The invention relates to a device comprising a transistor (T1, T2) comprising: a source (42) and a drain (43), a plurality of channels (41a, 41b, 41c) based on a semi-metallic material, a gate-all-around (50) surrounding the channels (41a, 41b, 41c), a gate dielectric layer (30) separating each channel (41a, 41b, 41c) and the gate-all-around (50), source and drain contacts (40S, 40D) based on the semi-metallic material,

Advantageously, the gate-all-around (50) totally surrounds one or more of the channels (41a, 41b, 41c), according to a GAA architecture.

The invention also relates to a method for producing such a device.

The invention relates to a device comprising transistors (T1, T2, T3), each comprising: a channel (41) with the basis of a semiconductive material, a gate-all-around (50), totally surrounding said channel (41), a source (42) and a drain (43) on either side of the channel (41), and source and drain contacts (60S, 60, 60D), a gate dielectric layer (30) separating the channel (41) and the gate-all-around (50), spacers (70) on either side of the gate (50). Advantageously, the gate dielectric layer (30) and the spacers (70) are formed by at least one single and same continuous layer (73) surrounding the gate-all-around (50). The invention also relates to a method for producing such a device.

A device comprising two transistors stacked along a main direction, the first transistor comprising channels stacked along the main direction and first source and drain contacts, the second transistor comprising channels stacked along the main direction and second source and drain contacts, wherein the first source (respectively drain) contact and the second source (respectively drain) contact are distinct and isolated from one another by a first gate dielectric layer and by a second gate dielectric layer. The invention also relates to a method for manufacturing the device.

IC devices with angled transistors, and related assemblies and methods, are disclosed herein. A transistor is referred to as angled if a longitudinal axis of an elongated semiconductor structure (e.g., a fin or a nanoribbon) based on which the transistor is built is at an angle other than 0 degrees or 90 degrees with respect to edges of front or back faces of a support structure on/in which the transistor resides, e.g., at an angle between 10 degrees and 80 degrees with respect to at least one of such edges. Angled transistors provide a promising way to increasing densities of transistors on the limited real estate of semiconductor chips.

A semiconductor device and a method of forming the same are disclosed. The method includes forming a fin with a sacrificial layer on a semiconductor substrate, forming isolation regions on the semiconductor substrate and adjacent to the fin, forming a superlattice structure with first and second nanostructured layers on the sacrificial layer, forming a sacrificial structure that surrounds the superlattice structure, forming a first spacer on the superlattice structure, forming an air gap between the superlattice structure and the fin, and forming a second spacer on the fin and below the superlattice structure.

The present invention relates to a semiconductor device and a method for manufacturing a semiconductor device. In one embodiment, a method for manufacturing a semiconductor device may comprise the steps of: growing a stack layer by alternately stacking sacrificial layers and channel regions on a substrate; forming a sacrificial poly gate on the stack layer; forming inner spacers and side spacers on side surfaces of the sacrificial layers and side surfaces of the sacrificial poly gate; and heat treating the inner spacers or the side spacers in a chamber set to a predetermined process pressure and a predetermined process temperature.

An integrated circuit device includes a substrate, a fin-type active area on the substrate, a nanosheet stacked structure including a plurality of nanosheets, a gate electrode surrounding the nanosheet stacked structure on the fin-type active area, and a source/drain region connected to one end of the plurality of nanosheets on the fin-type active area, wherein the source/drain region includes a first source/drain layer in contact with the upper surface of the fin-type active area and side surfaces of the plurality of nanosheets, a second source/drain layer covering the first source/drain layer, a third source/drain layer covering part of the second source/drain layer, and a fourth source/drain layer covering the second source/drain layer and the third source/drain layer.

A semiconductor device includes a first active pattern including a first lower pattern and first sheet patterns spaced apart from the first lower pattern in a first direction, a first gate structure including first inner gates between the first lower pattern and a lowermost first sheet pattern of the first sheet patterns, and between each pair of adjacent first sheet patterns, the first inner gates extending in a second direction that intersects the first direction, where each of the first inner gates includes a first gate electrode and a first gate insulating film, first source/drain patterns on the first lower pattern and connected to the first sheet patterns, first inner spacers between the first source/drain patterns and the first inner gates, and first nitrogen build-up areas within the first inner spacers.

A field effect transistor (FET) structure and method for making the same is disclosed. In an aspect, a FET structure comprises a vertical metal gate disposed between a first and second source/drain (S/D) epitaxial (EPI) structure and having a set of vertically-stacked, horizontal channels, all but the top channel connecting the first and second S/D EPI structures through the vertical metal gate. A high-K dielectric material is disposed between the vertical metal gate and each of the horizontal channels, and vertical spacer layers separate the vertical metal gate from the S/D EPI structures. A low-K dielectric structure is disposed above the top-most portion of the vertical metal gate and fills a recess above the vertical metal gate and between the first vertical spacer layer and the second vertical spacer layer.

A semiconductor device includes a substrate including a fin-type active area and a device separation layer configured to cover both sidewalls of the fin-type active area, a pair of nanosheet stacks each including a lower nanosheet stack arranged on the fin-type active area and an upper nanosheet stack arranged on the lower nanosheet stack, an intermediate insulating layer arranged between the lower nanosheet stack and the upper nanosheet stack, a nanosheet separation wall arranged between each of the pair of nanosheet stacks and extending in a first horizontal direction, and a pair of gate lines extending on the pair of nanosheet stacks in a second horizontal direction, wherein the nanosheet separation wall separates respective lower nanosheet stacks in the pair of nanosheet stacks from each other in the second horizontal direction.