Patent classifications
B01D53/685
METHOD FOR PRODUCING HYDROGEN FLUORIDE ADSORBENT
A method for producing a hydrogen fluoride adsorbent having a high adsorption capacity of hydrogen fluoride including: an adsorption step of bringing hydrogen fluoride-containing gas that contains hydrogen fluoride and dilution gas for diluting the hydrogen fluoride where a concentration of the hydrogen fluoride is 0.5% by volume or more and 60% by volume or less into contact with a metal fluoride such that the hydrogen fluoride in the hydrogen fluoride-containing gas is adsorbed on the metal fluoride in a proportion of 2% by mass or more and 25% by mass or less; and a desorption step of heating the metal fluoride on which the hydrogen fluoride is adsorbed in the adsorption step in heat treatment atmosphere gas at a temperature of 240 C. or lower such that the adsorbed hydrogen fluoride is desorbed from the metal fluoride.