A cleaning system and wherein one or more surface cleaning devices use high-pressure, high-temperature water from a pressure module for surface cleaning, and wherein the waste water resulting from the surface cleaning is recovered, and wherein the solid waste matter within the waste water is filtered and separated into solid waste matter and clean filtered water, wherein the filtered water is reused by the cleaning apparatus and the solid waste matter is available in a form that can be disposed of by traditional means.

In a substrate processing apparatus, a cup part is moved in an up-down direction to cause a cup exhaust port to selectively overlap a first chamber exhaust port or a second chamber exhaust port. In the state in which the cup exhaust port overlaps the first chamber exhaust port, gas in the cup part is discharged through the cup exhaust port and the first chamber exhaust port by a first exhaust mechanism. In the state in which the cup exhaust port overlaps the second chamber exhaust port, the gas in the cup part is discharged through the cup exhaust port and the second chamber exhaust port by a second exhaust mechanism. In this way, an exhaust mechanism for exhausting gas from the cup part can be easily switched between the first exhaust mechanism and the second exhaust mechanism.

Systems and methods for cleaning, drying, and thermally managing vehicle components are described herein. In some embodiments, the vehicle components can include various sensors and, more particularly, the surfaces of cameras, LIDAR sensors, etc., that need to be clean to effectively perceive the environment around the vehicle. In one embodiment, a cleaning system includes a central delivery system configured to route fluid, such as washer fluid, along one or more delivery channels to remote holding chambers. The holding chambers can hold and/or heat the fluid before delivering the fluid to nozzles that spray the fluid on nearby vehicle components to clean the components.

A device for cleaning at least one optical surface of at least one camera, a camera system and a camera holder including such a device and a method of using the device, the camera system and/or the camera holder.

The wafer processing system includes a rotatable wafer support member for supporting a wafer and a plurality of collections trays disposed about a peripheral edge of the wafer support member. The collection trays are arranged in a stacked configuration, each collection tray having an inner wall portion and an outer wall portion that converge to define a trough section for collecting fluid. The system includes a chamber exhaust outlet that is formed in the housing for venting gas from the interior of the housing outside of the collection trays and a chemical exhaust outlet that is formed in the housing for venting gas that flows through the collection chamber to the chemical exhaust outlet. The chemical exhaust outlet is fluidly isolated from the chamber exhaust outlet.

A suction nozzle which has a suction chamber with an underlying sump. The suction chamber is defined by a chamber top, a chamber bottom and a peripheral sidewall. Suction draws liquids through the inflow openings in the peripheral sidewall into the suction chamber. The sump underlies the suction chamber. Particles and denser liquids drawn toward the suction chamber tend to migrate along the sump top, passing down sloped surfaces and through a central inlet into the sump.

Embodiments of the inventive concept relate to an apparatus and a method for removing a liquid residing on a substrate. The substrate treating apparatus includes a substrate support unit configured to support the substrate, a liquid supply unit configured to supply a liquid onto the substrate supported by the substrate support unit, and a heating unit configured to heat the substrate supported by the substrate support unit, wherein the substrate support unit includes a support plate having a seating surface, on which the substrate is seated, and having a suction hole on the seating surface, a rotary shaft configured to rotate the support plate, and a vacuum member configured to reduce a pressure of the suction hole such that the substrate seated on the seating surface is vacuum-suctioned on the support plate. Accordingly, the drying efficiency of the substrate may be increased.

The utility model discloses a dual-purpose rotating spray gun for dust removal and cleaning, comprising a gun body (1), a trigger switch (2), a pot body assembly and a rotating spray apparatus, wherein the rotating spray apparatus comprises a bidirectional connector (3), a spray nozzle (4), a connecting sheath (7), a hollow rotating shaft (5), a rotating spray head (10), a spray pipe (9) and a cleaning solution suction pipe (13); one end of the bidirectional connector (3) is fixed to an air passage outlet of the gun body (1); the other end is fixed to the connecting sheath (7); the hollow rotating shaft (5) is arranged in the connecting sheath (7); the spray nozzle (4) is fixed to an outlet of the bidirectional connector (3); the spray head of the spray nozzle (4) is matched with the hollow rotating shaft (5); the rotating spray head (10) is fixed to the hollow rotating shaft (5) and is provided with a rotating spray track (18); the spray pipe (9) is fixed to the rotating spray track (18); an inlet of the spray pipe (9) is communicated with the hollow rotating shaft (5); and an outlet of the spray pipe (5) is positioned on an outer end surface of the rotating spray head (10). After the structure is adopted, the utility model has the characteristics of simple structure, convenient production and processing, stable quality, low operating conditions, good dust removal and cleaning effects, long life and the like.

A device for cleaning and drying a spraying unit, the device containing: a top end and a bottom end; the top and bottom end connected to each other by a housing; the housing having an opening proximate the top end, for receiving at least a portion of a spraying unit; a first liner within the housing; a second liner within the first liner; the first liner fitting within the housing forming a space between an outside wall of the first liner and an inside wall of the housing; the second liner fitting within the first liner forming a space between an outside wall of the second liner and an inside wall of the first liner; the opening further containing an open cap, proximate the top end; the device having at least one vacuum air supply influent port, at least one drying air supply influent port and at least one solvent supply influent port, at least one vacuum air supply channel in communication with the at least one vacuum supply influent port, for supplying vacuum air to at least one vacuum air effluent port; at least one drying air supply channel, in communication with the at least one drying air supply influent port, for supplying drying air to at least one drying air effluent port; at least one solvent supply channel in communication with the at least one solvent supply influent port, for supplying solvent to at least one solvent effluent port; the at least one vacuum air effluent port for providing air along the outside wall of the second liner, allowing the air provided by the at least one vacuum air effluent port to flow in a direction away from the top end and towards the bottom end resulting in a vacuum within the device for drawing air through the top end of the device in a direction away from the top, down along the inside wall of the second liner; the vacuum for drawing material and solvent towards and out a drain proximate the bottom end; the at least one drying air effluent port for providing air proximate the opening of the device, preferably allowing air to flow in a direction towards the bottom end; the at least one solvent effluent port for providing solvent proximate the top of the device, preferably allowing the solvent to flow in a direction towards the bottom end.

Spray apparatus and uses thereof are described herein. A vacuum spray nozzle apparatus may include a first tube in fluid communication with a fluid source, a rotor coupled to the tube, a conduit in fluid communication with the passages of the first tube, and a second tube coupled to the conduit, the second tube being in fluid communication with a vacuum source. The rotor is in fluid communication with the pressurized fluid source. The conduit is substantially arched or angled such that an outlet of the conduit is offset a radial distance in a radial direction from the rotor axis, and when pressurized fluid is ejected from the outlet, during use, rotates the conduit. The vacuum spray nozzle apparatus is configured to remove components from a material through the second tube when a pressure of the system is reduced using the vacuum source.