In a method for manufacturing a semiconductor device, when a second conductive type impurity layer is formed to provide a deep layer having a second conductive type in a first concavity and to provide a channel layer having the second conductive type on a surface of a drift layer, an epitaxial growth is performed under a growth condition that a contact trench provided by a recess is formed on a surface of a part of the second conductive type impurity layer corresponding to a center position of the first concavity, and a contact region is formed by ion-implanting a second conductive type impurity on a bottom of the contact trench.

MOSHFET devices are provided, along with their methods of fabrication. The MOSHFET device can include a substrate; a multilayer stack on the substrate; a ultra-thin barrier layer on the multilayer stack, wherein the ultra-thin barrier layer has a thickness of about 0.5 nm to about 10 nm; a dielectric, discontinuous thin film layer on portions of the ultra-thin barrier layer, wherein the dielectric, discontinuous thin film layer comprises SiO.sub.2; a plurality of source electrodes and drain electrodes formed directly on the ultra-thin barrier layer in an alternating pattern such that the dielectric, discontinuous thin film layer is positioned between adjacent source electrodes and drain electrodes; a plurality of gate electrodes on the dielectric, discontinuous thin film layer; and a gate interconnect electrically connecting the plurality of gate electrodes.

A field effect transistor (FET) device is provided. The FET device includes an active region and a gate. The active region includes a source at a first end of the active region and a drain at a second end of the active region. The gate extends across the active region and includes at least one end extending past a corresponding edge of the active region by a sub-lithographic dimension.

Structures and methods of forming self-aligned unsymmetric gate (SAUG) FinFET are provided. The SAUG FinFET structure has two different gate structures on opposite sides of each fin: a programming gate structure and a switching gate structure. The SAUG FinFET may be used as non-volatile memory (NVM) storage element that may be electrically programmed by trapping charges in the charge trapping dielectric (e.g., Si.sub.3N.sub.4) with appropriate bias on the control gate of the programming gate structure. The stored data may be sensed by sensing the channel current through the SAUG FinFET in response to a bias on the switching gate of the switching gate structure.

An integrated circuit includes a semiconductor substrate having a first type of conductivity and a semiconductor component. The semiconductor component includes: a buried semiconductor region having a second type of conductivity opposite to the first type of conductivity; a first gate region and a second gate region each extending in depth from a front face of the semiconductor substrate to the buried semiconductor region; a third gate region extending in depth from the front face of the semiconductor substrate and being electrically connected to the buried semiconductor region; and an active area delimited by the first gate region, the second gate region and the buried semiconductor region.

A three-dimensional structure with an FD-SOI transistor includes a handler wafer, a first device layer and a second device layer stacked in sequence from bottom to top. The first device layer includes a first SOI layer, a first FD-SOI transistor and a first back gate. The first SOI layer includes a first front side and a first back side. The first FD-SOI transistor is disposed on the first front side. The first back gate is disposed on the first back side. The second device layer includes a second SOI layer, a second FD-SOI transistor and a second back gate. The second SOI layer includes a second front side and a second back side. The second FD-SOI transistor is disposed on the second front side. The second back gate is disposed on the second back side.

A multi-gate semiconductor device includes a plurality of nanostructures vertically stacked over a substrate, a gate dielectric layer wrapping around the plurality of nanostructures, a gate conductive structure over the gate dielectric layer, and a first insulating spacer alongside the gate conductive structure and over the plurality of nanostructures. The first insulating spacer is in direct contact with the gate conductive structure and the gate dielectric layer.

A semiconductor device is provided. The semiconductor device includes a substrate, a first gate electrode, and a second gate electrode. The first gate electrode is disposed on the substrate. The first gate electrode has a first dopant of a first conductive type. The second gate electrode is disposed on the substrate. The second gate electrode has a second dopant of a second conductive type different from the first conductive type.

A vertical semiconductor device with a continuous gate length and a method of manufacturing the same, and an electronic apparatus including the same. The semiconductor device includes: a semiconductor base on a substrate; first and second vertical channel portions on the semiconductor base, where the first and second vertical channel portions are vertical relative to the substrate, protrude from the semiconductor base, are spaced apart from in a first direction and self-aligned with each other, and the semiconductor base extends continuously between the first and second vertical channel portions; a first source/drain portion and a second source/drain portion on the first vertical channel portion and the second vertical channel portion, respectively; and a gate stack at least partially on the first vertical channel portion, the semiconductor base, and the second vertical channel portion to define a continuous channel between the first source/drain portion and the second source/drain portion.

An integrated circuit includes a semiconductor substrate having a first type of conductivity and a semiconductor component. The semiconductor component includes: a buried semiconductor region having a second type of conductivity opposite to the first type of conductivity; a first gate region and a second gate region each extending in depth from a front face of the semiconductor substrate to the buried semiconductor region; a third gate region extending in depth from the front face of the semiconductor substrate and being electrically connected to the buried semiconductor region; and an active area delimited by the first gate region, the second gate region and the buried semiconductor region.