A method for growing a III-V material may include forming at least one layer on a stack including a crystalline layer made of III-V material, a first masking layer surmounting the germination layer, the first masking layer having at least one first opening; depositing a second masking layer covering an upper face of the sacrificial layer; forming at least one second opening in the second masking layer; removing the sacrificial layer selectively at the first masking layer and at the second masking layer; epitaxially growing a material made of the III-V material from the germination layer; forming al least one third opening in the second masking layer; and epitaxially growing at least one material made of the III-V material from the first epitaxial layer.

A preparation method of an aluminum nitride (AlN) composite structure based on a two-dimensional (2D) crystal transition layer is provided. The preparation method includes: transferring the 2D crystal transition layer on a first periodic groove of an epitaxial substrate; forming a second periodic groove staggered with the first periodic groove on the 2D crystal transition layer; depositing a supporting protective layer; depositing a functional layer of a required AlN-based material; and removing the 2D crystal transition layer through thermal oxidation to obtain a semi-suspended AlN composite structure. The preparation method has low difficulty and is suitable for large-scale industrial production. Design windows of the periodic grooves and the AlN functional layer are large and can meet the material requirements of deep ultraviolet light-emitting diodes (DUV-LEDs) and radio frequency (RF) electronic devices for different purposes, resulting in a wide application range.

Exemplary semiconductor structures may include a silicon-containing substrate. The structures may include a layer of a metal nitride overlying the silicon-containing substrate. The structures may include a gallium nitride structure overlying the layer of the metal nitride. The structures may include an oxygen-containing layer disposed between the layer of the metal nitride and the gallium nitride structure.

Provided are high quality metal-nitride, such as aluminum nitride (AlN), films for heat dissipation and heat spreading applications, methods of preparing the same, and deposition of high thermal conductivity heat spreading layers for use in RF devices such as power amplifiers, high electron mobility transistors, etc. Aspects of the inventive concept can be used to enable heterogeneously integrated compound semiconductor on silicon devices or can be used in in non-RF applications as the power densities of these highly scaled microelectronic devices continues to increase.

A method for manufacturing a gallium nitride film includes the steps of placing a substrate so as to face a target containing nitrogen and gallium in a vacuum chamber, supplying a sputtering gas into the vacuum chamber, supplying a nitrogen radical into the vacuum chamber, generating a plasma of the sputtering gas by application of a voltage to the target, generating a gallium ion by a collision of an ion of the sputtering gas with the target, and stopping the application of the voltage to the target and depositing gallium nitride on the substrate. The gallium nitride is generated by a reaction of the gallium ion with a nitrogen anion which is generated by a reaction of an electron in the vacuum chamber with the nitrogen radical.

There is provided a gallium nitride single crystal substrate, which is a gallium nitride single crystal substrate having a diameter of 50 mm or more, with a low-index crystal plane closest to a main surface being (0001), and in which Ge concentration in the substrate is 310.sup.18 cm.sup.3 or more; and among peaks appearing in a histogram of diameters of etch pits during etching applied to the main surface with an alkaline etching solution, a first peak having a smallest diameter is a single peak having no shoulder.

The present disclosure provides a method for preparing a gallium nitride (GaN) single-crystal substrate with an edge metal mask technology. The method includes: preparing a metal mask ring on a composite epitaxial substrate, epitaxially growing a GaN single-crystal sacrificial layer in a confined manner, performing separation with interlayer decoupling of single-crystal graphene through an in-situ temperature gradient method to obtain a self-supporting GaN single-crystal sacrificial layer, epitaxially growing a GaN single-crystal thick film in a diameter expanded manner, and performing chemico-mechanical trimming on the GaN single-crystal thick film to obtain a stress-free self-supporting GaN single-crystal substrate. The metal mask ring is compatible with the GaN single-crystal preparation process (hydride vapor phase epitaxy (HVPE)), and efficiently catalyzes decomposition reaction of the nitrogen source. While prohibiting edge growth of the GaN single-crystal thick film, the present disclosure improves a crystalline quality of the GaN single-crystal substrate.

A method of forming regrown fiducials includes providing a III-V compound substrate having a device region and an alignment mark region. The III-V compound substrate is characterized by a processing surface. The method also includes forming a hardmask layer having a first set of openings in the device region exposing a first surface portion of the processing surface of the III-V compound substrate and a second set of openings in the alignment mark region exposing a second surface portion of the processing surface and etching the first surface portion and the second surface portion of the III-V compound substrate using the hardmask layer as a mask to form a plurality of trenches. The method also includes epitaxially regrowing a semiconductor layer in the trenches to form the regrown fiducials extending to a predetermined height over the processing surface in the alignment mark region.

The present invention provides a semiconductor structure comprising: a silicon substrate in [100] orientation; a scandium oxide layer over the substrate, in [111] orientation; and a scandium-rare earth-oxide layer over the scandium oxide layer. The scandium-rare earth-oxide layer can have a graded composition to transition lattice constant to match to a subsequent layer, such as an indium nitride layer having very high electron drift velocity. InN over Si (100) offers transistors, photonics and passive electronics that operate in the terahertz frequency range.

Embodiments according to the present invention provide a method for manufacturing a GaN HEMT power semiconductor epitaxy wafer having a high-quality, high-resistance buffer region, comprising: a first GaN buffer layer formation step in which carbon is doped using a metal-organic source among sources supplied for GaN growth as a precursor for carbon doping; and a second GaN buffer layer formation step in which carbon is doped by supplying a precursor for carbon doping separately from the sources supplied for GaN growth; wherein the precursor for carbon doping in the second GaN buffer layer formation step is at least one of CH.sub.4 (methane), C.sub.2H.sub.4 (ethylene), C.sub.2H.sub.2 (acetylene), C.sub.3H.sub.8 (propane), i-C.sub.4H.sub.10 (iso-butane), and [N(CH.sub.3).sub.3] (trimethylamine).