Provided is a semiconductor device which includes: a 1.sup.st source/drain region connected to a 1.sup.st channel structure which is controlled by a 1.sup.st gate structure; a 2.sup.nd source/drain region, above the 1.sup.st source/drain region, connected to a 2.sup.nd channel structure which is controlled by a 2.sup.nd gate structure; and a middle isolation structure between the 1.sup.st gate structure and the 2.sup.nd gate structure, wherein the middle isolation structure comprises two or more vertically-stacked semiconductor layers.

A semiconductor device includes a plurality of gate caps over a plurality of gate regions, gate spacers over sidewalls of the plurality of gate regions and the plurality of gate caps, a backside contact under a first source and drain region and a dielectric cap over the first source and drain region. The first source and drain region is located between two adjacent gate regions of the plurality of gate regions.

A method includes: forming a stack of semiconductor nanostructures on a semiconductor fin; forming a source/drain opening adjacent the stack; forming a bottom dielectric layer on the semiconductor fin; forming a source/drain region in the source/drain opening, a void being present between the source/drain region and the bottom dielectric layer; forming a dielectric layer on the source/drain region; forming a hardened portion of the dielectric layer by treating the dielectric layer, the hardened portion having higher etch selectivity than other portions of the dielectric layer; removing the other portions of the dielectric layer, exposing the void; forming a source/drain contact opening that extends to and connects with the void, the source/drain contact opening exposing sidewalls of the source/drain region; forming a liner layer on exposed surfaces of the source/drain region; and forming a conductive core layer on the liner layer, the conductive core layer being in contact with the liner layer on a top surface, sidewalls and a bottom surface of the source/drain region.

A semiconductor device includes a first active pattern extending in a first direction, a second active pattern on the first active pattern and extending in the first direction, a gate structure on the first active pattern and the second active pattern and extending in a second direction intersecting the first direction, a first source/drain region on side faces of the gate structure and connected to the first active pattern, a second source/drain region on the side faces of the gate structure and connected to the second active pattern, and an intermediate connecting layer which includes a first intermediate conductive pattern between the first active pattern and the second active pattern, and a second intermediate conductive pattern connected to the first intermediate conductive pattern between the first source/drain region and the second source/drain region.

An integrated circuit device includes a substrate having a front side and a back side opposite to the front side and including a fin-type active region in the front side and a substrate recess in the back side, an isolation film in the substrate defining the fin-type active region, a source/drain region on the fin-type active region, a contact plug above the substrate, a backside power rail at least partially filling the substrate recess, and a via power rail electrically connected to the contact plug, the via power rail extending into the isolation film and connected to the backside power rail. A side surface of the backside power rail and a side surface of the via power rail form an obtuse angle at a portion where the backside power rail is connected to the via power rail.

A semiconductor device may include a substrate layer; a source/drain epitaxial layer between first channel layers and second channel layers; a backside contact structure electrically connected to the source/drain epitaxial layer, wherein the backside contact structure is between the source/drain epitaxial layer and a lower surface of the substrate layer, first width of the source/drain epitaxial layer at an upper surface of the substrate layer is greater than a second width at an interface between the source/drain epitaxial layer and the backside contact structure, a first portion of the backside contact structure is closer than a closest end of the source/drain epitaxial layer to the lower surface of the substrate layer, the first portion of the backside contact structure has a third width, and the third width is greater than the second width.

Systems, methods, and apparatuses are provided for an asymmetric vertical thin film transistor selector. An apparatus includes first and second source/drain regions formed on a substrate, a channel separating the first source/drain region and the second source/drain region, and a gate separated from the channel by a gate dielectric material. The first source/drain region, the second source/drain region, the channel, and the gate form a vertical thin film transistor, a first end of the channel is coupled to the first source/drain region and extends beyond a first end of the gate, and a second end of the channel is coupled to the second source/drain region and does not extend beyond a second end of the gate that is opposite the first end of the gate. A contact in the substrate is coupled to the first source/drain region and a sense line is coupled to the second source/drain region.

Disclosed are a thin film transistor (TFT) including an oxide semiconductor layer capable of being applied to high-resolution flat panel display devices requiring high-speed driving, a gate driver including the TFT, and a display device including the gate driver. The TFT includes first oxide semiconductor layer consisting of indium-gallium-zinc-tin oxide (IGZTO) and a second oxide semiconductor layer including indium-gallium-zinc oxide (IGZO). A content ratio (Ga/In) of gallium (Ga) to indium (In) of the second oxide semiconductor layer is higher than a content (Ga/In) of Ga to In of the first oxide semiconductor layer, and a content ratio (Zn/In) of zinc (Zn) to In of the second oxide semiconductor layer is higher than a content (Zn/In) of Zn to In of the first oxide semiconductor layer.

Provided is a field-effect transistor (FET) having small off-state current, which is used in a miniaturized semiconductor integrated circuit. The field-effect transistor includes a thin oxide semiconductor which is formed substantially perpendicular to an insulating surface, a gate insulating film formed to cover the oxide semiconductor, and a gate electrode which is formed to cover the gate insulating film. The gate electrode partly overlaps a source electrode and a drain electrode. The source electrode and the drain electrode are in contact with at least a top surface of the oxide semiconductor. In this structure, three surfaces of the thin oxide semiconductor are covered with the gate electrode, so that electrons injected from the source electrode or the drain electrode can be effectively removed, and most of the space between the source electrode and the drain electrode can be a depletion region; thus, off-state current can be reduced.

A thin film transistor is provided. The thin film transistor includes an oxide semiconductor layer including a source region, a drain region, and a channel region wherein a portion of the source and drain regions has an oxygen concentration less than the channel region. Further provided is a thin film transistor that includes an oxide semiconductor layer including a source region, a drain region, and a channel region, wherein a portion of the source and drain regions includes a dopant selected from the group consisting of aluminum, boron, gallium, indium, titanium, silicon, germanium, tin, lead, and combinations thereof.