A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.

A class of water lean, organic solvents that can bind with various acid gasses to form acid gas bound molecules having a high degree of intramolecular hydrogen bonding which enables their use as regenerable solvents for acid gas capture. Unlike the other devices described in the prior art, the present invention takes advantage of shortened distances between the portions of the molecule that form hydrogen bonds within the structures when loaded with an acid gas so as to create a molecule with a higher internal bonding affinity and a reduced proclivity for agglomeration with other molecules.

Systems and methods for the use of highly reactive hydrated lime (HRH) in circulating dry scrubbers (CDS) to remove sulfur dioxide (SO.sub.2) from the flue gas.

Compact membrane evaporative chillers, methods for cooling a process fluid (e.g., air) using a compact membrane evaporative chiller, and air conditioning systems and methods that include a compact membrane evaporative chiller are disclosed herein. Compact membrane evaporative chillers as disclosed herein can advantageously reduce or eliminate power consumption needed to circulate a working fluid.

A method for the partial removal of contaminants such as nitrogen oxides from a process gas stream is described. The process gas stream is separated into at least two process gas streams by means of a partition, baffle, damper or other device. Ozone is fed into contact with at least one of the separated process gas streams to oxidize the contaminants therein and the at least one of the process gas streams contacted by ozone is fed to a scrubber for removal of the oxidized contaminants from the gas streams. The separation is proportional to the percentage removal of contaminants desired.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

A thermal power plant exhaust purification device, the device including a cooling substance flow channel and an exhaust flow channel; the device also includes a spacing member for spacing and exchanging heat between the cooling substance flow channel and the exhaust flow channel, the spacing member having an exhaust contact surface for collecting dust and/or mist contained in the exhaust; the cooling substance flows in the cooling substance flow channel, such that the condensate precipitated from hot exhaust uniformly adheres on the exhaust contact surface, thus forming a uniform and stable water film; on one hand, formation of the concentrated H.sub.2SO.sub.4 on a dust collecting plate is prevented, and a liquid film flows downwards under gravity, thereby cleaning the H.sub.2SO.sub.4 adhered on the dust collecting plate timely; on the other hand, the water film is very effective in intercepting droplets and capturing the dust.

A thermal power plant exhaust purification device, the device including a cooling substance flow channel and an exhaust flow channel; the device also includes a spacing member for spacing and exchanging heat between the cooling substance flow channel and the exhaust flow channel, the spacing member having an exhaust contact surface for collecting dust and/or mist contained in the exhaust; the cooling substance flows in the cooling substance flow channel, such that the condensate precipitated from hot exhaust uniformly adheres on the exhaust contact surface, thus forming a uniform and stable water film; on one hand, formation of the concentrated H.sub.2SO.sub.4 on a dust collecting plate is prevented, and a liquid film flows downwards under gravity, thereby cleaning the H.sub.2SO.sub.4 adhered on the dust collecting plate timely; on the other hand, the water film is very effective in intercepting droplets and capturing the dust.