A micromechanical component having a substrate, a membrane that covers an opening structured into the substrate from a first side of the substrate and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate, and having at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode can be displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate. A production method for a micromechanical component is also described.

A spring-mass system including a support, a mass mobile with respect to the support, at least one first and one second spring connecting the mass to the support allowing a displacement of the mass relative to the support along a first direction, the first spring being the symmetrical of the second spring with respect to an axis, each first and second spring comprising at least first and second series-connected beams arranged in zigzag, and a first closed frame surrounding the mass, at a distance from the mass and the support, each first beam having a first end connected to the support and a second end attached to the first frame and each second beam having a third end attached to the first frame and a fourth end connected to the mass.

The present application provides a three-axis gyroscope, which comprises a substrate on which a first plate element, a second plate element, a third plate element, a first drive module, and a second drive module are disposed. The first driving module, the first plate element, the second plate element, the third plate element and the second driving module are disposed in an axial direction. Thereby, problems caused by use of frames and coupling flexible structures of three-axis gyroscopes available now may be solved effectively.

Provided is a light reflecting element including a support portion, a hinge portion, and a light reflecting portion, in which the light reflecting portion includes a support layer and a light reflecting layer, the hinge portion includes a torsion bar portion, extending portions extending from side portions of the torsion bar portion, and movable pieces extending from end portions of the extending portions, an end portion of the torsion bar portion is fixed to the support portion, the hinge portion is twistedly deformable around an axis of the torsion bar portion, the support layer is fixed to the movable pieces, and a recessed portion is provided at least at a portion of the support layer facing a space located between the first movable piece and the second movable piece.

Electrostatically-excited hermetic multi-cell microelectromechanical actuator and production method thereof The present invention discloses an electrostatically excited microelectromechanical actuator and its fabrication method. The structure of the actuator comprises a set of electrostatic-capacitive cells that, when electrostatically excited, create local torques. The perimeter-fixed and excited cell structure deforms in a variety of ways in the vertical direction over a range of several or tens of micrometers, thus allowing to perform functions of an AFM sensor or micro-fluidic controls. The advantages of such a perimeter clamped structure are higher operating frequencies, higher AFM imaging throughput and higher output energies. Also, it is inherently hermetic, making it less sensitive to contamination and it is less damped when the actuator operates in liquids. All embodiments of the invention can be fabricated using CMOS-compatible MEMS micromachining technology based on wafer bonding and bulk micromachining processes.

An electromechanical microsystem including two electromechanical transducers, a first deformable diaphragm and a cavity hermetically containing a deformable medium keeping a constant volume under the action of a change in the external pressure. The first diaphragm forms at least one portion of a first wall of the cavity and has a freely deformable area. The free area cooperates with an external member so that its deformation induces, or is induced by, a movement of the external member. The electromechanical transducers are configured so that a first electromechanical transducer forms a portion of the first wall of the cavity, and a second electromechanical transducer forms at least one portion of the wall opposite to the first wall of the cavity.

A micromechanical pressure sensor device includes: an MEMS wafer having a front side and a rear side; a first micromechanical functional layer formed above the front side of the MEMS wafer; and a second micromechanical functional layer formed above the first micromechanical functional layer. A deflectable first pressure detection electrode is formed in one of the first and second micromechanical functional layers. A fixed second pressure detection electrode is formed spaced apart from and opposite the deflectable first pressure detection electrode. An elastically deflectable diaphragm area is formed above the front side of the MEMS wafer. An external pressure is applied to the diaphragm area via an access opening in the MEMS wafer, and the wafer is connected to the deflectable first pressure detection electrode via a plug-like joining area.

The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, an end of the second beam coupled to a motion actuator, and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

The invention relates to a MEMS loudspeaker (1) for generating sound waves in the audible wavelength spectrum, with a carrier substrate (2) that features a sub-strate cavity (6) with two substrate openings (7, 8), which are formed on two opposite sides of the carrier substrate (2), an actuator structure (3), in particular a piezoelectric actuator structure, which is arranged in the area of one of the two substrate openings (7, 8) and is connected to the carrier substrate (2) in its edge area, and a membrane (4) anchored in its edge area, which, by means of the actuator structure (3), can be set into vibration for generating sound waves. In accordance with the invention, in a cross-sectional view of the MEMS loudspeaker (1), the membrane (4) is spaced at a distance from the actuator structure (3), such that an intermediate cavity (13) is formed between these two. Furthermore, the MEMS loudspeaker (1) features a coupling element (13) arranged in the intermediate cavity (13), which connects the actuator structure (3) to the membrane (4) and may vibrate with this with respect to the carrier substrate (2).