An air separation module includes a canister having an inlet end and an outlet end arranged along a canister axis, a separator supported within the canister and arranged to separate a compressed air flow received at the air separation module into an oxygen-depleted air flow fraction and an oxygen-enriched air flow fraction, and an inlet cap. The inlet cap is seated about the inlet end of the canister, contains therein a portion of the separator, and has an oxygen-enriched air outlet port fluidly separated from the outlet end of the canister by the separator for diverting the oxygen-enriched air flow fraction to the external environment. Nitrogen generation systems and methods of making air separation modules are also described.

Disclosed is a plasma treatment apparatus that includes a cover attached to a body part, a plasma generation unit that generates plasma and provides the plasma to the cover, a gas supply unit that supplies a source gas for generating the plasma to the plasma generation unit, and an exhaust unit that exhausts an exhaust gas from the cover. The cover comprises, at an edge, a sealing part brought into close contact with the body part to seal a space between the cover and the body part.

Disclosed is a plasma treatment apparatus that includes a cover attached to a body part, a plasma generation unit that generates plasma and provides the plasma to the cover, a gas supply unit that supplies a source gas for generating the plasma to the plasma generation unit, and an exhaust unit that exhausts an exhaust gas from the cover. The cover comprises, at an edge, a sealing part brought into close contact with the body part to seal a space between the cover and the body part.

An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O.sub.3) to oxygen (O.sub.2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO.

An apparatus and method for abating ozone and reducing sulfuric acid from an exhaust stream. In a semiconductor manufacturing plant the processing of wafers involves the cleaning and etching of wafers, the resultant processing may produce gasses which must be abated. The apparatus and method utilizes UV light in high doses to convert ozone (O.sub.3) to oxygen (O.sub.2). By ensuring laminar flow through the UV light chambers, the efficiency of the system is sufficient to allow for the remaining impurities in the exhaust air to be removed through the use of an RTO.

A system and method of abating air pollution and stimulating crop growth. A reagent is introduced to a crop canopy to neutralize air pollutants within said canopy, wherein the reagent induces an oxidation-reduction chemical reaction with the air pollution present throughout the acreage of crops, and by means of the reaction effectually neutralizes the harmful effects of the air pollutants on the crops. The reagent is diluted using a venturi valve or other means. The flow rate of said reagent is regulated using an electronic control unit, based on data collected from at least one type of sensor in the canopy that is in communication with the control unit.

A central controller for completely cleaning indoor air pollution is disclosed. The central controller is disposed in an indoor space to detect air pollution and output air pollution data. Intelligence operations are implemented in accordance with the air pollution data by the central controller to determine a location of the air pollution, and a controlling instruction is intelligently and selectively issued through a wireless communication transmission to enable a plurality of physical filtration devices or a plurality of chemical filtration devices. Each physical filtration device or each chemical filtration device includes a fan and a filter element. The fan is driven upon receiving the controlling instruction to generate an airflow convection in a direction. The air pollution is removed through the filter element, so that the air pollution in the indoor space is completely cleaned to form a clean and safe breathing air state.

A central controller for completely cleaning indoor air pollution is disclosed. The central controller is disposed in an indoor space to detect air pollution and output air pollution data. Intelligence operations are implemented in accordance with the air pollution data by the central controller to determine a location of the air pollution, and a controlling instruction is intelligently and selectively issued through a wireless communication transmission to enable a plurality of physical filtration devices or a plurality of chemical filtration devices. Each physical filtration device or each chemical filtration device includes a fan and a filter element. The fan is driven upon receiving the controlling instruction to generate an airflow convection in a direction. The air pollution is removed through the filter element, so that the air pollution in the indoor space is completely cleaned to form a clean and safe breathing air state.

The present disclosure provides a photocatalyst filter that can efficiently decompose and eliminate ozone gas or VOC and has a low ventilation resistance. The photocatalyst filter includes a sheet-like filter substrate and a photocatalyst layer supported by the filter substrate. The photocatalyst layer exhibits a photocatalytic action by receiving light having a wavelength of 400 nm or more. The photocatalyst filter has an aperture ratio of 35% or more and 80% or less.

The present disclosure provides a photocatalyst filter that can efficiently decompose and eliminate ozone gas or VOC and has a low ventilation resistance. The photocatalyst filter includes a sheet-like filter substrate and a photocatalyst layer supported by the filter substrate. The photocatalyst layer exhibits a photocatalytic action by receiving light having a wavelength of 400 nm or more. The photocatalyst filter has an aperture ratio of 35% or more and 80% or less.