A docking station includes a base and a cleaning member assembly. The cleaning member assembly includes at least one cleaning member, a first bracket, a second bracket, and a power source. Each of the at least one cleaning member is mounted on the first bracket and the second bracket. One of the first bracket and the second bracket is a fixed bracket, and the other is a movable bracket. The movable bracket is driven to reciprocate along a straight line, in order to drive each the cleaning member to swing relative to the first bracket around a central axis.

A vacuum hole for suction holding a processing target object through vacuum is formed on a stage surface of a vacuum suction holding stage, and a hole corresponding to the vacuum hole is formed on an elastic pad. A jig includes a first projecting portion configured to be insertable into the vacuum hole on the vacuum suction holding stage, a support portion configured to come into contact with the stage surface with the first projecting portion inserted in the vacuum hole, and a second projecting portion projecting toward an opposite side to the first projecting portion with respect to the support portion and configured to be insertable into the hole on the elastic pad.

A vacuum hole for suction holding a processing target object through vacuum is formed on a stage surface of a vacuum suction holding stage, and a hole corresponding to the vacuum hole is formed on an elastic pad. A jig includes a first projecting portion configured to be insertable into the vacuum hole on the vacuum suction holding stage, a support portion configured to come into contact with the stage surface with the first projecting portion inserted in the vacuum hole, and a second projecting portion projecting toward an opposite side to the first projecting portion with respect to the support portion and configured to be insertable into the hole on the elastic pad.

Provided is disclosure for embodiments providing delivery of chemicals for conditioning a brush offline, where the brush is not coupled to a machine that makes use of the brush to clean a surface of an object.

An apparatus which can remove particles, such as polishing debris, from a back surface with high removal efficiency is provided. The apparatus includes: a substrate holder configured to rotate the substrate while holding the substrate with the back surface facing upward; a scrub cleaning tool configured to be rotatable; a two-fluid nozzle disposed above the substrate holder; and a housing defining a cleaning chamber in which the substrate holder, the scrub cleaning tool, and the two-fluid nozzle are located.

A cleaning apparatus includes a scraper and a support member. The scraper is in contact with a surface of a recovery roller to clean out residuals from the surface. A base portion of the scraper is held between and a fixing plate and a supporting plate. In this case, a leading end of the scraper is in contact with the surface of the recovery roller while an edge of the supporting plate serving as a fulcrum. Also, a base length d of the scraper from the fulcrum to the base portion is selected to make uniform the contact pressure of the scraper.

A substrate cleaning device 1 includes a substrate holding unit 10 configured to hold a substrate W, a first cleaning unit 11 having a first cleaning member 11a caused to come into contact with a first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, a second cleaning unit 12 having a second cleaning member 12a caused to come into contact with the first surface WA of the substrate W held by the substrate holding unit 10 to clean the first surface WA, and a controller 50 configured to control the first and second cleaning units 11, 12 so that, when any one of the first cleaning member 11a and the second cleaning member 12a cleans the first surface WA of the substrate W held by the substrate holding unit 10, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit 10.

A device for cleaning or precision machining of workpieces comprises a housing; a central roller having two ends supported by means of rotary bearings on carriers fixed on the housing; a first roller having a first end connected to one of the carriers by a joint and having a second end supported by means of a rotary bearing; a second roller having a first end connected to another one of the carriers by a joint and having a second end supported by means of a rotary bearing; a drive motor for rotatingly driving the first and second rollers and the central roller for treating a workpiece; a suction device for removing particles from the rollers; and at least a first and a second pinion gear coupled to the first and second rollers for angularly adjusting the first and second rollers with respect to said central roller.

The present disclosure relates to a cleaning device and an aerosol-generating system including the same. Since the cleaning device according to an embodiment may receive electrical energy wirelessly from the aerosol-generating device, the cleaning device may operate without an internal battery or a wired power connection. Therefore, a weight of the cleaning device and its manufacturing cost may be reduced, and a user does not need to charge the cleaning device regularly.

An impurity recovery device according to the present embodiment may recover impurities present on a surface of a substrate. The substrate may be placed on a stage. A sprayer may spray a recovery liquid toward the substrate along a direction from a side of a central part of the substrate to a side of the end part of the substrate. A recovery portion may recover the recovery liquid from the end part of the substrate.