A laser apparatus may include a spectrum controller and a spectrum modulator. The spectrum controller may control a center wavelength and/or a bandwidth of a spectrum of a laser beam. The spectrum modulator may modulate the spectrum of the laser beam having the center wavelength and/or the bandwidth controlled by the spectrum controller. Thus, the laser beam may have the spectrum optimal for a semiconductor fabrication process. Particularly, the substrate may be accurately diced using the laser beam having the optimal spectrum.

A laser device includes: a laser resonator for emitting a laser beam; a condenser lens for collecting the laser beam emitted from the laser resonator; an optical fiber for transmitting the laser beam collected by the condenser lens; at least one light sensor opposing a light receiving surface of the condenser lens and outside an optical path of the laser beam, the at least one light sensor detecting an amount of return light from the condenser lens; and a controller for determining a presence of an abnormality when a value of the amount detected by the at least one light sensor is greater than a predetermined maximum threshold.

A laser marker includes a laser light source; a scanner configured to scan laser light, from the laser light source, outward; a first housing accommodating the laser light source; a second housing accommodating the scanner, the second housing being rotatable with respect to the first housing; a sensor configured to output a detection signal; and a controller configured to: based on receiving the detection signal indicating that the rotation position of the second housing is either in a first or second rotation position from the sensor, control the laser light source to emit the laser light outward; and based on receiving the detection signal, not indicating that the rotation position of the second housing is either in the first or second rotation position, control the laser light source not to emit the laser light outward.

A laser alignment system is used to align an output fiber with a fiber laser, for example, when coupling a feeding fiber to a process fiber using a beam coupler or switch. The alignment system includes a laser alignment apparatus that is coupled at a first end to the output fiber and at a second end to a beam dump/power meter. The alignment apparatus defines a light passage and a light capture chamber along the light passage. When light is not aligned into the core of the output fiber, at least a portion of the light passing out of the output fiber will be captured by the light capture chamber and detected by a photodetector in optical communication with the light capture chamber. By monitoring the readings of the photodetector, the output fiber may be properly aligned with the laser light from the fiber laser.

A control method for a spectrum waveform of a laser beam output from a laser apparatus to an exposure apparatus includes acquiring a longitudinal chromatic aberration of the exposure apparatus, setting a target value of an evaluation value of the spectrum waveform by using a relation between the longitudinal chromatic aberration and the evaluation value, and controlling the spectrum waveform by using the target value.

A method and a device for detecting a focal position of a laser beam, particularly a machining laser beam in a laser machining head, includes an optical element which is arranged in the laser beam converging toward the focal point and which is designed to outcouple a reflection from the laser beam path, and a sensor arrangement which is designed to detect beam characteristics of said laser beam in the region of the focal point in the laser extension direction, and which measures the outcoupled reflection of the laser beam at at least two locations that are offset to one another in the extension direction, in order to determine the current focal position.

A calibrating method includes controlling a laser radiator to radiate calibration laser light to an object such that a pattern is projected in a laser coordinate system with respect to the laser radiator; controlling a camera to obtain a first image of first light points of the calibration laser light projected on a surface of the object when the object is in a first position; and controlling the camera to obtain a second image of second light points of the calibration laser light projected on the surface of the object when the object is in the second position. A positional relationship between the laser coordinate system and the camera coordinate system is calculated based on the three-dimensional positions of the first light points and the three-dimensional positions of the second light points.

In a measurement device which measures an operation state of a galvanoscanner that scans a laser beam by reflecting the laser beam emitted from a laser light source by mirrors which are rotationally driven by motors, and operates based on an operation command, the measurement device includes: a position information acquisition unit which acquires a rotational position of the mirror in time series as position information; an irradiation position specification unit which specifies an irradiation position of the laser beam irradiated towards a workpiece, based on acquired position information; and an output unit which outputs the irradiation position of the laser beam specified to be visually confirmable.

A device for a laser working system includes at least one optical element, which is arranged in a beam path of the device, and one temperature detector assembly having a matrix of detector elements. The temperature detector assembly is design to measure a two-dimensional temperature distribution of the optical element.

A laser processing apparatus that processes a workpiece using laser light outputted from a laser processing head includes an output detection unit for detecting an output of the laser light for a predetermined time period; a fluctuation calculation unit for calculating a fluctuation in the output of the laser light detected by the output detection unit; and an angle command unit for commanding an angle by which the laser processing head is to be inclined with respect to the normal of the workpiece, based on the fluctuation calculated by the fluctuation calculation unit.