Provided is a MEMS microphone including: a substrate having a cavity penetrating thereon; a diaphragm supported by the substrate and covering the cavity; a back plate provided above the diaphragm, wherein a first preset gap is formed between the back plate and the diaphragm; and a first support member received in the cavity includes a support portion, a connection portion, and a convex portion. The connection portion extends from the support portion towards the substrate until being fixed to the substrate. The convex portion extends from an end of the support portion approaching the diaphragm towards the diaphragm until supporting the diaphragm. The diaphragm and the connection portion form a second preset gap along a vibration direction of the diaphragm. The diaphragm of the MEMS microphone has higher robustness and higher anti-dropping capability.

Provided is a MEMS microphone including: a substrate having a cavity penetrating thereon; a diaphragm supported by the substrate and covering the cavity; a back plate provided above the diaphragm, wherein a first preset gap is formed between the back plate and the diaphragm; and a first support member received in the cavity includes a support portion, a connection portion, and a convex portion. The connection portion extends from the support portion towards the substrate until being fixed to the substrate. The convex portion extends from an end of the support portion approaching the diaphragm towards the diaphragm until supporting the diaphragm. The diaphragm and the connection portion form a second preset gap along a vibration direction of the diaphragm. The diaphragm of the MEMS microphone has higher robustness and higher anti-dropping capability.