A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

A connection between a first, supporting structural member, such as a post or header, and a second, supported structural member such as a joist or rafter is provided, wherein the connection is made with a connector and fasteners, the use of which can be substantially hidden from view. The connector is designed to be inserted in a slotted opening in the second, structural member and to attach to a surface of the first, supporting structural member.

A tie rod includes a gusset which extends between a rod and a base.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

A universal pedestal mounting assembly includes a lower support structure securable on a supporting surface, an adapter coupled with the lower support structure, and a pedestal tube positioned over the adapter. The adapter is sized corresponding to the pedestal tube. An upper support structure is positioned on the pedestal tube and is configured to secure a component supported on the universal pedestal mounting assembly. A rod is secured between the lower support structure and the upper support structure. The assembly enables pedestal tubes of various sizes to be mounted using the same hardware.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

An anti-rotation system for an elevator system that includes an elevator shaft, elevator suspension cables, and a mechanical room includes a hitch plate disposed on a floor of the mechanical room and at a top of the elevator shaft, a plurality of cable shackles, each cable shackle including a cable locking mechanism on a first end thereof configured to lock one of the elevator suspension cables and a threaded rod on a second end thereof configured to extend through the hitch plate from the elevator shaft to the mechanical room, and a plurality of anti-rotation devices, each anti-rotation device being fixed to the threaded rod of one of the plurality of cable shackles in the mechanical room, and each anti-rotation device being connected to at least one other anti-rotation device, whereby rotation of cable shackles is prevented.

To enhance the positioning accuracy between primary members and auxiliary members without need of latch parts such as rivets, an insertion frame structure includes: a pair of primary members having L-shaped cross-sections and placed with the L shapes facing to each other symmetrically; and several auxiliary members having angular U-shaped cross-sections between the primary members. The primary members and the auxiliary members are joined at latch portions. The latch portions of the primary members have clearance-shaped latch holes. The latch portions of the auxiliary members have convex portions to be inserted into the latch holes. Each latch hole has a clearance with a larger dimension than a plate thickness t of the auxiliary members, and continuously from the clearance, a clearance with a dimension smaller than the plate thickness t of the auxiliary members.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.