An electronic device includes an n-type substrate having a first concentration of n-type dopants, an intrinsic epitaxial layer on the n-type substrate having a second concentration of n-type dopants that is less than the first concentration of n-type dopants, an n-type epitaxial layer on the intrinsic epitaxial layer having a third concentration of n-type dopants that is greater than the second concentration of n-type dopants, and a p-type epitaxial layer on the n-type epitaxial layer. A method includes growing an intrinsic epitaxial layer having a second concentration of n-type dopants on an n-type substrate having a higher first concentration of n-type dopants, growing an n-type epitaxial layer having a third concentration of n-type dopants on the intrinsic epitaxial layer, the third concentration of n-type dopants being greater than the second concentration of n-type dopants, and growing a p-type epitaxial layer on the n-type epitaxial layer.

A method forms an integrated circuit, by steps including forming a polysilicon layer having a first side over a semiconductor substrate having a top surface, forming over the semiconductor substrate a first resist layer having a second side spaced apart from the first side, forming a diode well extending into the semiconductor substrate between the first side and the second side, the diode well having a first conductivity type, forming over the semiconductor substrate a second resist layer having a third side, and forming a diode terminal extending into the semiconductor substrate between the first side and the third side, the diode terminal having an opposite second conductivity type and extending from the diode well along the top surface.

A semiconductor device which includes two or more integrated deep trench features configured as a Zener diode. The Zener diode includes a plurality of deep trenches extending into semiconductor material of the substrate and a dielectric deep trench liner that includes a dielectric material. The deep trench further includes a doped sheath contacting the deep trench liner and an electrically conductive deep trench filler material within the deep trench. The doped sheath of adjacent deep trenches overlap and form a region of higher doping concentration which sets the breakdown voltage of the Zener diode. The Zener diode can be used as a triggering diode to limit the voltage on other components in a semiconductor device.

Provided is a semiconductor device including a semiconductor substrate; a transistor portion provided in the semiconductor substrate; a current sensing portion for detecting current flowing through the transistor portion; an emitter electrode set to an emitter potential of the transistor portion; a sense electrode electrically connected to the current sensing portion; and a Zener diode electrically connected between the emitter electrode and the sense electrode. Provided is a semiconductor device fabricating method including providing a transistor portion in a semiconductor substrate; providing a current sensing portion for detecting current flowing through the transistor portion; providing an emitter electrode set to an emitter potential of the transistor portion; providing a sense electrode electrically connected to the current sensing portion; and providing a Zener diode electrically connected between the emitter electrode and the sense electrode.

A semiconductor device which includes two or more integrated deep trench features configured as a Zener diode. The Zener diode includes a plurality of deep trenches extending into semiconductor material of the substrate and a dielectric deep trench liner that includes a dielectric material. The deep trench further includes a doped sheath contacting the deep trench liner and an electrically conductive deep trench filler material within the deep trench. The doped sheath of adjacent deep trenches overlap and form a region of higher doping concentration which sets the breakdown voltage of the Zener diode. The Zener diode can be used as a triggering diode to limit the voltage on other components in a semiconductor device.

A semiconductor device includes a semiconductor layer over a semiconductor substrate with adjacent first and second portions, the first portion having a first conductivity type, and the second portion having a second, opposite, conductivity type, and an isolation trench extending through first and second portions and laterally surrounding the first and second portions of the semiconductor layer. A method includes implanting dopants of a first conductivity type in a first portion of a semiconductor layer, implanting dopants of a second, opposite, conductivity type in a second portion of the semiconductor layer that is adjacent to the first portion, and forming an isolation trench that extends through and laterally surrounds the first and second portions to form a junction between the interior portions of the first and second portions within the isolation trench that is approximately planar.

A semiconductor device and a manufacturing method of forming the semiconductor device are provided. The semiconductor device includes an active area and a periphery area surrounding the active area, the semiconductor device includes a semiconductor substrate, an epitaxial layer, a field oxide layer, a polysilicon layer, a dielectric layer and a metal contact layer. The semiconductor substrate has a silicon carbide layer. The epitaxial layer is disposed on the semiconductor layer and the epitaxial layer has a doped layer. The polysilicon layer is disposed on the field oxide layer. The polysilicon layer at the periphery area has a plurality of P-plus regions and a plurality of N-plus regions and the plurality of P-plus regions and the plurality of N-plus regions are alternatively arranged to form a zener diode.

A Zener diode comprising: a PN junction formed in a semiconductor material; and one or more stress-inducing regions configured to impart a compressive stress in the PN junction along a current flow direction of the PN junction.

Provided is a semiconductor device that includes: a semiconductor substrate having a first doped region of a first doping type and a second doped region of a second doping type, the first doped region being beneath but immediately adjacent to, the second doped region, with the first doping type being opposite the second doping type, thereby forming a junction region between the first doped region and the second doped region; and an additional layer that has been deposited above the junction region having similar mechanical properties as the semiconductor substrate. The additional layer covers at least 50% of a projection area of the junction region. The second doped region has a top surface, the additional layer has a bottom surface, and at least 90% of the bottom surface of the additional layer is electrically insulated from the top surface of the second doped region.

Breakdown diodes and methods of making the same are described. Such a breakdown diode can be fabricated in a semiconductor substrate and have a junction configured to breakdown under a target reverse bias applied across the junctions. The junction is located below the surface of the substrate by a distance suitable for ameliorating mechanical stress impact to the reverse bias breakdown voltage of the junction. Moreover, the junction is located away from an interface causing noise issues.