A process for coating parylene onto a metal surface, such as a medical device, that has been textured by a series of laser pulses. The laser pulses can be overlapping or rastered. The textured portion of the metal surface and parylene coating can form a strong mechanical interlock. The bond created by using the laser texturing process can result in a cohesive failure of the parylene and not an adhesive failure of the bonding.

Processes are provided herein for deposition of organic films. Organic films can be deposited, including selective deposition on one surface of a substrate relative to a second surface of the substrate. For example, polymer films may be selectively deposited on a first metallic surface relative to a second dielectric surface. Selectivity, as measured by relative thicknesses on the different layers, of above about 50% or even about 90% is achieved. The selectively deposited organic film may be subjected to an etch process to render the process completely selective. Processes are also provided for particular organic film materials, independent of selectivity.

A patterned film structure consists of a substrate and of a patterned polymeric layer which selectively covers and exposes part of the surface of the substrate. The patterned polymeric layer is selected form at least one of an unsubstituted poly-para-xylylene and a substituted poly-para-xylylene.

The invention relates to the use of a composition for in vacuo coating of a substrate, the composition comprising: at least 50% by weight an acrylate monomer or an oligomer formed from the acrylate monomer, the acrylate monomer having the formula H2C═CHCO2CH2CH(OH)R, where R is an optionally substituted alkyl, alkenyl, aryl, or heteroaryl; and 0.5 to 15% by weight an adhesion promoter. The present invention also related to uses of the composition and methods of coating a substrate in vacuo using the composition.

A method of forming a photo-cured layer on a substrate can comprise using a first photocurable composition and a second photocurable composition, wherein both photocurable compositions may contain the same types of polymerizable monomers but in different concentration ratios. The concentration ratios of the monomers in each of the two photocurable compositions can be adapted that the uneven loss of one type of monomer from the first photocurable composition due to unwanted evaporation in certain regions of the substrate may be compensated by the second photocurable composition, which contains a higher amount of said monomer. The two photocurable compositions can further be adapted to easily merge to a combined layer with a very even distribution of the polymerizable monomers. This may allow forming photo-cured layers having an excellent homogeneous material structure throughout the layer.

A bake system may include a chamber having an internal space, a stage disposed in the internal space of the chamber and on which a target substrate is disposed, a gas ejection structure providing a process gas in the chamber, an exhaust structure, an atmosphere analyzer monitoring moisture and oxygen in the chamber, and a gas supplier controlling a flow rate of the process gas based on information provided from the atmosphere analyzer. The exhaust structure may include a suction part disposed in the internal space, and an exhaust part connected to the suction part and is disposed outside the chamber.

Films including a water-soluble layer and a vapor-deposited organic coating are disclosed. The films can optionally further include a vapor-deposited inorganic layer. The films exhibit enhanced barrier properties.

An organic thin film apparatus comprises an evaporating source, a depositing substrate and a heating device. The evaporating source, the depositing substrate and the heating device are located in a non-vacuum environment. The evaporating source comprises an evaporating material and a carbon nanotube film structure. The evaporating material is located on a carbon nanotube film structure surface. The depositing substrate is facing and spaced from the carbon nanotube film structure. The heating device inputs a signal to heat the carbon nanotube film structure.

A method of manufacturing a film includes disposing a substrate under one side of a baffle plate in a film manufacturing space, the baffle plate having a plurality of through-holes, and spraying an inert gas toward the substrate through a plurality of nozzle tips branched from a gas distribution pipe that is disposed over an other side of the baffle plate such that the inert gas penetrates the baffle plate through the through-holes.

Molybdenum (IV) amide complexes are disclosed herein corresponding in structure to Formula (I): wherein: L is —NR.sup.1R.sup.2; R.sup.1 and R.sup.2 are C.sub.1-C.sub.6-alkyl or hydrogen; R is C.sub.1-C.sub.6-alkyl; and n is zero, 1, 2 or 3. Further, methods of forming MoO.sub.2 films by atomic layer deposition (ALD) using Formula (I) complexes and Mo[N(Me)(Et)].sub.4 are disclosed herein. ##STR00001##