Integrated circuit structures having conductive structures in fin isolation regions are described. In an example, an integrated circuit structure includes a vertical stack of horizontal nanowires over a sub-fin. The integrated circuit structure also includes a gate structure. The gate structure includes a first gate structure portion over the vertical stack of horizontal nanowires, a second gate structure portion laterally adjacent to the first gate structure portion, wherein the second gate structure portion is not over a channel structure, and a gate cut between the first gate structure portion and the second gate structure portion.

The present disclosure describes a method of forming low thermal budget dielectrics in semiconductor devices. The method includes forming, on a substrate, first and second fin structures with an opening in between, filling the opening with a flowable isolation material, treating the flowable isolation material with a plasma, and removing a portion of the plasma-treated flowable isolation material between the first and second fin structures.

The present application discloses a method for manufacturing a NAND flash, comprising: step 1, sequentially form a floating gate dielectric layer and a first polysilicon layer; step 2, sequentially forming an inter-gate dielectric layer and a second polysilicon layer, wherein a first doping concentration of the second polysilicon layer is less than a target doping concentration; step 3, forming a pattern transfer mask layer; step 4, patterning the pattern transfer mask layer; step 5, performing gate etching, wherein the first and second polysilicon layers subjected to the gate etching respectively form a polysilicon floating gate and the polysilicon control gate; step 6, forming a first spacer, wherein the first spacer in a storage area fully fills a first interval area; and step 7, performing self-aligned ion implantation to increase a doping concentration of the polysilicon control gate to the target doping concentration.

A semiconductor device includes a first buried layer and a second buried layer both have a first conductivity type and are disposed in a substrate, where the second buried layer is disposed on the first buried layer. A first well region has the first conductivity type and is disposed above the second buried layer. A second well region has a second conductivity type and is adjacent to the first well region. A deep trench isolation structure is disposed in the substrate and surrounds the first and second well regions, where the bottom surface of the deep trench isolation structure is lower than the bottom surface of the first buried layer. A source region is disposed in the second well region. A drain region is disposed in the first well region. A gate electrode is disposed on the first and second well regions.

A chip includes one or more first channels extending in a first direction, a first epitaxial (epi) layer coupled to the one or more first channels, a first gate, wherein the one or more first channels pass through the first gate, one or more second channels extending in the first direction, a second epi layer coupled to the one or more second channels, and a second gate, wherein the one or more second channels pass through the second gate. The chip also includes a dielectric wall extending in the first direction, wherein the dielectric wall is disposed between the first epi layer and the second epi layer, and the dielectric wall is disposed between the first gate and the second gate. The chip further includes a backside bridge underneath the first gate and the second gate, wherein the backside bridge couples the first gate and the second gate.

A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Operative channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Intervening material is laterally-between and longitudinally-along immediately-laterally-adjacent of the memory blocks. The intervening material comprises longitudinally-alternating first and second regions that individually have a vertically-elongated seam therein. The vertically-elongated seam in the first regions has a higher top than in the second regions. The seam tops in the second regions are elevationally-coincident with or below a bottom of an uppermost of the conductive tiers. Methods are disclosed.

Methods, systems, and devices for shallow trench isolation spacers are described. In some examples, shallow trenches may be formed in a silicon wafer and one or more dielectric materials may be formed in the trenches. A portion of the dielectric material may subsequently be removed (e.g., etched) and a spacer material may be formed in the trenches. In some examples, portions of the spacer material may be removed (e.g., etched) and the trenches may be filled with the dielectric material. The resulting trench may include one or more spacers that isolate the dielectric material from a gate oxide or other materials formed above the silicon wafer.

A conductive gate over a semiconductor fin is cut into a first conductive gate and a second conductive gate. An oxide is removed from sidewalls of the first conductive gate and a dielectric material is applied to the sidewalls. Spacers adjacent to the conductive gate are removed to form voids, and the voids are capped with a dielectric material to form air spacers.

A semiconductor structure includes a substrate having a first device region and a second device region in proximity to the first device region. A first trench isolation structure is disposed in the substrate between the first device region and the second device region. The first trench isolation structure includes a first bottom surface within the first device region and a second bottom surface within the second device region. The first bottom surface is lower than the second bottom surface. The first trench isolation structure includes a first top surface within the first device region and a second top surface within the second device region. The first top surface is coplanar with the second top surface.

A method includes forming a trench in a semiconductor layer of a device wafer and depositing a liner on the trench sidewalls. The liner is removed from the trench bottom, and the trench is deepened anisotropically to form an extension fully along the trench, or locally by applying a mask. The semiconductor material is removed outwardly from the extension by etching to create a cavity wider than the trench and below the liner. A space formed by the trench and cavity is filled with electrically conductive material to form a buried interconnect rail comprising a narrow portion in the trench and a wider portion in the cavity. The wider portion can be contacted by a TSV connection, enabling a contact area between the connection and buried rail. The etching forms a wider rail portion at a location remote from active devices formed on the front surface of the semiconductor layer.