The present disclosure relates to an apparatus for preparing germane gas and a method for preparing monogermane gas using same. More particularly, the present disclosure relates to an apparatus for preparing germane gas, capable of stably producing a large amount of monogermane gas by mixing starting materials in short time and removing reaction heat at the same time using a reactor having a microstructured channel, and a method for preparing monogermane gas using same. In accordance with the present disclosure, it is easy to control rapid increase of reaction temperature and pressure during mass production of germane gas. Accordingly, monogermane gas can be produced in large scale with high yield.

Reactor includes: first-flow-passage formed in band-shape to extend in length-direction and width-direction and in spiral-shape centered on vertical-axis parallel to width-direction and having open upper-end-surface; second-flow-passage formed in spiral-shape to be radially arranged alternately with first-flow-passage on vertical-cross-section including vertical-axis and having open upper-end-surface to communicate with upper-end-surface of first-flow-passage; reaction-liquid-supplying-flow-passage through which reaction-liquid is supplied to supplying-portion provided at lower-end of maximum-outer-diameter-portion of first-flow-passage; reaction-liquid-discharging-flow-passage through which reaction-liquid is discharged from discharging-portion provided at maximum-outer-diameter-portion of second-flow-passage; and return-flow-passage connecting first-connecting-portion provided at lower-end of maximum-outer-diameter-portion of first-flow-passage and second-connecting-portion provided at maximum-outer-diameter-portion of second-flow-passage. Height of upper-end-surface of first-flow-passage and height of upper-end-surface of second-flow-passage are substantially same as each other all over in radial direction. Lower-end-surface of second-flow-passage is positioned above lower-end-surface of first-flow-passage all over in radial direction and is formed to be inclined downward toward radial outer side.

The invention relates to a method for decreasing the spread of the tube temperatures between tubes in a process involving the heating of at least one fluid in a furnace that comprises at least one radiation chamber with radiant walls, at least one essentially vertical row of tubes inside of which circulate the at least one fluid to be heated, and being equipped with burners that heat the tubes, where the method comprises the steps of: determining, for each of the tubes the skin temperature of the tube, selecting the 50% tubes having the lowest temperatures determined, the process being stopped, realizing on each tube selected an operation that decreases the flow of the fluid distributed to said tube while keeping the total flow rate of the fluid unchanged.

In a catalytic reactor including catalyst carriers inserted into a plurality of channels defined by corrugated fins, the corrugated fins include a first corrugated fin, and a second corrugated fin arranged to adjoin the first corrugated fin. When viewed from the first corrugated fin toward the second corrugated fin along the channels, at least a portion of side walls of the second corrugated fin is located between two adjacent ones of side walls of the first corrugated fin at adjoining end faces of the first and second corrugated fins.