Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.

An agent for removing a halogen gas, such as chlorine, in a waste gas by means of reduction; a method for producing this agent; a method for removing a halogen gas by use of this agent; and a system for removing a halogen gas. The agent for removing the halogen gas contains at least pseudo-boehmite, that serves as a host material, and a sulfur-containing reducing agent, that serves as a guest material. 1-8% by weight of the reducing agent, in terms of elemental sulfur, based on the total amount of the pseudo-boehmite and sulfur-containing reducing agent is present in the agent. At least one inorganic compound selected from among oxides, carbonates salts and hydrocarbon salts of alkaline earth metal elements, transition metal elements and zinc group elements is additionally contained in the agent as a third component.

A gas separator includes a separation membrane complex in which a separation membrane with pores having a mean pore diameter less than or equal to 1 nm is formed on a porous support, and a gas supply part that supplies a mixed gas including CO.sub.2 and another gas from the side of the separation membrane to the separation membrane complex. Then, CO.sub.2 in the mixed gas is caused to permeate through the separation membrane and the support and is separated from the mixed gas in a state in which at least part of a permeation surface of the support, from which a gas having permeated through the separation membrane is exhausted, has a temperature lower by 10° C. or more than the temperature of the mixed gas before being supplied to the separation membrane complex.

Polymeric sorbents for reactive gases are provided. More particularly, the polymeric sorbents are a reaction product of a divinylbenzene/maleic anhydride precursor polymeric material with a nitrogen-containing compound. The polymeric sorbent has nitrogen-containing groups that are covalently attached to the polymeric sorbent. The nitrogen-containing groups include a primary amino group, a secondary amino group, a tertiary amino group, or a combination thereof. Additionally, methods of sorbing reactive gases on the polymeric sorbents and compositions resulting from the sorption of reactive gases on the polymeric sorbents are provided.

A method of adsorbing a highly reactive gas onto an adsorbent material comprising adsorbing the highly reactive gas to the adsorbent material. The absorbent material comprises at least one Lewis basic functional group, or pores of a size to hold a single molecule of the highly reactive gas, or inert moieties which are provided to the adsorbent material at the same time at the same time as the highly reactive gas, prior to adsorbing the highly reactive gas or after adsorbing the highly reactive gas, or the highly reactive gas reacts with moieties of the adsorbent material resulting in passivation of the adsorbent material. A rate of decomposition of the adsorbed highly reactive gas is lower than a rate of decomposition for the neat gas at equal volumetric loadings and equal temperatures for both the adsorbed highly reactive gas and the neat gas.

A method and device for purifying heptafluoroisobutyronitrile and a dilution gas from a used gas mixture comprising heptafluoroisobutyronitrile, a dilution gas and arcing by-products. The method comprising the steps of (a) contacting the used gas mixture with at least one adsorbent material to generate a gas stream depleted in arcing by-products; (b) contacting the gas stream depleted in by-products with a first membrane to obtain a first permeate stream rich in the dilution gas, and a first retentate stream rich in heptafluoroisobutyronitrile; (c) contacting the first permeate stream rich in the dilution gas with a second membrane to obtain a second permeate stream rich in the dilution gas and a second retentate stream rich in heptafluoroisobutyronitrile; and (d) combining the first and second retentate streams rich in heptafluoroisobutyronitrile.

The present invention relates to a method of concentrating an aqueous solution by low pressure under a zero osmotic pressure difference condition, and more particularly to a method of concentrating a solute-containing aqueous solution by low pressure under a zero osmotic pressure difference condition. When the method of the present invention is used, there are advantages in that energy consumption is low, and an aqueous solution can be concentrated until it can reach the maximum solute concentration or a solute concentration of 100%, without having to use an extraction solvent. In addition, there is an advantage in that the need to use a separate osmotic pressure draw solution is eliminated.

A method of adsorbing a highly reactive gas onto an adsorbent material comprising adsorbing the highly reactive gas to the adsorbent material. The adsorbent material comprises at least one Lewis basic functional group, or pores of a size to hold a single molecule of the highly reactive gas, or inert moieties which are provided to the adsorbent material at the same time at the same time as the highly reactive gas, prior to adsorbing the highly reactive gas or after adsorbing the highly reactive gas, or the highly reactive gas reacts with moieties of the adsorbent material resulting in passivation of the adsorbent material. A rate of decomposition of the adsorbed highly reactive gas is lower than a rate of decomposition for the neat gas at equal volumetric loadings and equal temperatures for both the adsorbed highly reactive gas and the neat gas.

There is provided an exhaust gas processing apparatus configured to cause a processing gas to be exposed to or come into contact with a liquid and thereby detoxify the processing gas. The exhaust gas processing apparatus comprises a suction casing provided with an inlet which the processing gas is sucked into and with an outlet which the processing gas is flowed out from; a liquid tank configured to receive an outlet-side part of the suction casing and store the liquid therein; and one or multiple spray nozzles placed in the liquid tank. The outlet of the suction casing is arranged to be located above a liquid surface of the liquid stored in the liquid tank. The one or multiple spray nozzles are configured to spray the liquid from around the outlet of the suction casing to a peripheral part of the outlet.

This invention relates to a Cu-BTC MOF which is water stable. The Cu-BTC MOF has been modified by substituting some of the BTC ligand (1,3,5, benzene tricarboxylic acid) with 5-aminoisophthalic acid (AIA). The resultant MOF retains at least 40% of its as synthesized surface area after exposure to liquid water at 60 C. for 6 hours. This is an unexpected result versus the MOF containing only the BTC ligand. This MOF can be used to abate contaminants such as ammonia in gas streams and especially air streams.