Aspects are directed to MEMS-type devices. In specific example, a MEMS device is to become actuated at least in part by an input signal and is coupled to or integrated with: a control circuit including at least one micro-mirror to provide a field of view; modulation circuitry to modulate the input signal via signal modulation, wherein in response to the input signal, as modulated, driving the MEMS apparatus, the field of view changes based on the operation of the control circuit. Such a MEMS device may be further configured to operate as a separate unit and/or with another device provide input signals, and to derive a signal indicative of nonlinearities or of changes in capacitance related to the MEMS device.