated from the floating gate and electrically connected to the trench region of the substrate, and an electrically conductive erase gate insulated from and disposed over a tip of the floating gate.

CELL STRUCTURE AND OPERATION OF SELF-ALIGNED PMOS FLASH MEMORY
20210225856 · 2021-07-22 · ·

Techniques described herein generally relate to the fabrication of a P-type metal-oxide-semiconductor (PMOS) flash memory cell in a semiconductor substrate. The PMOS flash memory cell may include a P-substrate layer formed above the semiconductor substrate, a N-well formed in the P-substrate layer, a floating-gate formed above the N-well. Further, the PMOS memory cell may include a control-gate formed above the floating-gate, a select-gate formed above the N-well and extending over at least a portion over the floating-gate, a P-source formed in the N-well, and a P-Drain. The P-source is formed adjacent to the floating-gate, and the P-drain is formed adjacent to the select-gate.

PROGRAMMING ANALOG NEURAL MEMORY CELLS IN DEEP LEARNING ARTIFICIAL NEURAL NETWORK

Numerous embodiments are disclosed for a high voltage generation algorithm and system for generating high voltages necessary for a particular programming operation in analog neural memory used in a deep learning artificial neural network. Compensation measures can be utilized that compensate for changes in voltage or current as the number of cells being programmed changes.