A pad-temperature regulating apparatus is disclosed, which includes a heat exchanger capable of being cleaned in a limited space. A pad-temperature regulating apparatus includes a heat exchanger configured to contact a polishing pad to exchange heat with the polishing pad, a moving mechanism configured to move the heat exchanger between a temperature regulating position where the heat exchanger can exchange heat with the polishing pad, and a retreat position located on a side of the polishing pad, and a cleaning mechanism configured to clean the heat exchanger moved to the retreat position. The heat exchanger has an approximate triangular shape in a horizontal cross-section, and a longest side of the heat exchanger faces the polishing pad when the heat exchanger is moved to the retreat position.

A pad-temperature regulating apparatus is disclosed, which includes a heat exchanger capable of being cleaned in a limited space. A pad-temperature regulating apparatus includes a heat exchanger configured to contact a polishing pad to exchange heat with the polishing pad, a moving mechanism configured to move the heat exchanger between a temperature regulating position where the heat exchanger can exchange heat with the polishing pad, and a retreat position located on a side of the polishing pad, and a cleaning mechanism configured to clean the heat exchanger moved to the retreat position. The heat exchanger has an approximate triangular shape in a horizontal cross-section, and a longest side of the heat exchanger faces the polishing pad when the heat exchanger is moved to the retreat position.

A bonded abrasive article is disclosed. The bonded abrasive article has abrasive particles retained within a binder in an active grinding layer. The bonded abrasive article also has an internal reservoir configured to receive a fluid. The bonded abrasive article also has a feature configured to change a property of the fluid. The bonded abrasive article also has a delivery feature configured to deliver to fluid to a contact zone.

A bonded abrasive article is disclosed. The bonded abrasive article has abrasive particles retained within a binder in an active grinding layer. The bonded abrasive article also has an internal reservoir configured to receive a fluid. The bonded abrasive article also has a feature configured to change a property of the fluid. The bonded abrasive article also has a delivery feature configured to deliver to fluid to a contact zone.

A method for manufacturing a cutting tool (10) with lubrication orifices of complex shapes, including the steps of: producing a polymer insert (20), overmoulding a body of the cutting tool (10) with the polymer insert (20) by injecting into a mould, removing the polymer insert (20), so as to form in the body of the cutting tool (10) lubrication orifices, the shape whereof is complementary with that of a part of the insert (20), machining the body of the cutting tool (10) on an active part thereof, and depositing an abrasive coating on a surface of the active part of the body of the cutting tool (10).

A nozzle through which a liquid coolant is discharged is provided with an outer tube, a projecting member and an inner tube disposed inside the outer tube, and an elastic body disposed between the inner tube and a discharge port of the outer tube. If foreign matter accumulates on a nozzle opening of the inner tube, the elastic body is compressed by the inner tube under the pressure of the coolant, so that the inner tube moves toward the discharge port. Consequently, the projecting member penetrates the nozzle opening, thereby automatically removing the foreign matter accumulated on the nozzle opening.

A nozzle through which a liquid coolant is discharged is provided with an outer tube, a projecting member and an inner tube disposed inside the outer tube, and an elastic body disposed between the inner tube and a discharge port of the outer tube. If foreign matter accumulates on a nozzle opening of the inner tube, the elastic body is compressed by the inner tube under the pressure of the coolant, so that the inner tube moves toward the discharge port. Consequently, the projecting member penetrates the nozzle opening, thereby automatically removing the foreign matter accumulated on the nozzle opening.

A method for cooling a workpiece that is typically metallic in nature that is undergoing a grinding operation by spraying liquid carbon dioxide at the workpiece. The liquid carbon dioxide is directed at the workpiece and form a carbon dioxide snow which will provide cooling and improve the efficiency of the grinding operation. Alternatively, the liquid carbon dioxide can be sprayed onto the back surface of the abrasive belt which will also provide the requisite cooling but help the belt from delaminating.

A method for cooling a workpiece that is typically metallic in nature that is undergoing a grinding operation by spraying liquid carbon dioxide at the workpiece. The liquid carbon dioxide is directed at the workpiece and form a carbon dioxide snow which will provide cooling and improve the efficiency of the grinding operation. Alternatively, the liquid carbon dioxide can be sprayed onto the back surface of the abrasive belt which will also provide the requisite cooling but help the belt from delaminating.

A substrate processing apparatus which reliably prevents a cleaning liquid containing foreign particles from falling from a polishing head onto a substrate is disclosed. The substrate processing apparatus includes a rotating and holding mechanism, a polishing head, and a head cleaning device configured to supply the cleaning liquid to the polishing head to clean the polishing head during polishing and/or after polishing of the substrate.