A method of manufacturing a high electron mobility transistor (HEMT) structure is disclosed. By controlling a passivation layer and a barrier layer to uninterruptedly grow in the same growth chamber, defects of the passivation layer generated in the growth process due to a drastic change in temperature, pressure, or atmosphere or degrading a quality of an interface between the passivation layer and the barrier layer could be avoided, thereby providing the passivation layer with a good quality and the interface between the passivation layer and the barrier layer with a good quality, so that the objective of improving the performance of the HEMT structure could be achieved.

The semiconductor structure includes a die structure including: a substrate, a first dielectric disposed over the substrate, a first interconnect structure disposed within the first dielectric, a second dielectric disposed on the first dielectric, and a conductive pad surrounded by the second dielectric; a capping member surrounding the die structure; and an insulating member surrounding the capping member, wherein the capping member includes a first oxynitride layer in contact with the die structure or the insulating member.

According to some embodiments, a semiconductor package may include a first semiconductor chip; a second semiconductor chip disposed on a first semiconductor chip; a wall structure disposed on the first semiconductor chip and spaced apart from the second semiconductor chip in a first direction; and a mold layer covering the first and second semiconductor chips, wherein the first semiconductor chip includes a transceiver disposed thereon and spaced apart from the second semiconductor chip, the mold layer has an opening exposing the transceiver, the wall structure is disposed in the opening and is in contact with an inner wall of the mold layer exposed to the opening, the mold layer has a first height, and the wall structure has a second height smaller than the first height.

A semiconductor device assembly can include a first semiconductor device comprising CMOS circuitry at a first active surface and a second semiconductor device having a footprint smaller than that of the first semiconductor device and including memory array circuitry at a second active surface hybrid-bonded to the first active surface. The assembly can further include a gapfill material directly contacting the first active surface of the first semiconductor device and having an upper surface coplanar with a back surface of the second semiconductor device, and a metallization layer disposed over the second semiconductor device and the gapfill material. The metallization layer can include conductive structures operably coupled to the second semiconductor device through back-side contacts of the second semiconductor device. The assembly can further include a plurality of bond pads disposed at an upper surface of the metallization layer and coupled to the conductive structures of the metallization layer.

Microelectronic assemblies, related devices and methods, are disclosed herein. In some embodiments, a microelectronic assembly may include a first die, having a first surface and an opposing second surface with conductive contacts, in a first layer; a first material surrounding the first die and extending along a thickness of the first die from the second surface, and wherein the first material includes first particles having an average diameter between 200 and 500 nanometers; a second material surrounding the first die and extending along the thickness of the first die from the first surface, and wherein the second material includes second particles having an average diameter between 0.5 and 12 microns; an interface portion, between the first and second materials, including the first and second particles; and a second die, in a second layer on the first layer, electrically coupled to the conductive contacts on the first die.

A semiconductor package includes a lower redistribution wiring layer; and a first semiconductor device on the lower redistribution wiring layer, the first semiconductor device being connected to the lower redistribution wiring layer via conductive bumps, wherein the lower redistribution wiring layer includes: a first redistribution wire in a first lower insulating layer; an insulating structure layer having an opening that exposes a portion of the first redistribution wire, the insulating structure layer including a first photosensitive insulating layer, a light blocking layer on the first photosensitive insulating layer, and a second photosensitive insulating layer on the light blocking layer; a second redistribution wire in the opening of the insulating structure layer, the second redistribution wire including a redistribution via contacting the first redistribution wire, and a redistribution line stacked on the redistribution via; and bonding pads bonded to the conductive bumps and electrically connected to the second redistribution wire.

The present disclosure relates to a flip-chip based moisture-resistant module, which includes a substrate with a top surface, a flip-chip die, a sheet-mold film, and a barrier layer. The flip-chip die has a die body and a number of interconnects, each of which extends outward from a bottom surface of the die body and is attached to the top surface of the substrate. The sheet-mold film directly encapsulates sides of the die body, extends towards the top surface of the substrate, and directly adheres to the top surface of the substrate, such that an air-cavity with a perimeter defined by the sheet-mold film is formed between the bottom surface of the die body and the top surface of the substrate. The barrier layer is formed directly over the sheet-mold film, fully covers the sides of the die body, and extends horizontally beyond the flip-chip die.

A semiconductor device has a substrate and an electrical component disposed over the substrate. A heat spreader with a plasma-enhanced surface is disposed over the electrical component. A TIM is disposed between the electrical component and plasma-enhanced surface of the heat spreader. The TIM can be deposited on the electrical component or plasma-enhanced surface. The plasma-enhanced surface contains argon ions and oxygen ions. The heat spreader is disposed in a reaction chamber. Reactant gases, such as argon and oxygen, are introduced into the reaction chamber. An electric field is formed within the reaction chamber to ionize the argon and oxygen and form the plasma-enhanced surface. The plasma-enhanced surface has properties of roughness and tacky-ness or adhesive property by nature of the surface exhibiting a chemical bonding group. An underfill material is deposited between the electrical component and substrate. The electrical component can be a flipchip type semiconductor die.

A method of fabricating a semiconductor device includes providing a GaN substrate with an epitaxial layer formed thereover, the epitaxial layer forming a heterojunction with the GaN substrate, the heterojunction supporting a 2-dimensional electron gas (2DEG) channel in the GaN substrate. A composite surface passivation layer is formed over a top surface of the epitaxial layer, wherein the composite surface passivation layer comprises a first passivation layer portion formed proximate to a first region of the GaN device and a second passivation layer portion formed proximate to a second region of the GaN device. The first and second passivation layer portions are disposed laterally adjacent to each other over the epitaxial layer, wherein the first passivation layer portion is formed in a first process and the second passivation layer portion is formed in a second process.

A semiconductor device includes: a substrate; a channel layer; a nitride semiconductor layer that includes a barrier layer; a source electrode; a drain electrode; a gate electrode; and an insulating layer. The gate electrode includes a junction portion and a drain-side protruding portion. The insulating layer includes an in-situ Si.sub.3N.sub.4 film and an ex-situ Si.sub.3N.sub.4 film. At least one of the following is satisfied: (a) the halogen concentration of the in-situ Si.sub.3N.sub.4 film is lower than the halogen concentration of the ex-situ Si.sub.3N.sub.4 film; or (b) the interface oxygen concentration between the in-situ Si.sub.3N.sub.4 film and the nitride semiconductor layer is lower than the interface oxygen concentration between the ex-situ Si.sub.3N.sub.4 film and the in-situ Si.sub.3N.sub.4 film.