A method for machining a sputtering target that includes a sputtering surface, an opposing surface opposite to the sputtering surface, and an outer peripheral surface being between the sputtering surface and the opposing surface comprises the steps of: fixing the sputtering target on a fixing table by mounting the sputtering surface or the opposing surface of the sputtering target on the fixing table; and cutting the outer peripheral surface of the sputtering target by a cutting tool while rotating the cutting tool along a circumferential direction of the outer peripheral surface of the sputtering target.

Methods and apparatuses for aligning a first hole in a first panel with a second hole in a second panel to define a through-hole. A wall that defines the second hole is gripped from within the through-hole to pull the second panel towards the first panel and thereby establish a clamp-up of the first panel and the second panel.

Methods and apparatuses for providing a clamp-up are provided. An apparatus for forming a clamp-up comprises an end effector. The end effector is positioned at a first side of a panel joint and applies a first clamp-up force to a first panel of a panel joint and an equal and opposite second clamp-up force to a second panel of the panel joint to provide the clamp-up.

A vacuum pressure supply system comprises: a plurality of vacuum pressure supply paths for supplying a vacuum pressure from a vacuum source to a holding unit that holds an object using the vacuum pressure; a pressure adjusting mechanism that adjusts the pressure in the vacuum pressure supply paths to obtain mutually different holding forces for holding the object; and a switching mechanism that switches the connection state of the vacuum source and the plurality of vacuum pressure supply paths in order to change the holding force of the holding unit. The switching mechanism switches the connection state by selecting one of the vacuum pressure supply paths and connecting the selected vacuum pressure supply path to the vacuum source.

A system for damping machine-induced vibration in a workpiece includes a plurality of workpiece holders to hold the workpiece in a work cell. The system also includes a machine tool located in the work cell. The machine tool performs a machining operation on the workpiece while the workpiece is held by the plurality of workpiece holders. The system further includes a damping apparatus coupled to the workpiece. The damping apparatus controls machine-induced vibrations in the workpiece during the machining operation.

A processing device includes: a first processing position (A1) and a second processing position (A2) at which rough processing is performed on a workpiece (W); a third processing position (B1) at which final finishing processing is performed on the workpiece (W) that was processed at the second processing position (A2); flexible vises (7) provided to the first processing position (A1) and the second processing position (A2), the flexible vises (7) securing the workpiece (W) by clamping the same; and a quick clamping device (20) provided to the third processing position (B1), the quick clamping device (20) securing the workpiece (W) by means of a pin. The processing device also includes a control unit that controls a rough processing tool for performing rough processing and a final finishing processing tool for performing final finishing processing.

A fixture and a method of operating the fixture are disclosed for repositioning a workpiece disposed on the fixture to correct an offset between the centerline of the workpiece and an indexing position on the fixture. The fixture includes one or more linear actuators that linearly move vacuum grippers on their outboard ends into contact with surfaces of the workpiece. Vacuum is applied to the vacuum grippers, which enables the vacuum grippers to grip the surfaces of the workpiece. The linear actuators are driven to reposition the workpiece on the fixture to reduce the offset between the two below a threshold value. When in position, the fixture secures the workpiece in place for subsequent machining operations that may be performed on the workpiece.

Disclosed is a substrate chuck. More particularly, a substrate chuck including a chucking film made of a flexible material capable of elastic deformation to cover a mounting region of an upper surface of a surface plate on which a substrate is to be mounted; and a substrate chuck for gripping the substrate by applying suction pressure to a lower part of the chucking film to form a vacuum between the chucking film and the substrate; and a substrate scrubbing apparatus including the substrate chuck are provided.

A method for holding a workpiece to be machined including the steps of: includes manufacturing a locking jig for locking the workpiece on a support base by additive production techniques wherein the locking jig includes a wall defining a loop. Irregularities present on at least one end of the wall arrangement are eliminated to define a support surface for the workpiece to be machined. A seat is formed in at least one end of the wall for housing a seal. At least one opening is formed on the support base and connected to at least one inner space of the loop on one side and with a suction device on the other side. A vacuum is supplied through the opening and the inner space which enables the workpiece to stick to and remain stationary with respect to the support surface during machining of the workpiece.

The workpiece support apparatus has: a case member that has an axial center and that is provided to a workpiece support part; a support member that is provided to the case member so as to be movable in the axial center direction and that has one end part projecting outwardly from the case member and supporting the workpiece so as to serve as a projection end part; a suction pad suctions the workpiece; an adjustment device that is provided between the support member and the case member in order to adjust contact pressure of the support member; an air intake path that sets the inside of the suction pad and that provides connection between a sucking port and an air intake port provided to suction and fix the projection end part to the workpiece; and a fixing device that fixes the support member to the case member.