A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.

A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.

A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.

An electrode configuration for a microelectromechanical system, including a first electrode structure and a second electrode structure. The first electrode structure has a receptacle, and the second electrode structure has a finger. The first and second electrode structure are designed for a relative movement in relation to one another along a movement axis. A first width of the receptacle, perpendicular to the movement axis, tapers along the movement axis at least in a first region, and/or a second width of the finger, perpendicular to the movement axis, tapers along the movement axis at least in a second region.

An actuator device comprises an enclosed volume region defined by a housing body and a movable surface, such that at least a portion of the enclosed volume region is expandable from an initial volume state to an enlarged volume state. An electrically conductive porous material is disposed in the enclosed volume region, wherein the electrically conductive porous material has a mass density of from about 0.5 mg/cc to about 100 mg/cc, and wherein at least about 90% of the electrically conductive porous material is a carbonaceous material. A first electrode and a second electrode are configured to pass an electric current through the electrically conductive porous material. When an electric current is passed through the electrically conductive porous material, air disposed in the enclosed volume region expands and displaces the movable surface. A method of displacing a movable surface in an actuator device is also described.

An actuator device comprises an enclosed volume region defined by a housing body and a movable surface, such that at least a portion of the enclosed volume region is expandable from an initial volume state to an enlarged volume state. An electrically conductive porous material is disposed in the enclosed volume region, wherein the electrically conductive porous material has a mass density of from about 0.5 mg/cc to about 100 mg/cc, and wherein at least about 90% of the electrically conductive porous material is a carbonaceous material. A first electrode and a second electrode are configured to pass an electric current through the electrically conductive porous material. When an electric current is passed through the electrically conductive porous material, air disposed in the enclosed volume region expands and displaces the movable surface. A method of displacing a movable surface in an actuator device is also described.

An actuator device comprises an enclosed volume region defined by a housing body and a movable surface, such that at least a portion of the enclosed volume region is expandable from an initial volume state to an enlarged volume state. An electrically conductive porous material is disposed in the enclosed volume region, wherein the electrically conductive porous material has a mass density of from about 0.5 mg/cc to about 100 mg/cc, and wherein at least about 90% of the electrically conductive porous material is a carbonaceous material. A first electrode and a second electrode are configured to pass an electric current through the electrically conductive porous material. When an electric current is passed through the electrically conductive porous material, air disposed in the enclosed volume region expands and displaces the movable surface. A method of displacing a movable surface in an actuator device is also described.

Aspects are directed to a MEMS device configurable to receive signals from a first, a second, a third, and a fourth signal source operating at a first, a second, a third, and a fourth frequency, respectively. The MEMS device may be configured to combine the first signal with the second signal generating a first combined signal, and to combine the third signal with the fourth signal generating a second combined signal. The first combined signal may be coupled to the first terminal of the MEMS device while the second combined signal may be coupled to the second terminal of the MEMS device. The first common terminal may be configured to produce an output associated with the second and fourth frequencies. The MEMS device may be further configured to derive from the produced output a signal indicative of nonlinearities or of changes in capacitance related to the MEMS device.

In the field of micro-electromechanical systems (MEMS) for autofocus camera systems, a MEMS device comprises a fixed part, a movable platform with an image sensor, and temperature sensors on both the platform and fixed part. A processor calculates the temperature difference to determine the platform's displacement. This method eliminates the need for additional capacitive or piezoelectric components, reducing complexity and cost. The described technology is particularly useful in consumer electronics, such as smartphone and automotive cameras, where precise focus control may be vital.

A MEMS device includes an electrical distribution substrate and a spacer ring extending upward therefrom. An actuator stator is positioned above the electrical distribution substrate and within the spacer ring. An outer frame extends from a floor of the actuator stator. An actuator rotor is suspended above the floor. A sensor is supported by the actuator rotor. A conductive stack is positioned above the spacer ring. A wire electrically connects the sensor to the conductive stack. A plurality of vias extending through the spacer ring and to the electrical distribution substrate, thereby allowing electrical communication between the sensor and the electrical distribution substrate while enabling vertical displacement of the sensor and actuator rotor.