A single poly NVM cell includes a first N-type well region and a second N-type well region spaced apart from each other by a P-type semiconductor layer, a first active region and a second active region disposed in the first N-type well region and the second N-type well region, respectively, a P-channel floating gate transistor including a floating gate disposed in the first active region, a P-type drain region disposed in the first active region, and a P-type junction region disposed in the first active region, wherein the floating gate extends to over the second active region, a P-channel read selection transistor including a read selection gate electrode disposed in the first active region, the P-type junction region disposed in the first active region, and a P-type source region disposed in the first active region, and an interconnection line connecting the first N-type well region to the P-type source region of the P-channel read selection transistor.

According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a pillar structure, at least one charge storage film, and a first electrode. The stacked body includes electrode films stacked separately from each other. The pillar structure is provided in the stacked body and includes a semiconductor layer extending in stacking direction of the stacked body. The charge storage film is provided between the semiconductor layer and the electrode films. The first electrode is provided in the stacked body, spreads in the stacking direction and a first direction along a surface of the substrate, and contacting the substrate. The first electrode includes a first portion containing a material having conductivity and a second portion containing a material that a linear expansion coefficient is lower than a linear expansion coefficient of silicon, and positioned at a substrate side than the first portion in the stacking direction.

According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, and a charge storage film. The stacked body is provided on the substrate. The stacked body includes a plurality of first insulating films and a plurality of electrode films alternately stacked one layer by one layer. The semiconductor pillar is provided inside the stacked body and extends in a stacking direction of the stacked body. The charge storage film is provided between the semiconductor pillar and each of the electrode films. The plurality of first insulating films include a first portion surrounding the semiconductor pillar and a second portion provided between the first portion and the semiconductor pillar, the second portion having a dielectric constant higher than a dielectric constant of the first portion.

Disclosed are a memory device including a vertical stack structure and a method of manufacturing the memory device. The memory device includes an insulating structure having a shape including a first surface and a protrusion portion protruding in a first direction from the first surface, a recording material layer covering the protrusion portion along a protruding shape of the protrusion portion and extending to the first surface on the insulating structure a channel layer on the recording material layer along a surface of the recording material layer, a gate insulating layer on the channel layer, and a gate electrode formed at a location on the gate insulating layer to face a second surface which is a protruding upper surface of the protrusion portion, wherein a void exists between the gate electrode and the insulating structure, defined by the insulating structure and the recording material layer.

According to an embodiment, a semiconductor memory device includes first and second stacked bodies, first and second memory parts, and an insulating part. The first stacked body includes first conductive layers and first insulating layers alternately arranged in a first direction. The second stacked body includes second conductive layers and second insulating layers alternately arranged in the first direction. The first and second memory parts extend through the first and second stacked body in the first direction, respectively. The insulating part is provided between the first and second stacked bodies. The insulating part includes a first oxygen-containing film including silicon and oxygen, and a nitrogen-containing film including silicon and nitrogen. The first oxygen-containing film is provided between at least one of first conductive layers and the nitrogen-containing film. The first oxygen-containing film has a hole.

An integrated circuit (IC) device includes: a channel region that extends on the substrate to penetrate a plurality of word lines; a bit line contact pad that contacts an upper surface of the channel region; a bit line that contacts the bit line contact pad and extends on the bit line contact pad in a direction parallel to the main surface of the substrate; a common source line that partially fills a word line cut region and has a height lower than that of the channel region; and a common source via contact that contacts an upper surface of the common source line in the word line cut region.

A semiconductor memory device according to an embodiment includes: first and second memory columnar bodies aligned in a second direction intersecting a first direction, the first and second memory columnar bodies respectively including a semiconductor layer and extending in the first direction; a bit line disposed above the first and second memory columnar bodies; and a first connecting line disposed between the first and second memory columnar bodies and the bit line in the first direction and electrically coupled to the semiconductor layers of the first and second memory columnar bodies and the bit line, the first connecting line extending linearly in the second direction, and a center line widthwise of the first connecting line being in a position displaced in a third direction, the third direction intersecting the first and second directions, from positions of centers of the first and second memory columnar bodies.

In a compact three-dimensional memory (3D-M.sub.C), a memory array and an above-substrate decoding stage thereof are formed on a same memory level. For the memory devices in the memory array, the overlap portion and the non-overlap portions of the x-line are both highly-conductive; for the decoding device in the above-substrate decoding stage, while the non-overlap portions are still highly-conductive, the overlap portion is semi-conductive.

A one-time programmable (OTP) memory cell with floating gate shielding is provided. A pair of transistors is arranged on a semiconductor substrate and electrically coupled in series, where the transistors comprise a floating gate. An interconnect structure overlies the pair of transistors. A shield is arranged in the interconnect structure, directly over the floating gate. The shield is configured to block ions in the interconnect structure from moving to the floating gate. A method for manufacturing an OTP memory cell with floating gate shielding is also provided

Collateral etching of a dielectric material around a trench during formation of a substrate contact via structure can be avoided employing an aluminum oxide layer. The aluminum oxide layer functions as an etch stop layer during an anisotropic etch that removes horizontal portions of an insulating material layer to form an insulating spacer. The aluminum oxide layer may be a conformal or a non-conformal material layer, and may, or may not, include a horizontal portion that overlies an alternating stack of insulating layers and electrically conductive layers. Electrical shorts caused by widening of the top portion of the trench can be avoided through use of the aluminum oxide layer. Memory stack structures can extend through the alternating stack to provide a three-dimensional memory stack structure. A source region can be formed underneath the trench, and the substrate contact via structure can be employed as a source contact via structure.