A method of manufacturing an integrated circuit includes: growing an epitaxial layer on a process surface of a base substrate; forming, by processes applied to an exposed first surface of the epitaxial layer, first transistor cells in the epitaxial layer, each first transistor cell including a first gate electrode; and forming, by processes applied to a surface opposite to the first surface, second transistor cells, each second transistor cell including a second gate electrode.

An SJ-MOSFET and IGBT are provided in a single semiconductor chip. Furthermore, a balance is made between a carrier amount of n-type columns and a carrier amount of p-type columns, to encourage formation of a depletion layer in when a reverse voltage is applied in the SJ-MOSFET section. Provided is a includes a semiconductor substrate, a super junction structure formed on a front surface side of the semiconductor substrate, and a field stop layer formed at a position overlapping with the super junction structure on a back surface side of the semiconductor substrate, in a manner to not contact an end of the super junction structure on the back surface side.

An integrated circuit chip is formed with an active layer and a trap rich layer. The active layer is formed with an active device layer and a metal interconnect layer. The trap rich layer is formed above the active layer. In some embodiments, the active layer is included in a semiconductor wafer, and the trap rich layer is included in a handle wafer.

Performance of a semiconductor device is improved without increasing an area size of a semiconductor chip. For example, a source electrode of a power transistor and an upper electrode of a capacitor element have an overlapping portion. In other word, the upper electrode of the capacitor element is formed over the source electrode of the power transistor through a capacitor insulating film. That is, the power transistor and the capacitor element are arranged in a laminated manner in a thickness direction of the semiconductor chip. As a result, it becomes possible to add a capacitor element to be electrically coupled to the power transistor while suppressing an increase in planar size of the semiconductor chip.

An integrated circuit chip is formed with a circuit layer, a trap rich layer and through-semiconductor-vias. The trap rich layer is formed above the circuit layer. The through-semiconductor-vias are also formed above the circuit layer. In some embodiments, the circuit layer is included in a wafer, and the trap rich layer and through-semiconductor-vias are included in another wafer. The two wafers are bonded together after formation of the trap rich layer and through-semiconductor-vias. Additionally, in some embodiments, yet another wafer may also be bonded to the wafer that includes the trap rich layer and through-semiconductor-vias. Furthermore, in some embodiments, another circuit layer may be formed in the wafer that includes the trap rich layer and through-semiconductor-vias.

In order to realize an SJ-MOSFET and an IGBT on a single chip and realize a new arrangement configuration for an SJ-MOSFET section and an IGBT section in a single semiconductor chip, provided is a semiconductor device including a semiconductor substrate; two or more super-junction transistor regions provided on the semiconductor substrate; and one or more IGBT regions that are provided in regions sandwiched by the two or more super-junction transistor regions, in a cross section obtained by cleaving along a pane perpendicular to the semiconductor substrate.

A method is disclosed. The method comprises fabricating a device layer on a top portion of a semiconductor wafer that comprises a substrate. The device layer comprises an active device. The method also comprises forming a trap rich layer at a top portion of a handle wafer. The forming comprises etching the top portion of the handle wafer to form a structure in the top portion of the handle wafer that configures the trap rich layer. The method also comprises bonding a top surface of the handle wafer to a top surface of the semiconductor wafer. The method also comprises removing a bottom substrate portion of the semiconductor wafer.

According to the present invention, a switching element includes a substrate, a first gate pad formed on the substrate, a second gate pad formed on the substrate, a first resistor portion formed on the substrate, the first resistor portion connecting the first gate pad and the second gate pad to each other, and a cell region formed on the substrate and connected to the first gate pad. Thus, measurement of the gate resistance value and selection from gate resistances of the switching element can be performed after the completion of the gate-resistor-incorporating-type switching element.

A capacitive component region is formed below a temperature detecting diode or below a protective diode. In addition, the capacitive component region is formed below an anode metal wiring line connecting the temperature detecting diode and an anode electrode pad and below a cathode metal wiring line connecting the temperature detecting diode and a cathode electrode pad. The capacitive component region is an insulating film interposed between polysilicon layers. Specifically, a first insulating film, a polysilicon conductive layer, and a second insulating film are sequentially formed on a first main surface of a semiconductor substrate, and the temperature detecting diode, the protective diode, the anode metal wiring line, or the cathode metal wiring line is formed on the upper surface of the second insulating film. Therefore, it is possible to improve the static electricity resistance of the temperature detecting diode or the protective diode.

An integrated device includes a semiconductor well formed in an epitaxial layer, and a guard ring formed in the epitaxial layer and surrounding the semiconductor well. The semiconductor well and the guard ring include a type of semiconductor different from that of the epitaxial layer. The integrated device also includes an insulating layer formed atop the guard ring, and multiple gate electrodes formed on a top surface of the insulating layer, overlapping the guard ring and surrounding the semiconductor well. The gate electrodes include a first gate electrode and a second gate electrode separated by a gap. An intersecting line between the top surface of the insulating layer and a side wall of the first gate electrode partially overlaps an area that is defined based on an intersecting line between the top surface of the insulating layer and a side wall of the second gate electrode above the guard ring.