A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device includes a substrate, an edge support structure connected to the substrate, and a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane having non-uniform stiffness. The membrane includes a piezoelectric layer, a first electrode and a second electrode coupled to opposing sides of the piezoelectric layer, and a mechanical support layer coupled to one of the first electrode and the second electrode.

Aspects of this disclosure relate to a capacitive micromachined ultrasonic transducer (CMUT) with a contoured electrode. In certain embodiments, the CMUT has a contoured electrode. The electrode may be non-planar to correspond to a deflected shape of the outer plate. A change in distance between the electrode and the plate after deflection may be greater than a minimum threshold across the width of the CMUT.

An elastic wave device includes a substrate including a piezoelectric material layer and an IDT electrode on the piezoelectric material layer. The IDT electrode includes a Pt film, a Ti film on the Pt film, and an Al-based metal film on the Ti film. The Ti film is quasi-single-crystalline.

A transducer array for an ultrasound probe is provided. The transducer array includes a plurality of transducer elements. Each of the transducer elements have an acoustic stack configured to generate ultrasound signals. The transducer array includes a front layer having a base and a transmission surface. The front layer is mounted to the acoustic stacks of the plurality or transducer elements. The transmission surface includes a linear incline. The transmission surface is configured to emit the ultrasound signals.

An ultrasonic transducer and an ultrasonic probe including the same are provided. The ultrasonic transducer includes a piezoelectric layer configured to convert an electric signal and an ultrasound into each other, and a dematching layer having a uniform thickness, the dematching layer being arranged on a partial region of the piezoelectric layer and configured to reflect the second ultrasound wave that is incident on the dematching layer.

The present invention provides an ultrasonic fingerprint recognition module and a display panel. Advantages of the present invention are that a vibration absorbing layer can absorb mechanical energy of a piezoelectric thin film layer such that a number of cycles of later ultrasound is significantly reduces to extremely increase a vertical resolution of ultrasound fingerprint recognition and overall recognition effect and precision.

There are provided a piezoelectric element in which the peeling of a surface electrode is suppressed, and a piezoelectric vibrating device, a portable terminal, an acoustic generator, an acoustic generating device and an electronic apparatus including the same. A piezoelectric actuator includes a piezoelectric element including a plate-shaped stacked body including inner electrodes and piezoelectric layers laminated, a surface electrode disposed on one of main surfaces of the stacked body, the surface electrode being electrically connected to the inner electrodes. The surface electrode has a first area and a second area. The first area is an area mainly containing silver, and the second area is an area mainly containing silver and palladium and disposed so as to contact a piezoelectric layer.

An ultrasound transducer device can include an ultrasound transducer, and first electrodes that abut second electrodes. Each first electrode can have an annular shape about a rotation axis of the ultrasound transducer device. The first electrodes can be annular and can each have different diameters. The device can also include first support members that includes a support base and first deformation portions, and each first deformation portion can protrude from the support base along the rotation axis. The first deformation portions can be annular and can each have different diameters.

According to one embodiment, a transducer includes a first electrode, a second electrode, a third electrode, a first piezoelectric portion, and a second piezoelectric portion. A resistor and an inductor are connected to the second electrode. The first piezoelectric portion is provided between the first electrode and the third electrode. The second piezoelectric portion is provided between the second electrode and the third electrode. A ratio of the absolute value of a difference between a first resonant frequency and a second resonant frequency to the first resonant frequency is 0.29 or less. The first resonant frequency is mechanical. The first resonant frequency is of the first piezoelectric portion and the second piezoelectric portion. The second resonant frequency is of a parallel resonant circuit. The parallel resonant circuit includes an electrostatic capacitance, the inductor, and the resistor. The electrostatic capacitance is between the second electrode and the third electrode.

Methods for improving the electromechanical coupling coefficient and bandwidth of micromachined ultrasonic transducers, or MUTs, are presented as well as methods of manufacture of the MUTs improved by the presented methods.