Y10T137/794

Valve assembly and limit switch assembly therefor

A valve assembly includes a valve, an actuator for opening and closing the valve, and a positioner for controlling the actuator. At least one limit switch assembly is mounted between the positioner and the actuator. The limit switch assembly connects the actuator and positioner so that movement of the actuator valve is conveyed to the positioner through the limit switch assembly. The limit switch assembly is configured to provide a limit signal when the valve is in one or more limit positions. The limit switch assembly has a calibration mechanism for adjusting the one or more limit positions using an input member accessible from outside of the limit switch housing when the limit switch is installed in the valve assembly.

Acoustophoretic multi-component separation technology platform

A system having improved trapping force for acoustophoresis is described where the trapping force is improved by manipulation of the frequency of the ultrasonic transducer. The transducer includes a ceramic crystal. The crystal may be directly exposed to fluid flow. The crystal may be air backed, resulting in a higher Q factor.

Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment

A fluid supply system includes a pressure tank configured to contain a pressurized gas and a fluid, a delivery point configured to be connected to a point of use, a recirculation piping connecting the pressure tank to the delivery point, and a return pump connected to the recirculation piping. The recirculation piping defines a circulation path for the fluid from the pressure tank through the delivery point and back to the pressure tank. The return pump is downstream of the delivery point and upstream of the pressure tank in the circulation path.

Processing liquid supplying apparatus, processing liquid supplying method and storage medium
10036379 · 2018-07-31 · ·

In one embodiment, a feed pump of a tube pump type is used for supplying a processing liquid. The tube pump has a squeezing member that moves from a first axial position of a tube at which the squeezing member starts pinching of the tube, to a second axial position at which the squeezing member leaves the tube after feeding the processing liquid toward an ejecting part such as a nozzle. Only one pinched part pinched between the squeezing member and a guide member is formed between the first axial position and the second axial position of the tube, and the only one pinched part moves along the axial direction of the tube, during feeding of a dose of the processing liquid toward the ejecting part.

Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus

A chemical supply system comprises: a first container and a second container for storing a chemical solution; a first pump, located on a first pipe connecting the first and second containers, for directing the solution stored in the first container to the second container; and a first filter, located in the first pipe, for filtering the solution flowing through the first pipe from the first container toward the second container. The system further includes: a second pipe for connecting the first container and the second container; and a second pump, located on the second pipe, for directing the solution stored in the second container to the first container.

Separator device

A separator device for removing particles from suspension in a liquid includes a housing having first and second chambers with apertures for ingress and egress of liquid into the first chamber. Means are provided for setting up a swirl of liquid within the first chamber. Apertures enable flow of liquid between the first chamber and the second chamber. Means are also provided for setting up a swirl of liquid within the second chamber. The swirl in the second chamber is in substantially the opposite direction to the swirl in the first chamber, and there is no substantial flow in the second chamber which is in the same direction as the swirl in the first chamber.

Check valve and receptacle structure

In order to reduce a pressure loss in a check valve and simplify a manufacturing process, a check valve (10) configured to be disposed in piping of fluid is provided, which includes a valve housing (31) including a valve element (52) and a valve seat (54) therein, a casing (20) that is configured to place the valve housing therein, in which a casing flow path (60) is provided between the casing and the valve housing to make a flow of the fluid in an axial direction of the valve housing. In the valve housing, a communicating hole (38) and sealing portion (34) are formed. The communicating hole that is formed through the valve housing in a thickness direction thereof introduces the fluid, which flows through between the valve element and the valve seat at the open position of the check valve, into the casing flow path. The sealing portion that is provided on an outer surface of the valve housing upstream of the communicating hole in a flow direction of the fluid in the casing flow path, is configured to come into contact with an inner surface of the casing to seal the casing flow path and position the valve housing in a radial direction perpendicular to the axial direction relative to the casing.

Separator device

A separator device 10 for removing particles from suspension in a fluid including a housing 12, having first and second apertures 96 for ingress and egress of fluid into and out of the housing 12; a first separator chamber 38 disposed at one end of the housing; a second separator chamber 40 disposed at the other end of the housing, and a central chamber disposed between the first and second separator chambers 38, 40, the first and second separator chambers 38, 40 being apertured for ingress and egress of fluid from the central chamber and each containing obstruction means to slow the flow of fluid within the chamber.

Device for use with floor drains

A tool for use with a basket assembly is provided. The basket assembly is of the type configured for being receivably engaged with an opening defined in a drain cover skirt for covering the perimeter of a floor drain. The tool is configured for engaging the basket assembly and removing the basket assembly from the drain cover skirt upon force input from a user.