Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.

An adsorbent breather assembly for filtering contaminants such as particulars and vapor phase contaminants, e.g. volatile organic compounds, for use with electronic devices can include a blocking region adjacent to the adsorbent filter layer to improve filtering performance.

An air distribution system for supplying filtered air to isolator working volumes includes an inlet including a HEPA filter and an outlet including a slidably mounted sintered panel. Methods for supplying filtered air to an isolator working volume are also disclosed.

Electronic device processing apparatus including factory interface chamber with environmental controls and a purge control apparatus allowing purge of a chamber filter. The filter purge apparatus includes a chamber filter and a flushing gas supply configured to supply flushing gas to the chamber filter when an access door to the factory interface chamber is open to allow personnel safe servicing access to the factory interface chamber. The supply of flushing gas to the chamber filter minimizes moisture contamination of the chamber filter by factory ambient air when the access door is open thereby allowing rapid resumption of substrate processing after factory interface servicing. Purge control methods and apparatus are described, as are numerous other aspects.

An air conditioning system includes a temperature control unit, first and second filter units, and clean room equipment. The temperature control unit discharges temperature-controlled purified air through at least one of first or second outlets. The first and second filter units each filter purified air received from the temperature control unit based on using respective first and second filter modules. The first and second filter units include separate, independent housings. The air conditioning system blocks air flow from the temperature control unit into the second filter unit during an operation of the first filter module to filter purified air received at the first filter unit from the temperature control unit, and blocks air flow from the temperature control unit into the first filter unit during an operation of the second filter module to filter purified air received at the second filter unit from the temperature control unit.

The present invention provides a quick-release valve module which includes a flexible grommet defining a channel, and a piston having a disc portion at an end thereof, wherein the disc portion of the piston is exposed to the flexible grommet.

A filter apparatus and method having a test port member in combination with a filter media. The test port member may be positioned adjacent the outer periphery of the outer peripheral frame and may be attached to a truncated portion of the filter media. One or more scrim layers may be disposed across one or more sides of the test port member and/or the truncated portion of the filter media. A plug may be inserted into a through port of the test port member.

A filter apparatus and method having a test port member in combination with a filter media. The test port member may be positioned adjacent the outer periphery of the outer peripheral frame and may be attached to a truncated portion of the filter media. One or more scrim layers may be disposed across one or more sides of the test port member and/or the truncated portion of the filter media. A plug may be inserted into a through port of the test port member.

An air cleaning system having at least one dust sensor and a method for controlling the air cleaning system may improve accuracy of dust sensors through linkage control of the dust sensors, and may normally operate a faulty air cleaner using dust sensors of the remaining communicating air cleaners other than the faulty air cleaner even when any one of the dust sensors fails to operate. The air cleaning system may select a master dust sensor through linkage control of the dust sensors, and may operate the plurality of air cleaners only using sensor information of the master dust sensor. Therefore, the air cleaning system may stop operation of the remaining dust sensors other than the master dust sensor, may reduce measurement noise produced by the dust sensors and power consumption, and may increase a lifetime of the dust sensors.

The present invention relates to an air filter housing for supplying air to a space, said air filter housing being configured to be arranged in a ceiling of said space, said housing having a mouth facing downward, said mouth comprising a sealing surface configured to receive a panel type air filter comprising a frame and a filter medium held within said frame, such that a sealing connection between said sealing surface and said frame is achieved, characterized in that said filter housing further comprises at least one resilient member arranged below the sealing surface such that when a panel type air filter is inserted into the mouth, the resilient member will be deformed by the filter frame as the filter passes the resilient member, and resume its original shape once the filter has passed, such that the filter is retained between the sealing surface and the resilient member. The present invention further relates to the use of a filter housing in a cleanroom, and to a method of mounting a panel type air filter in an air filter housing.