A scrubber for removing pollutant compounds from a gas stream. At least one gas channel introduces the gas stream to a lower portion of the scrubber. An inlet chamber directs the gas stream upwards to form a vertical gas stream. A constriction section has a vertical axis of symmetry and includes a centrally arranged venturi nozzle, and is above and in flow connection with an upper end of the inlet chamber for accelerating the vertical gas stream. A reaction chamber is arranged above and in flow connection with the constriction section. A reagent in the reaction chamber converts pollutant compounds in the gas stream to reaction products. A discharge channel in flow connection with the reaction chamber discharges gas and particles including the reaction products from the reaction chamber. A particle separator separates particles from the gas. A return channel recycles a portion of the particles to the reaction chamber.

Implementations are described herein that include producing sorbents that include a polymeric material and a zero-valent metal. An amount of radioactive iodine can be captured using the sorbent to produce iodine-loaded sorbents. Additionally, the iodine-loaded sorbents can be encapsulated in one or more metallic materials.

The phosphazene covalent organic framework (COF) is a material with high efficiency to improve the removal of iodine from nuclear waste. The COF can be obtained by a solvothermal reaction of hexa(4-formyl-phenoxy)cyclotriphosphazene and 1,3,6,8-tetra(aminophenyl)pyrene. The resulting three-dimensional phosphazene COF has iodine uptakes as high as 9.4 g g.sup.1 due to its 3D framework with higher specific surface areas and interconnected channels.

Highly porous nucleophilic organic cages (Nu-POC) were in-situ synthesized on cotton fibers by a condensation reaction between cyanuric chloride and melamine, and the products were employed as a robust wearable and flexible detoxifying protective material (denoted as POCotton) for vaporous pesticides. The covalent growth of Nu-POC particles on surfaces of cotton fibers retained the physical characteristics of Nu-POC to the greatest extend, which include specific surface area and porosity, while the cotton fabrics still remained wearable. The resultant POCotton can repeatedly adsorb fumigant vapors instantly (i.e., equilibrium reached within one minute) and massively (i.e., adsorption capacity at 596.88 mg/g of methyl iodide).

Provided is a catalyst system capable of removing perfluorinated compounds and nitrous oxide. An exhaust gas is heated in two stages through a heat exchange unit and applied to a heater unit. The heater unit generates a flame to heat the exhaust gas to a high temperature. A catalyst unit is directly connected to a heating space of the heater unit so the heated exhaust gas comes into contact with a catalyst, and the perfluorinated compounds and the nitrous oxide are decomposed in the catalyst unit.

A system is provided, wherein the system includes a remote plasma source, a process chamber, a pressure swing adsorption filter and a chemical adsorption filter. The pressure swing adsorption filter and the chemical adsorption filter the exhaust from the process chamber to produce a filtered exhaust being a fluorine rich gas stream.

A process includes providing a reactor containing a compound of the formula SiO.sub.x, wherein 0x2, and receiving, at the reactor, fluorinated gas. The process also includes obtaining a gaseous mixture formed at an elevated temperature in the reactor and removing silicon tetrafluoride from the gaseous mixture. An apparatus includes a reactor containing a compound of the formula SiO.sub.x, wherein 0x2, a component for receiving fluorinated gas at the reactor, a heating element for heating the compound of the formula SiO.sub.x and the fluorinated gas in the reactor, and a separation component for removing silicon tetrafluoride from a gaseous mixture formed in the reactor. A process of semiconductor manufacturing includes defluorinating exhaust gas using the process. A system for semiconductor manufacturing includes a set of components for carrying out the process.

Several embodiments of the present technology are directed to the removal of one or more air pollutants using cooling and/or calcium-containing particles. In some embodiments, a method for removing air pollutants comprises flowing a gas stream having calcium-containing particles and one or more of mercury or hydrochloric acid molecules, and cooling the gas stream, thereby causing at least a portion of the calcium-containing particles to adsorb to the mercury and/or hydrochloric acid molecules in the gas stream. The method can further comprise, after cooling the gas stream, filtering the gas stream to remove at least a portion of the calcium-containing particles having adsorbed mercury and hydrochloric acid.

A processing system is provided for capturing and recycling process gases from semiconductor manufacturing operations. The system includes a process chamber configured to process a substrate and an exhaust system coupled to the process chamber and configured to remove process effluent from the process chamber. An abatement system including a first metal-organic framework (MOF) container is coupled downstream of the exhaust system, where the first MOF container is configured to capture a first gas species of the process effluent.

A pyrolysis method and system are provided that utilizes a multistage dehalogenation method to effectively remove halogen-containing compounds that are present in an initial recycled plastic feedstock. More particularly, the multistage dehalogenation system and process may involve physical sorting the plastic feedstock, melting and separating the feedstock, and subjecting the feedstock a two-stage pyrolysis with intermediate HCl removal.