A boring method is provided and can include directing a laser beam at an exposed face of a bulk target in a longitudinal direction. The laser beam can be configured to liquefy and/or gasify the target within the laser beam. The method can also include removing, by the laser beam, a channel of predetermined length and width within the target. The method can further include moving the laser beam in a closed loop of predetermined diameter to define a cut portion of the target laterally bounded by the closed loop. A ligament of the cut portion can remain attached to the target. The method can additionally include separating the ligament from the target. The method can also include removing the cut portion from the target after separating the ligament to form a bore.

A laser machining method forms a machined portion in a machining area of a machining object by irradiating the machining area with a pulse laser beam. The laser machining method includes an irradiation process of irradiating the machining area with the pulse laser beam output from an excimer laser apparatus by guiding the pulse laser beam to part of the machining area and moving the guided pulse laser beam through irradiation spots, and a movement process of moving the machining object in a height direction of the machining object. The irradiation process is performed at a plurality of height positions on the machining object moved in the height direction in the movement process. In the irradiation process, at least part of each of the irradiation spots of the pulse laser beam overlaps another irradiation spot adjacent to the irradiation spot.

Disclosed is an optical system for laser machining that enables simpler and more reliable machining of several patterns simultaneously on the same part. The system comprises an ultra-short pulse laser source for generating a source laser beam; a device with a separation means for separating a source laser beam into a plurality of separated laser beams, such that each of the separated laser beams is directed in a direction of propagation specific thereto; a spatial offsetting unit for obtaining, from the plurality of separated laser beams, a plurality of offset laser beams such that each offset laser beam can propagate around a main axis of propagation A specific thereto and is capable of describing a movement around the main axis of propagation A; and a focusing means configured to focus each offset laser beam on a workpiece in the direction of the axis of propagation specific thereto.

The present invention relates to an assembly for material processing using a laser beam, in particular for laser drilling, comprising a dynamic deflection device (AE) for the laser beam (LS), and an optical assembly, with which a laser beam (LS) exiting the deflection device (AE) is focused onto a processing plane (W). Along an optical axis, the optical assembly has a first optical system (OS1) and a second optical system (OS2), which are designed and arranged such that the laser beam (LS) forms an intermediate focus (ZF) between the first and the second optical system (OS1, OS2), and intersects the optical axis when entering the first optical system (OS1) at an angle to the optical axis and at a distance therefrom between the second optical system (OS2) and the processing plane (W). The suggested assembly has a simple, stable structure, with which efficient ablation of large and deep boreholes or cuts in a workpiece is enabled.

The present invention relates to an assembly for material processing using a laser beam, in particular for laser drilling, comprising a dynamic deflection device (AE) for the laser beam (LS), and an optical assembly, with which a laser beam (LS) exiting the deflection device (AE) is focused onto a processing plane (W). Along an optical axis, the optical assembly has a first optical system (OS1) and a second optical system (OS2), which are designed and arranged such that the laser beam (LS) forms an intermediate focus (ZF) between the first and the second optical system (OS1, OS2), and intersects the optical axis when entering the first optical system (OS1) at an angle to the optical axis and at a distance therefrom between the second optical system (OS2) and the processing plane (W). The suggested assembly has a simple, stable structure, with which efficient ablation of large and deep boreholes or cuts in a workpiece is enabled.

A control unit (130) is provided for controlling a projection device (100) for directing a light beam (101) to a target (140). The projection device (100) comprises a light beam deflection unit (120) for two-dimensionally deflecting a light beam (101) in a first direction (x) with a first deflection frequency and in a second direction (y) with a second deflection frequency substantially equal to the first deflection frequency. The control unit (130) is configured to control the deflection unit (120) in such a way that a light spot (141) generated by the light beam (101) on the target (140) moves along a nearly circular path (144) changing its radius (R) over time.

A laser machine comprises: a head including optical parts allowing reflection of a laser beam or allowing the laser beam to pass through, while being rotatable about rotary axes, and a focusing optical system that focuses the laser beam; a moving mechanism that allows the head and a target to move relative to each other; and a control unit that controls rotations of the optical parts in such a manner that an irradiation intended position to be reached by an emission optical axis when the laser beam is emitted to the target moves in a curvilinear pattern or a linear pattern, controls movement by the moving mechanism so as to move the head and the target relative to each other, and controls emission output from the laser source so as to change a condition for emitting the laser beam based on the rotation angles of the optical parts.

A laser machine comprises: a head including optical parts allowing reflection of a laser beam or allowing the laser beam to pass through, while being rotatable about rotary axes, and a focusing optical system that focuses the laser beam; a moving mechanism that allows the head and a target to move relative to each other; and a control unit that controls rotations of the optical parts in such a manner that an irradiation intended position to be reached by an emission optical axis when the laser beam is emitted to the target moves in a curvilinear pattern or a linear pattern, controls movement by the moving mechanism so as to move the head and the target relative to each other, and controls emission output from the laser source so as to change a condition for emitting the laser beam based on the rotation angles of the optical parts.

A laser machine comprises: a head including optical parts allowing reflection of a laser beam or allowing the laser beam to pass through, while being rotatable about rotary axes, and a focusing optical system that focuses the laser beam; a moving mechanism that allows the head and a target to move relative to each other; and a control unit that controls rotations of the optical parts in such a manner that an irradiation intended position to be reached by an emission optical axis when the laser beam is emitted to the target moves in a curvilinear pattern or a linear pattern, controls movement by the moving mechanism so as to move the head and the target relative to each other, and controls emission output from the laser source so as to change a condition for emitting the laser beam based on the rotation angles of the optical parts.

A laser machine comprises: a head including optical parts allowing reflection of a laser beam or allowing the laser beam to pass through, while being rotatable about rotary axes, and a focusing optical system that focuses the laser beam; a moving mechanism that allows the head and a target to move relative to each other; and a control unit that controls rotations of the optical parts in such a manner that an irradiation intended position to be reached by an emission optical axis when the laser beam is emitted to the target moves in a curvilinear pattern or a linear pattern, controls movement by the moving mechanism so as to move the head and the target relative to each other, and controls emission output from the laser source so as to change a condition for emitting the laser beam based on the rotation angles of the optical parts.