Isolation breaks between logic cells in integrated circuit (IC) devices. A source-drain trench between adjacent channel regions includes a pair of source or drain semiconductor bodies, a first of the source or drain bodies in the source-drain trench is connected to a first of the channel regions, a second of the source or drain bodies in the source-drain trench is connected to a second of the channel regions, and a dielectric isolation is in the source-drain trench and between the pair of source or drain bodies. The dielectric isolation may include a void between layers or sidewalls of dielectric. The pair of source or drain bodies may include highly conductive, metallized layers in contact with the dielectric isolation.

A semiconductor device may include a channel layer including a two-dimensional material layer and a molecular crystal layer on the two-dimensional material layer, the two-dimensional material layer including a two-dimensional semiconductor material; a source electrode and a drain electrode, which respectively may be on both sides of the channel layer; and a gate insulating layer and a gate electrode, which respectively may be on the channel layer between the source electrode and the drain electrode. The molecular crystal layer may include a plate-shaped aromatic compound of C.sub.20-C.sub.40, and may have a thickness of 1 molecular layer to 5 molecular layers.

Disclosed is a liquid-phase alloy catalyst, method of manufacturing same and two-dimensional chalcogenide thin film comprising thermodynamically induced grain boundary in monolayer crystal using same. In detail, a liquid-phase alloy catalyst for synthesizing a two-dimensional chalcogenide thin film, the liquid-phase alloy catalyst comprising an alloy including an alkali metal, a transition metal and an oxygen atom. The present disclosure has the effect of stably providing a uniform chemical environment through an independent liquid alloy catalyst in a chemically non-uniform synthetic environment.

An electronic device including a two-dimensional material is provided. The electronic device may include a substrate; a metal layer on a partial region of the substrate; a two-dimensional material layer over the metal layer and an upper surface of the substrate; and an insertion layer between the metal layer and the two-dimensional material layer.

A semiconductor device includes a nano sheet including a first sheet region, a third sheet region, and a second sheet region extending horizontally between the first and third sheet regions, the first region having a curved profile; a first conductive line surrounding the second sheet region of the nano sheet; a second conductive line coupled to the first sheet region of the nano sheet; and a data storage element coupled to the third sheet region of the nano sheet.

A method of forming a semiconductor device comprises the following steps. A dielectric layer is formed over a substrate. A 2D material layer is formed over the dielectric layer. An adhesion layer is formed over the 2D material layer. Source/drain electrodes are formed on opposite sides of the adhesion layer. A first high-k gate dielectric layer is formed over the adhesion layer, wherein the adhesion layer has a material different from a material of the first high-k gate dielectric layer.

A method of manufacturing a semiconductor layer includes preparing an insulating layer comprising a silicon oxide. A metal mask is formed on the insulating layer. An oxygen plasma process is performed on the metal mask. The metal mask is removed. The insulating layer is loaded into a chamber to form a semiconductor layer.

A transistor includes a source, a drain, a gate layer, an undoped or lightly doped channel layer, and a gate dielectric layer. The undoped or lightly doped channel layer extends between the source and the drain. The channel layer includes at least one heavily doped region to distribute channel potential along the channel layer. The gate dielectric layer is between the gate layer and the channel layer.

Semiconductor devices and methods of forming the same are provided. A method includes providing a workpiece having a semiconductor structure; depositing a two-dimensional (2D) material layer over the semiconductor structure; forming a source feature and a drain feature electrically connected to the semiconductor structure and the 2D material layer, wherein the source feature and drain feature include a semiconductor material; and forming a gate structure over the two-dimensional material layer and interposed between the source feature and the drain feature. The gate structure, the source feature, the drain feature, the semiconductor structure and the 2D material layer are configured to form a field-effect transistor. The semiconductor structure and the 2D material layer function, respectively, as a first channel and a second channel between the source feature and the drain feature.

A method for manufacturing a semiconductor device includes: forming a two-dimensional material layer made of transition metal dichalcogenides on a semiconductor substrate unit; forming two lower metallic layers made of first metallic material and spaced apart on the two-dimensional material layer; forming two upper metallic layers made of second metallic material respectively on the two lower metallic layers so as to form two double-layer metal structures; and subjecting the two double-layer metal structures to a selective annealing process and cooling to room temperature. The semiconductor device made by the method is also provided.