H10D30/831

VERTICAL JUNCTION FINFET DEVICE AND METHOD FOR MANUFACTURE
20170077270 · 2017-03-16 · ·

A vertical junction field effect transistor (JFET) is supported by a semiconductor substrate that includes a source region within the semiconductor substrate doped with a first conductivity-type dopant. A fin of semiconductor material doped with the first conductivity-type dopant has a first end in contact with the source region and further includes a second end and sidewalls between the first and second ends. A drain region is formed of first epitaxial material grown from the second end of the fin and doped with the first conductivity-type dopant. A gate structure is formed of second epitaxial material grown from the sidewalls of the fin and doped with a second conductivity-type dopant.

Semiconductor device and method for producing the same

A semiconductor device includes a semiconductor body with a front face and a back face, having an active zone located at the front face, a front surface metallization layer having a front face and a back face directed towards the active zone, the front surface metallization layer being provided on the front face of the semiconductor body and being electrically connected to the active zone, and a first barrier layer, including amorphous molybdenum nitride, located between the active zone and the metallization layer. Further, a method for producing such a device is provided.

Crystalline multilayer structure and semiconductor device
09590050 · 2017-03-07 · ·

Provided is a crystalline multilayer structure having good semiconductor properties. In particular, the crystalline multilayer structure has good electrical properties as follows: the controllability of conductivity is good; and vertical conduction is possible. A crystalline multilayer structure includes a metal layer containing a uniaxially oriented metal as a major component and a semiconductor layer disposed directly on the metal layer or with another layer therebetween and containing a crystalline oxide semiconductor as a major component. The crystalline oxide semiconductor contains one or more metals selected from gallium, indium, and aluminum and is uniaxially oriented.

SILICON CARBIDE CHANNEL WITH CAPPING SEMICONDUCTOR HAVING HIGHER CHARGE CARRIER MOBILITY
20250113568 · 2025-04-03 ·

The disclosure provides a structure including a silicon carbide (SiC) channel horizontally between a source and a drain drift region. The SiC channel has opposite doping from the source and the drain drift region. A capping semiconductor is on the SiC channel and is horizontally between the source and the drain drift region. The capping semiconductor includes a semiconductor having a higher charge carrier mobility than the SiC channel. A gate structure is on the capping semiconductor.

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
20250113552 · 2025-04-03 · ·

The present disclosure relates to a semiconductor device and a method of manufacturing semiconductor device. The present disclosure relates particularly to MOSFET transistors. A semiconductor device according to the disclosure including: a first-conductivity-type substrate, a first-conductivity-type epitaxy layer including a JFET region and a second-conductivity-type shield region, two well regions including two source regions, gate oxide including a gate, a drain adjacent to the first-conductivity-type substrate, the first-conductivity-type substrate is adjacent to the first-conductivity-type epitaxy layer, the two well regions are adjacent to the first-conductivity-type epitaxy layer, the JFET region is located between the two well regions, the source contact region is the outermost layer and is adjacent to the two source regions, and the gate oxide is adjacent to the two well regions, the two source regions, and the JFET region.

METHOD FOR FORMING ELECTRODES, SEMICONDUCTOR DEVICE AND SEMICONDUCTOR WAFER
20250113578 · 2025-04-03 ·

Disclosed is a method for forming electrodes, a semiconductor device, and a semiconductor wafer. The semiconductor wafer includes: a plurality of semiconductor bodies and kerf regions arranged between the semiconductor bodies; at least one device electrode arranged above at least one of the semiconductor bodies; and at least one kerf electrode arranged above at least one of the kerf regions. The at least one device electrode includes a first device electrode layer patterned from a first electrically conducting layer and a second device electrode layer patterned from a second electrically conducting layer different from the first electrically conducting layer. The at least one kerf electrode includes a first kerf electrode layer patterned from the first electrically conducting layer and is devoid of a second kerf electrode layer.

Nitride semiconductor device

A nitride semiconductor device includes: a substrate; a nitride semiconductor layer above the substrate; a high-resistance layer above the nitride semiconductor layer; a p-type nitride semiconductor layer above the high-resistance layer; a first opening penetrating through the p-type nitride semiconductor layer and the high-resistance layer to the nitride semiconductor layer; an electron transport layer and an electron supply layer covering an upper portion of the p-type nitride semiconductor layer and the first opening; a gate electrode above the electron supply layer; a source electrode in contact with the electron supply layer; a second opening penetrating through the electron supply layer and the electron transport layer to the p-type nitride semiconductor layer; a potential fixing electrode in contact with the p-type nitride semiconductor layer at a bottom part of the second opening; and a drain electrode.

Methods and systems to improve uniformity in power FET arrays

A vertical, fin-based field effect transistor (FinFET) device includes an array of individual FinFET cells. The array includes a plurality of rows and columns of separated fins. Each of the separated fins is in electrical communication with a source contact. The vertical FinFET device also includes one or more rows of first inactive fins disposed on a first set of sides of the array of individual FinFET cells, one or more columns of second inactive fins disposed on a second set of sides of the array of individual FinFET cells, and a gate region surrounding the individual FinFET cells of the array of individual FinFET cells, the first inactive fins, and the second inactive fins.

Fabrication method for JFET with implant isolation

Methods and semiconductor devices are provided. A vertical junction field effect transistor (JFET) includes a substrate, an active region having a plurality of semiconductor fins, a source metal layer on an upper surface of the fins, a source metal pad layer coupled to the semiconductor fins through the source metal layer, a gate region surrounding the semiconductor fins, and a body diode surrounding the gate region.

Method for manufacturing a grid

A grid is manufactured with a combination of ion implant and epitaxy growth. The grid structure is made in a SiC semiconductor material with the steps of a) providing a substrate comprising a doped semiconductor SiC material, said substrate comprising a first layer (n1), b) by epitaxial growth adding at least one doped semiconductor SiC material to form separated second regions (p2) on the first layer (n1), if necessary with aid of removing parts of the added semiconductor material to form separated second regions (p2) on the first layer (n1), and c) by ion implantation at least once at a stage selected from the group consisting of directly after step a), and directly after step b); implanting ions in the first layer (n1) to form first regions (p1). It is possible to manufacture a grid with rounded corners as well as an upper part with a high doping level. It is possible to manufacture a component with efficient voltage blocking, high current conduction, low total resistance, high surge current capability, and fast switching.