A manufacturing method of an array substrate includes: providing a first substrate; forming a gate line, a data line, and a thin-film transistor array on the first substrate; forming a pixel electrode on the thin-film transistor array; depositing and forming a first passivation layer on the pixel electrode, the data line, and the thin-film transistor array; forming a black matrix on the first passivation layer; and forming a common electrode on the black matrix and the first passivation layer. The black matrix has a size that completely covers at least the data line such that when the common electrode is formed on the black matrix and the first passivation layer, a portion of the common electrode that corresponds exactly to the data line is completely spaced from the data line by the black matrix and the first passivation layer.

The invention provides a method for manufacturing a TFT substrate and a TFT substrate manufactured thereof. In the above TFT substrate, the low temperature poly-silicon layer is produced by solid phase crystallization, the cost of production is under budget, and the TFT substrate is a double-grid structure that can guarantee the electrical characteristics of the thin film transistor and better the capacity of drive, and leakage phenomenon caused by groove light seldom happens.

The thin film transistor includes: a gate electrode formed on a surface of a substrate; a polysilicon layer formed on an upper side of the gate electrode; an amorphous silicon layer formed on the polysilicon layer so as to cover the same; an n+ silicon layer formed on an upper side of the amorphous silicon layer; and a source electrode and a drain electrode which are formed on the n+ silicon layer, wherein, in a projected state in which the polysilicon layer, the source electrode and the drain electrode are projected onto the surface of the substrate, a part of the polysilicon layer and a part of each of the source electrode and the drain electrode are adapted so as to be overlapped with each other, and in the projected state, a minimum dimension, in a width direction orthogonal to a length direction between the source electrode and the drain electrode, of the polysilicon layer located between the source electrode and the drain electrode is smaller than dimensions in the width direction of the source electrode and the drain electrode.

An object is to provide a high reliable semiconductor device including a thin film transistor having stable electric characteristics. In a method for manufacturing a semiconductor device including a thin film transistor in which an oxide semiconductor film is used for a semiconductor layer including a channel formation region, heat treatment (which is for dehydration or dehydrogenation) is performed so as to improve the purity of the oxide semiconductor film and reduce impurities such as moisture. Besides impurities such as moisture existing in the oxide semiconductor film, heat treatment causes reduction of impurities such as moisture existing in the gate insulating layer and those in interfaces between the oxide semiconductor film and films which are provided over and below the oxide semiconductor film and are in contact with the oxide semiconductor film.

In a display device such as a liquid crystal display device, a large sized display screen is realized under low power consumption. A surface of a source wiring line of a pixel portion employed in an active matrix type liquid crystal display device is processed by way of a plating process operation so as to lower a resistance value of this source wiring line. The source wiring line of the pixel portion is manufactured at a step different from a step for manufacturing a source wiring line of a drive circuit portion. Further, electrodes of a terminal portion are processed by a plating process operation so as to reduce a resistance value thereof.

A method of manufacturing a display device, the method including: forming, on a first surface of a substrate, a gate line and a gate electrode; forming a first dielectric layer on the gate line and the gate electrode; forming a data line, a source electrode and a drain electrode on the first dielectric layer; forming a black matrix layer on the first dielectric layer, the data line, the source electrode, and the drain electrode; radiating ultraviolet light on a second surface of the substrate opposing the first surface, the ultraviolet light developing exposed parts of the black matrix layer to form a black matrix pattern; and etching the first dielectric layer using the black matrix pattern as an etching mask to respectively form a first dielectric pattern on the gate line and a gate dielectric pattern on the gate electrode.

The present disclosure discloses a TFT-LCD display panel based on an HSD structure, including: a sub-pixel unit array; a plurality of pairs of gate lines, with each pair being arranged between two adjacent rows of the sub-pixel units, wherein each gate line includes subsections arranged repeatedly and the subsection is consist of subsection portions with different widths, on the wider subsection portion of which a TFT element connected with a pixel electrode of the sub-pixel unit is placed; a plurality of data lines perpendicular to the gate lines, wherein two or more columns of sub-pixel units are arranged between two adjacent data lines. TFT elements of the present disclosure are placed on the gate lines other than the pixel region, which increases the open rate of the pixel region, and thus improves the penetration rate of the pixels.

Stable electrical characteristics and high reliability are provided for a miniaturized semiconductor device including an oxide semiconductor, and the semiconductor device is manufactured. The semiconductor device includes a base insulating layer; an oxide stack which is over the base insulating layer and includes an oxide semiconductor layer; a source electrode layer and a drain electrode layer over the oxide stack; a gate insulating layer over the oxide stack, the source electrode layer, and the drain electrode layer; a gate electrode layer over the gate insulating layer; and an interlayer insulating layer over the gate electrode layer. In the semiconductor device, the defect density in the oxide semiconductor layer is reduced.

An LTPS array substrate and a method for producing the same are proposed. The method includes: forming an insulating layer, a semiconductor layer, and a first positive photoresist layer on the substrate one by one; exposing one side of the substrate on the opposite side of the gate for forming a polycrystalline silicon layer; forming a source and a drain of the TFT on the polycrystalline silicon layer; forming a pixel electrode on the insulating layer and part of the source; forming a plain passivation layer on a source-drain electrode layer; forming a transparent electrode layer on the plain passivation layer so that the transparent electrode layer is connected to the gate, the source, and the drain via the contact hole. The use of masks in types and in numbers in the LTPS technology will be reduced. So, both of the processes and the production costs are reduced.

An LTPS array substrate and a method for producing the same are proposed. The method includes: forming a gate of a thin-film transistor (TFT) of the LTPS array substrate on a substrate; forming a first insulating layer, a semiconductor layer, and a positive photoresist layer on the substrate one by one; exposing one side of the substrate on the opposite side of the gate for forming a polycrystalline silicon layer; forming a second insulating layer on the substrate of the polycrystalline silicon layer; forming a source and a drain of the TFT on the second insulating layer so that the source and the drain is electrically connected to the polycrystalline silicon layer via a contact hole. The use of masks in types and in numbers in the LTPS technology will be reduced. So, both of the processes and the production costs are reduced.