H10D84/0165

Process for integrated circuit fabrication including a liner silicide with low contact resistance
09633909 · 2017-04-25 · ·

An integrated circuit includes a substrate supporting a transistor having a source region and a drain region. A high dopant concentration delta-doped layer is present on the source region and drain region of the transistor. A set of contacts extend through a pre-metal dielectric layer covering the transistor. A silicide region is provided at a bottom of the set of contacts. The silicide region is formed by a salicidation reaction between a metal present at the bottom of the contact and the high dopant concentration delta-doped layer on the source region and drain region of the transistor.

CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
20170110318 · 2017-04-20 ·

A method for manufacturing a semiconductor device includes forming a transistor on a substrate. Precursor gases are provided from a showerhead of a chemical vapor deposition (CVD) apparatus to form a contact etch stop layer (CESL) to cover the transistor and the substrate. A temperature of the showerhead is controlled in a range of about 70 C. to about 100 C. to control a temperature of the precursor gases.

NON-VOLATILE SPLIT GATE MEMORY CELLS WITH INTEGRATED HIGH K METAL GATE, AND METHOD OF MAKING SAME
20170098654 · 2017-04-06 ·

A method of forming a pair of memory cells that includes forming a polysilicon layer over and insulated from a semiconductor substrate, forming a pair of conductive control gates over and insulated from the polysilicon layer, forming first and second insulation layers extending along inner and outer side surfaces of the control gates, removing portions of the polysilicon layer adjacent the outer side surfaces of the control gates, forming an HKMG layer on the structure and removing portions thereof between the control gates, removing a portion of the polysilicon layer adjacent the inner side surfaces of the control gates, forming a source region in the substrate adjacent the inner side surfaces of the control gates, forming a conductive erase gate over and insulated from the source region, forming conductive word line gates laterally adjacent to the control gates, and forming drain regions in the substrate adjacent the word line gates.

SOI-based semiconductor device with dynamic threshold voltage
09601512 · 2017-03-21 · ·

A semiconductor device includes a semiconductor substrate, an insulating layer on a top surface of the substrate, and a first semiconductor transistor on the insulating layer, the transistor including an active region with a source region, a drain region, a channel region between the source and drain regions and a gate structure over the channel region, the gate structure extending beyond the transistor to an adjacent area. An outer well is included in the substrate, an inner well of an opposite type as the outer well situated within the outer well and under the active region and adjacent area, and a contact for the inner well in the adjacent area, the contact surrounding the gate structure. Operating the device includes applying a variable voltage at the contact for the inner well, a threshold voltage for the first transistor being altered by the variable voltage. The inner well and gate may be exposed and contacts created therefor together.

Method of making threshold voltage tuning using self-aligned contact cap
09601387 · 2017-03-21 · ·

Methods of forming a PFET dielectric cap with varying concentrations of H.sub.2 reactive gas and the resulting devices are disclosed. Embodiments include forming p-type and n-type metal gate stacks, each surrounded by SiN spacers; forming an ILD surrounding the SiN spacers; planarizing the ILD, the metal gate stacks, and the SiN spacers; determining at least one desired threshold voltage for the p-type metal gate stack; forming a first cavity in the p-type metal gate stack for each desired threshold voltage and a second cavity in the n-type metal gate stack; selecting a first nitride layer for each first cavity, the first nitride layer for each cavity having a concentration of hydrogen reactive gas based on the desired threshold voltage associated with the cavity; forming the first nitride layers in the respective first cavities; and forming a second nitride layer, with a hydrogen rich reactive gas, in the second cavity.

CMOS-BASED SEMICONDUCTOR DEVICE ON MICRO-HOTPLATE AND METHOD OF FABRICATION
20170074815 · 2017-03-16 ·

It is disclosed herein a semiconductor device and a method of manufacturing the semiconductor device. The semiconductor device is made using partly CMOS or CMOS based processing steps, and it includes a semiconductor substrate, a dielectric region over the semiconductor substrate, a heater within the dielectric region and a patterned layer of noble metal above the dielectric region. The method includes the deposition of a photoresist material over the dielectric region, and patterning the photo-resist material to form a patterned region over the dielectric region. The steps of depositing the photo-resist material and patterning the photo-resist material may be performed in sequence using similar photolithography and etching steps to those used in a CMOS process. The resulting semiconductor device is then subjected to further processing steps which ensure that a dielectric membrane and a metal structure within the membrane are formed in the patterned region over the dielectric region.

Formation of Nickel Silicon and Nickel Germanium Structure at Staggered Times
20170069544 · 2017-03-09 ·

A semiconductor device includes a substrate, first and second metals, and a second semiconductor material. The substrate includes a first semiconductor material and has first and second substrate portions. The first metal is reacted with the first substrate portion of the substrate. The second semiconductor material is above the second substrate portion of the substrate and is different from the first semiconductor material. The second metal is reacted with the second semiconductor material.

FINE-GRAIN INTEGRATION OF GROUP III-V DEVICES

Methods of selectively transferring integrated circuit (IC) components between substrates, and devices and systems formed using the same, are disclosed herein. In one embodiment, a first substrate with a release layer and a layer of IC components over the release layer is received, and a second substrate with one or more adhesive areas is received. The layer of IC components may include one or more transistors that contain one or more group III-V materials. The first substrate is partially bonded to the second substrate, such that a subset of IC components on the first substrate are bonded to the adhesive areas on the second substrate. The first substrate is then separated from the second substrate, and the subset of IC components bonded to the second substrate are separated from the first substrate and remain on the second substrate.

Protection circuit for secondary battery and abnormality detection system of secondary battery

The safety is ensured in such a manner that an abnormality of a secondary battery is detected, for example, a phenomenon that lowers the safety of the secondary battery is detected early and a warning is given to a user. A first protection circuit and a second protection circuit are provided for one secondary battery. The first protection circuit includes a memory circuit including a transistor including an oxide semiconductor. Combination of a plurality of protection circuits enables a complementary double protection system in charging, and the safety can be further enhanced.

SUPER CMOS DEVICES ON A MICROELECTRONICS SYSTEM
20250081596 · 2025-03-06 ·

A low cost IC solution is disclosed to provide Super CMOS microelectronics macros. Hereinafter, the Super CMOS or Schottky CMOS all refer to SCMOS. The SCMOS device solutions with a niche circuit element, the complementary low threshold Schottky barrier diode pairs (SBD) made by selected metal barrier contacts (Co/Ti) to P- and NSi beds of the CMOS transistors. A DTL like new circuit topology and designed wide contents of broad product libraries, which used the integrated SBD and transistors (BJT, CMOS, and Flash versions) as basic components. The macros include diodes that are selectively attached to the diffusion bed of the transistors, configuring them to form generic logic gates, memory cores, and analog functional blocks from simple to the complicated, from discrete components to all grades of VLSI chips. Solar photon voltaic electricity conversion and bio-lab-on-a-chip are two newly extended fields of the SCMOS IC applications.