A foreign particle removal system for removing a foreign particle from a surface of an object has a tool gripper which grips a particle removal tool. A tip of the particle removal tool has a sticky tip portion. The sticky tip portion has an apex region at a remote end of the sticky tip portion and a flank region adjoining the apex region. The tool gripper holds the particle removal tool at an oblique angle with respect to the surface so that the flank region of the sticky tip portion faces towards the surface. The tilted particle removal tool is conveyed with the tool gripper to contact the foreign particle on the surface with the flank region of the sticky tip portion and a force is exerted onto the surface to attract the foreign particle onto the flank region. The particle removal tool may then be lifted away from the surface together with the foreign particle.

An optical probe includes an optical window for transmitting light therethrough, an ultrasonic transducer for applying ultrasonic vibrations to the optical window for cleaning the optical window, and one or more light guides for transmitting light through the optical window to a measurement region and/or receiving light transmitted through the optical window from the measurement region. The ultrasonic transducer is coupled to the optical window via an elongate body adapted to transmit ultrasonic vibrations from the ultrasonic transducer to the window. The light guides communicate with the optical window adjacent the elongate body. An additional lens or light filter may be mounted adjacent the measurement window and/or the window itself may be adapted to incorporate a lens and/or light filter.

Provided is a cleaning device that can follow a complicated shape and can accurately remove stains by using a resin having high toughness.

A cleaning device including a contaminant collector, in which the cleaning device is characterized in that the contaminant collector includes a polyurethane resin, the contaminant collector has an Asker C hardness of 45 to 90, and the contaminant collector has a tensile strength of 2.0 MPa or more and 30 MPa or less.

A mask for cleaning a lithography apparatus includes a mask substrate and a coating provided on a surface of the mask substrate. The coating is configured to trap particulate contaminant matter from the lithography apparatus. A method of cleaning a lithography tool is also provided preparing a cleaning mask including a particle trapping layer formed on a substrate. The method includes transferring the cleaning mask through a mask transferring route of the lithography tool. Subsequently, the method includes analyzing a particle trapped by the particle trapping layer.

A transfer substrate recycling apparatus is a transfer substrate recycling apparatus including: a first pass line in which an elongated belt-shaped transfer substrate is unwound and conveyed; a second pass line in which an elongated belt-shaped self-adhesive film is unwound and conveyed; a controlling portion configured to control the conveyance of the transfer substrate; a first removal portion provided in the first pass line, the first removal portion being configured to remove an impurity on the transfer substrate by transferring the impurity onto the self-adhesive film; an inspection portion provided on a downstream side from the first removal portion in the first pass line, the inspection portion being configured to inspect a surface of the transfer substrate; and a second removal portion provided in the first pass line, the second removal portion being configured to remove a residual impurity detected by the inspection portion.

A unit for removing an adhesive layer formed in a processing chamber includes an ultrasonic generator, and a wiper soaked in a cleaning liquid. The wiper is provided to surround the ultrasonic generator.

A foreign particle removal system for removing a foreign particle from a surface of an object has a tool gripper which grips a particle removal tool. A tip of the particle removal tool has a sticky tip portion. The sticky tip portion has an apex region at a remote end of the sticky tip portion and a flank region adjoining the apex region. The tool gripper holds the particle removal tool at an oblique angle with respect to the surface so that the flank region of the sticky tip portion faces towards the surface. The tilted particle removal tool is conveyed with the tool gripper to contact the foreign particle on the surface with the flank region of the sticky tip portion and a force is exerted onto the surface to attract the foreign particle onto the flank region. The particle removal tool may then be lifted away from the surface together with the foreign particle.

A tonneau system for use with a pickup truck. The tonneau system includes a frame and a tonneau cover having a plurality of tonneau sections moveable between a folded position and an unfolded position. The tonneau cover includes solar energy-receiving material secured to a top exposed surface of at least two of the tonneau sections. The solar energy-receiving material moves with their corresponding tonneau sections between the unfolded and folded positions. A battery, transformer, and/or electrical cabling system may be included within the circuit for power storage and conversion.

A sticky mat changing device includes a frame, an unreeling roller, a reeling roller, and a control module. The frame includes a foot board configured for supporting a sticky mat. The unreeling roller is operable to unreel the sticky mat. The reeling roller is operable to reel the sticky mat. The unreeling roller and the reeling roller are disposed inside the frame and located on opposite sides of the foot board, the control module is operable to control each of the reeling roller and the unreeling roller to rotate to change a portion of the sticky mat supported on the foot board.

Novel materials and devices can remove small defects from long rolls of flexible electronics material while they are in continuous motion. The cleaning materials are designed to remove small particles without transferring defects or damaging the flexible electronics. The device generally consists of variable speed, motor-driven cylinders mounted on moveable brackets. The cylinders are capable of matching the speed of the cleaning material such that the cleaning material is always in contact with the web roll to be cleaned. The brackets are capable of rotating so the same material can be used more than once. Another material is used to remove debris from the cleaning material. A similar device consisting of motor-driven cylinders and moveable is used to apply the debris removal film to the cleaning film, allowing the cleaning film to be used multiple times.