A multi-gate semiconductor device includes a plurality of nanostructures vertically stacked over a substrate, a gate dielectric layer wrapping around the plurality of nanostructures, a gate conductive structure over the gate dielectric layer, and a first insulating spacer alongside the gate conductive structure and over the plurality of nanostructures. The first insulating spacer is in direct contact with the gate conductive structure and the gate dielectric layer.

Controlling execution of software is provided. In response to receiving an input to execute a software module on a data processing system, a set of measurements are performed on the software module performing a process to prepare the software module for execution on the data processing system. In response to determining that the set of measurements meets a predetermined criterion, an authorization to proceed with the process of preparing the software module for execution on the data processing system is requested from a trusted third party computer. In response to receiving the authorization to proceed with the process of preparing the software module for execution on the data processing system from the trusted third party computer, the software module is executed.

A FinFET device structure is provided. The FinFET device structure includes a fin structure formed over a substrate and an isolation structure formed over the substrate. The FinFET device structure includes a first gate structure and a second gate structure formed over the fin structure. The first gate structure has a first top width in a direction that is parallel to the fin structure, the second gate structure has a second top width in a direction that is parallel to the fin structure, and the first top width is greater than the second top width.

Described herein are integrated circuit structures having versatile channel placement, and methods of fabricating integrated circuit structures having versatile channel placement. In an example, an integrated circuit structure includes a first vertical stack of horizontal nanowires having a first width. A second vertical stack of horizontal nanowires is immediately neighboring and parallel with the first vertical stack of horizontal nanowires and has a second width greater than the first width. A third vertical stack of horizontal nanowires is immediately neighboring and parallel with the second vertical stack of horizontal nanowires and has the first width.

A method of manufacturing a semiconductor device includes forming first and second pattern structures on first and second regions of a substrate, respectively, forming a preparatory first interlayer insulating layer covering the first pattern structure on the first region, forming a preparatory second interlayer insulating layer covering the second pattern structure on the second region, the preparatory second interlayer insulating layer including a first colloid, and converting the preparatory first and second interlayer insulating layers into first and second interlayer insulating layers, respectively, by annealing the preparatory first and second interlayer insulating layers.

An integrated circuit includes a substrate, at least one n-type semiconductor device, and at least one p-type semiconductor device. The n-type semiconductor device is present on the substrate. The n-type semiconductor device includes a gate structure having a bottom surface and at least one sidewall. The bottom surface of the gate structure of the n-type semiconductor device and the sidewall of the gate structure of the n-type semiconductor device intersect to form an interior angle. The p-type semiconductor device is present on the substrate. The p-type semiconductor device includes a gate structure having a bottom surface and at least one sidewall. The bottom surface of the gate structure of the p-type semiconductor device and the sidewall of the gate structure of the p-type semiconductor device intersect to form an interior angle smaller than the interior angle of the gate structure of the n-type semiconductor device.

Example embodiments relate to complementary field-effect transistor (CFET) devices. An example CFET device includes a bottom FET device. The bottom FET device includes a bottom channel nanostructure having a first side surface oriented in a first direction. The bottom FET device also includes a second side surface oriented in a second direction opposite the first direction. Further, the bottom FET device includes a bottom gate electrode configured to define a tri-gate or a gate-all-around with respect to the bottom channel nanostructure. The bottom gate electrode includes a side gate portion arranged along the first side surface of the bottom channel nanostructure. The CFET device also includes a top FET device stacked on the bottom FET device. The top FET device includes channel layers, a gate electrode, and gate prongs. Additionally, the CFET device includes a top gate contact via. Further, the CFET device includes a bottom gate contact via.

Techniques are provided herein to form semiconductor devices having a stacked transistor configuration. An n-channel device and a p-channel device may both be gate-all-around (GAA) transistors each having any number of nanoribbons extending in the same direction where one device is located vertically above the other device. According to some embodiments, the n-channel device and the p-channel device conductively share the same gate, and a width of the gate structure around one device is greater than the width of the gate structure around the other device. According to some other embodiments, the n-channel device and the p-channel device each have a separate gate structure that is isolated from the other using a dielectric layer between them. A gate contact is adjacent to the upper device and contacts the gate structure of the other lower device.

An integrated circuit (IC) structure includes a first cell and a second cell abutting the first cell. The first cell includes a first fin-like field-effect transistor (FinFET). The first FinFET includes a first channel region in a first fin extending along a first direction, and a first gate electrode extending across the first channel region in the first fin along a second direction different from the first direction. The second FinFET includes a second channel region in a second fin aligned with the first fin along the first direction, and a second gate electrode extending across the second channel region in the second fin along the second direction. The second fin has a smaller width than the first fin.

A memory device includes a substrate, first semiconductor fin, second semiconductor fin, first gate structure, second gate structure, first gate spacer, and a second gate spacer. The first gate structure crosses the first semiconductor fin. The second gate structure crosses the second semiconductor fin, the first gate structure extending continuously from the second gate structure, in which in a top view of the memory device, a width of the first gate structure is greater than a width of the second gate structure. The first gate spacer is on a sidewall of the first gate structure. The second gate spacer extends continuously from the first gate spacer and on a sidewall of the second gate structure, in which in the top view of the memory device, a width of the first gate spacer is less than a width of the second gate spacer.