An IGBT includes a floating P well, and a floating N+ well that extends down into the floating P well. A bottom surface of the floating P well has a waved contour so that it has thinner portions and thicker portions. When the device is on, electrons flow laterally from an N+ emitter, and through a first channel region. Some electrons pass downward, but others pass laterally through the floating N+ well to a local bipolar transistor located at a thinner portion of the floating P type well. The transistor injects electrons down into the N drift layer. Other electrons pass farther through the floating N+ well, through the second channel region, and to an electron injector portion of the N drift layer. The extra electron injection afforded by the floating well structures reduces V.sub.CE(SAT). The waved contour is made without adding any masking step to the IGBT manufacturing process.

An IGBT includes a floating P well and a floating N+ well that extends down into the floating P well. A bottom surface of the floating P well has a waved contour with thinner portions and thicker portions. When the device is on, electrons flow laterally from an N+ emitter and through a channel region. Some electrons pass downward, but others pass laterally through the floating N+ well to one of the thinner portions of the floating P type well. The electrons then pass down from the thinner portions into the N drift layer. Other electrons pass farther through the floating N+ well to subsequent, thinner electron injector portions of the floating P type well and then into the N drift layer. The extra electron injection afforded by the waved floating well structure reduces V.sub.CE(SAT). The waved contour is made without adding any masking step to the IGBT manufacturing process.

A method of producing a power semiconductor device includes: providing a semiconductor body with a vertically protruding fin covered by an insulation material covered by an electrode material, and an insulating material at least partially covering the electrode material; exposing a portion of the electrode material arranged above an upper portion of the fin; removing the exposed portion of the electrode material to expose the upper portion of the fin, thereby forming a respective recess adjacent to both sides of the exposed upper portion of the fin, the recesses being spatially confined by the insulation material, the electrode material and the insulating material; forming an ILD on top of the exposed portions of the device; and forming a first load terminal above the ILD and configured to contact the upper portion of the fin.

A manufacturing method of a semiconductor device according to an embodiment includes: forming a semiconductor portion including a transistor region and a diode region; forming a first lifetime control region in a lower portion of the semiconductor portion in the diode region, with ion irradiated from an upper side of the semiconductor portion; and forming a second lifetime control region in an upper portion of the semiconductor portion, with ion irradiated through a mask from the upper side of the semiconductor portion, the second lifetime control region being formed simultaneously with the first lifetime control region so as not to overlap with the first lifetime control region.

Provided is a semiconductor device including a semiconductor substrate, a plurality of gate electrodes disposed on the upper surface portion of the semiconductor substrate and spaced apart from each other, a plurality of emitter electrodes disposed to be overlapped with each of the plurality of gate electrodes, and a collector electrode disposed on the lower surface of the semiconductor substrate.

A manufacturing method a semiconductor device according to an embodiment is a manufacturing method a semiconductor device located on a semiconductor wafer within a region surrounded by a first dicing line extending in a first direction and a second dicing line perpendicular to the first direction, the semiconductor device including a cell region and a termination region, the cell region including a semiconductor device located within a semiconductor substrate, the termination region including a metal wiring line located on the semiconductor substrate and electrically connected to the semiconductor device. In this method, a stopper film is formed around the metal wiring line in the termination region, a protection film covering the metal wiring line and ending at a side surface of the stopper film is formed, and the semiconductor wafer is diced along the first dicing line and the second dicing line.

A method includes: providing a layer of porous silicon carbide supported by a silicon carbide substrate; providing a layer of epitaxial silicon carbide on the layer of porous silicon carbide; forming semiconductor devices in the layer of epitaxial silicon carbide; and separating the silicon carbide substrate from the layer of epitaxial silicon carbide at the layer of porous silicon carbide. The layer of porous silicon carbide includes dopants defining a resistivity of the layer of porous silicon carbide. The resistivity of the layer of porous silicon carbide is different from a resistivity of the silicon carbide substrate. Additional methods are described.

In an embodiment, a semiconductor device includes a semiconductor body having a first major surface, a second major surface opposing the first major surface and at least one transistor device structure, a source pad and a gate pad arranged on the first major surface, a drain pad and at least one further contact pad coupled to a further device structure. The drain pad and the at least one further contact pad are arranged on the second major surface.

A grid is manufactured with a combination of ion implant and epitaxy growth. The grid structure is made in a SiC semiconductor material with the steps of a) providing a substrate comprising a doped semiconductor SiC material, said substrate comprising a first layer (n1), b) by epitaxial growth adding at least one doped semiconductor SiC material to form separated second regions (p2) on the first layer (n1), if necessary with aid of removing parts of the added semiconductor material to form separated second regions (p2) on the first layer (n1), and c) by ion implantation at least once at a stage selected from the group consisting of directly after step a), and directly after step b); implanting ions in the first layer (n1) to form first regions (p1). It is possible to manufacture a grid with rounded corners as well as an upper part with a high doping level. It is possible to manufacture a component with efficient voltage blocking, high current conduction, low total resistance, high surge current capability, and fast switching.

A silicon carbide semiconductor device has an active region and a termination structure portion disposed outside of the active region. The silicon carbide semiconductor device includes a semiconductor substrate of a second conductivity type, a first semiconductor layer of the second conductivity type, a second semiconductor layer of a first conductivity type, first semiconductor regions of the second conductivity type, second semiconductor regions of the first conductivity type, a gate insulating film, a gate electrode, a first electrode, and a second electrode. During bipolar operation, a smaller density among an electron density and a hole density of an end of the second semiconductor layer in the termination structure portion is at most 110.sup.15/cm.sup.3.