A flexible mold has a mold body having a nanoimprinting microstructure and is gradually thickened from its periphery to the middle. Also, a resist spreading nanoimprinting method that integrates a soft mold into a dovetailed meal ring and then deforms it to form a point contact with a substrate before an imprinting process is followed and then convert a loading force into a specific distributed contact pressure for driving the resist flow by using an elastomer cushion pad with a pre-designed convex surface.

The present invention provides an imprint apparatus that performs an imprint process of forming a pattern of an imprint material on a processing target region on a substrate by using a mold, including a digital mirror device including two-dimensionally arrayed mirror elements and configured to irradiate the substrate with light reflected by the mirror elements, a measurement unit configured to measure, for each of a plurality of segments obtained by dividing a region in which the mirror elements are arrayed so as to include a plurality of the mirror elements, a light amount of light emitted from each segment, and a control unit configured to control the mirror elements included in each segment based on a measurement result of the measurement unit.

A process for producing a structured surface, in which a composition comprising nanowires is applied to a surface and structured, especially by partial displacement of the composition. When the solvent is removed, the nanowires aggregate to form structures. These may be transparent and also conductive.

Disclosed is a stamp (14) for an imprint lithography process, the stamp comprising an elastomer stamp body including a polysiloxane bulk portion (110) and a patterned surface comprising a feature pattern (16) for imprinting an imprinting composition (12) wherein the elastomer stamp body comprises a basic organic amine in an amount of at least 0.1% by weight based on the total weight of the elastomer stamp body. Also disclosed are methods of manufacturing such a stamp, and a method of forming a patterned layer on a substrate using such a stamp.

A flattening apparatus includes a mold holding unit configured to suck and hold a mold including a flat portion, a substrate holding unit holding a substrate, an exposure unit irradiating a light curing composition supplied onto the substrate with light at least via the mold to cure the composition, the composition being irradiated with the light and cured in a state where the flat portion of the mold is in contact with the composition on the substrate, a gas suction unit sucking gas from a spatial region between the mold and the mold holding unit, a gas supply unit supplying the gas to the spatial region, and a control unit controlling the gas suction unit and the gas supply unit to perform temperature adjustment processing for supplying the gas to the spatial region in a state where the mold is sucked and held onto the mold holding unit.

Provided is an imprinting method suitable for positioning. The imprinting method includes: supplying an imprint material onto a substrate; bringing a patterned portion of a mold into contact with the imprint material, which has been supplied onto the substrate in the supplying of the imprint material, to form a pattern on the imprint material in a predetermined pattern region on the substrate; and increasing viscosity of the imprint material at a predetermined position, which includes a position of a predetermined mark provided on the substrate, other than the pattern region to be higher than viscosity of the imprint material in the pattern region after the supplying of the imprint material and before the bringing of the patterned portion into contact with the imprint material.

Methods and systems for qualifying a multi-layered optical stack include providing the multi-layered optical stack including a first optical layer and a second optical layer. The first optical layer includes a first pair of fiducial marks and the second optical layer includes a second pair of fiducial marks Each of the first pair are spaced laterally from each of the second pair such that the first pair and the second pair are visible through the optical stack. A first angle defined between a first reference line connecting the first pair and a global reference line is determined. A second angle defined between a second reference line connecting the second pair and the global reference line is determined. The multi-layered optical stack is qualified for use in the optical projection system based on whether a difference between the first angle and the second angle is less than a predetermined threshold.

The present application provides a mobile terminal shell, a preparation method, and a mobile terminal. The mobile terminal shell comprises: a substrate made of metal; an enhanced part provided on at least a part of the surface of one side of the substrate and made of a first material; an antenna slot provided on the substrate and filled with a second material, wherein the strength of the first material is higher than the strength of the second material.

Disclosed is a stamp (14) for an imprint lithography process, the stamp comprising an elastomer stamp body including a polysiloxane bulk portion (110) and a patterned surface comprising a feature pattern (16) for imprinting an imprinting composition (12) wherein the elastomer stamp body comprises a basic organic amine in an amount of at least 0.1% by weight based on the total weight of the elastomer stamp body. Also disclosed are methods of manufacturing such a stamp, and a method of forming a patterned layer on a substrate using such a stamp.

A stamp replication device for producing stamps for the production of at least one of microstructured and nanostructured components has a platform, a cover that is positionable on the platform and a holding device for a stamp carrier, wherein the holding device is provided on the cover or on the platform and includes a carrier as well as a microstructured vacuum surface on the carrier for holding the stamp carrier. In addition, a method for producing a holding device for a stamp replication device as well as a method for producing a stamp are specified.