Embodiments of the invention provide methods for selective deposition on different materials using a surface treatment. According to one embodiment, the method includes providing a substrate containing a first material layer having a first surface and a second material layer having a second surface, and performing a chemical oxide removal process that terminates that second surface with hydroxyl groups. The method further includes modifying the second surface by exposure to a process gas containing a hydrophobic functional group, the modifying substituting the hydroxyl groups on the second surface with the hydrophobic functional group, and selectively depositing a metal-containing layer on the first surface but not on the modified second surface by exposing the substrate to a deposition gas.

Embodiments of the invention provide methods for selective deposition on different materials using a surface treatment. According to one embodiment, the method includes providing a substrate containing a first material layer having a first surface and a second material layer having a second surface, and performing a chemical oxide removal process that terminates that second surface with hydroxyl groups. The method further includes modifying the second surface by exposure to a process gas containing a hydrophobic functional group, the modifying substituting the hydroxyl groups on the second surface with the hydrophobic functional group, and selectively depositing a metal-containing layer on the first surface but not on the modified second surface by exposing the substrate to a deposition gas.

A flameless thermal oxidizer apparatus for a gaseous stream containing hydrogen includes a vessel containing a ceramic matrix bed; and a dip tube extending into the ceramic matrix bed, the dip tube including a first flow path for a first stream having hydrogen therein, and a second flow path for a second stream having an oxidant therein to be mixed with the first stream for introduction into the ceramic matrix bed. A related method is also provided.

One aspect of the invention relates to a method comprising a single-stage conversion of an atmospheric pollutant, such as NO, NO.sub.2 and/or SO.sub.x in a first stream to one or more mineral acids and/or salts thereof by reacting with nonionic gas phase chlorine dioxide (ClO.sub.2.sup.0), wherein the reaction is carried out in the gas phase. Another aspect of the invention relates to a method comprising first adjusting the atmospheric pollutant concentrations in a first stream to a molar ratio of about 1:1, and then reacting with an aqueous metal hydroxide solution (MOH). Another aspect of the invention relates to an apparatus that can be used to carry out the methods disclosed herein. The methods disclosed herein are unexpectedly efficient and cost effective, and can be applied to a stream comprising high concentration and large volume of atmospheric pollutants.

One aspect of the invention relates to a method comprising a single-stage conversion of an atmospheric pollutant, such as NO, NO.sub.2 and/or SO.sub.x in a first stream to one or more mineral acids and/or salts thereof by reacting with nonionic gas phase chlorine dioxide (ClO.sub.2.sup.0), wherein the reaction is carried out in the gas phase. Another aspect of the invention relates to a method comprising first adjusting the atmospheric pollutant concentrations in a first stream to a molar ratio of about 1:1, and then reacting with an aqueous metal hydroxide solution (MOH). Another aspect of the invention relates to an apparatus that can be used to carry out the methods disclosed herein. The methods disclosed herein are unexpectedly efficient and cost effective, and can be applied to a stream comprising high concentration and large volume of atmospheric pollutants.

An exhaust treatment system includes a dust-removal system. The dust-removal system has an electric field device (1021) and an exhaust cooling device. The electric field device (1021) includes an inlet of the electric field device, an outlet of the electric field device, a dust-removal electric field cathode (10212), and a dust-removal electric field anode (10211), the dust-removal electric field cathode (10212) and the dust-removal electric field anode (10211) being used for generating an ionization dust-removal electric field. The exhaust cooling device is used for reducing an exhaust temperature before the inlet of the electric field device. An exhaust dust-removal system facilitates to reduce greenhouse gas emission, and also facilitates to reduce hazardous gas and pollutant emission, so that gas emission is more environment-friendly.

An exhaust treatment system includes a dust-removal system. The dust-removal system has an electric field device (1021) and an exhaust cooling device. The electric field device (1021) includes an inlet of the electric field device, an outlet of the electric field device, a dust-removal electric field cathode (10212), and a dust-removal electric field anode (10211), the dust-removal electric field cathode (10212) and the dust-removal electric field anode (10211) being used for generating an ionization dust-removal electric field. The exhaust cooling device is used for reducing an exhaust temperature before the inlet of the electric field device. An exhaust dust-removal system facilitates to reduce greenhouse gas emission, and also facilitates to reduce hazardous gas and pollutant emission, so that gas emission is more environment-friendly.

Integrated exhaust gas systems, methods, and processes are disclosed that includes pretreatment, treatment and post-treatment processes arranged in a variety of reaction environments to address varied application requirements and end product requirements is described in this disclosure. In addition, a contemplated ballast water treatment system—that can be used in combination with the integrated exhaust gas systems can treat seawater and return it to storage within the vessel or send treated water back to the sea. This system can be sized to treat the seawater as it is leaving the ship without prior treatment, while the seawater is aboard or treat the seawater that is within the ship and add any additional treatment to the water, as the seawater leaves the ship. This system is not involved with pumping the seawater into the ship or filtering the water prior to storage as ballast water.

A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.