A method of forming a semiconductor device that includes forming a trench adjacent to a gate structure to expose a contact surface of one of a source region and a drain region. A sacrificial spacer may be formed on a sidewall of the trench and on a sidewall of the gate structure. A metal contact may then be formed in the trench to at least one of the source region and the drain region. The metal contact has a base width that is less than an upper surface width of the metal contact. The sacrificial spacer may be removed, and a substantially conformal dielectric material layer can be formed on sidewalls of the metal contact and the gate structure. Portions of the conformally dielectric material layer contact one another at a pinch off region to form an air gap between the metal contact and the gate structure.

A method of concurrently forming source/drain contacts (CAs) and gate contacts (CBs) and device are provided. Embodiments include forming metal gates (PC) and source/drain (S/D) regions over a substrate; forming an ILD over the PCs and S/D regions; forming a mask over the ILD; concurrently patterning the mask for formation of CAs adjacent a first portion of each PC and CBs over a second portion of the PCs; etching through the mask, forming trenches extending through the ILD down to a nitride capping layer formed over each PC and a trench silicide (TS) contact formed over each S/D region; selectively growing a metal capping layer over the TS contacts formed over the S/D regions; removing the nitride capping layer from the second portion of each PC; and metal filling the trenches, forming the CAs and CBs.

A thin film transistor includes a polysilicon layer on a substrate, which includes a first area between second and third areas. A polysilicon layer is formed on the substrate, and a source electrode and a drain electrode are formed on the polysilicon layer in the first and third areas. Each of the source electrode and the drain electrode includes a metal silicide layer adjacent the polysilicon layer.

A method of making a semiconductor device includes forming a recessed fin in a substrate, the recessed fin being substantially flush with a surface of the substrate; performing an epitaxial growth process over the recessed fin to form a source/drain over the recessed fin; and disposing a conductive metal around the source/drain.

Deterioration in reliability is prevented regarding a semiconductor device. The deterioration is caused when an insulating film for formation of a sidewall is embedded between gate electrodes at the time of forming sidewalls having two kinds of different widths on a substrate. A sidewall-shaped silicon oxide film is formed over each sidewall of a gate electrode of a low breakdown voltage MISFET and a pattern including a control gate electrode and a memory gate electrode. Then, a silicon oxide film beside the gate electrode is removed, and a silicon oxide film is formed on a semiconductor substrate, and then etchback is performed. Accordingly, a sidewall, formed of a silicon nitride film and the silicon oxide film, is formed beside the gate electrode, and a sidewall, formed of the silicon nitride film and the silicon oxide films, is formed beside the pattern.

A device includes a vertical transistor comprising a first buried layer over a substrate, a first well over the first buried layer, a first gate in a first trench, wherein the first trench is formed partially through the first buried layer, and wherein a dielectric layer and the first gate are in the first trench, a second gate in a second trench, wherein the second trench is formed partially through the first buried layer, and wherein the second trench is of a same depth as the first trench, a first drain/source region and a second drain/source region formed on opposite sides of the first trench and a first lateral transistor comprising a second buried layer formed over the substrate, a second well over the second buried layer and drain/source regions over the second well.

A semiconductor device is provided which comprises an ESD protection device. The structure of the semiconductor device comprises a p-doped isolated region in which a structure is manufactured which operates as a Silicon Controlled Rectifier which is coupled between an I/O pad and a reference voltage or ground voltage. The semiconductor device also comprises a pnp transistor which is coupled parallel to the Silicon Controlled Rectifier. The base of the transistor is coupled to the gate of the Silicon Controlled Rectifier. In an optional embodiment, the base and gate are also coupled to the I/O pad.

A modified trench metal-semiconductor alloy formation method involves depositing a layer of a printable dielectric or a sacrificial carbon material within a trench structure and over contact regions of a semiconductor device, and then selectively removing the printable dielectric or sacrificial carbon material to segment the trench and form plural contact vias. A metallization layer is formed within the contact vias and over the contact regions.

Various embodiments include methods and integrated circuit structures. In some cases, a method of forming an integrated circuit structure can include: forming a doped silicon layer over a substrate; forming a plurality of fin structures from the doped silicon layer; forming a plurality of gate structures over the plurality of fin structures, each of the plurality of gate structures separated from a neighboring gate structure by a first pitch; forming a mask over the plurality of gate structures, exposing at least one of the plurality of gate structures; removing the at least one of the plurality of gate structures, wherein two of the remaining gate structures after the removing are separated by a second pitch larger than the first pitch; and forming an epitaxial region over the substrate between the two of the remaining gate structures.

Disclosed herein are related to a device including vertically placed semiconductor devices in a trench, and a method of fabricating the vertically placed semiconductor devices. In one aspect, a device includes a substrate including a trench defined by a first sidewall and a second sidewall facing each other along a first direction, and a floor between one end of the first sidewall and one end of the second sidewall. The device may include two or more vertical slots separated by vertical nano sheets extending upwards from the floor within the trench. In one aspect, the semiconductor devices can be formed in the two or more vertical slots. For example, source/drain structures, gate structures, and additional source/drain structures of vertical transistors can be formed in the two or more vertical slots.